KLA Corporation

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Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Generative adversarial networks (GANs) for simulating specimen images
- Patent number 11,961,219
- Issue date Apr 16, 2024
- KLA Corp.
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Water cooled, air bearing based rotating anode x-ray illumination s...
- Patent number 11,955,308
- Issue date Apr 9, 2024
- KLA Corporation
- Michel Pharand
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for measuring high resistivity test samples using voltages o...
- Patent number 11,946,890
- Issue date Apr 2, 2024
- KLA Corporation
- Frederik Westergaard Osterberg
- G01 - MEASURING TESTING
Information Patent Grant
Sensitive optical metrology in scanning and static modes
- Patent number 11,933,717
- Issue date Mar 19, 2024
- KLA Corporation
- Andrew V. Hill
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Shielding strategy for mitigation of stray field for permanent magn...
- Patent number 11,927,549
- Issue date Mar 12, 2024
- KLA Corporation
- Qian Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Context-based defect inspection
- Patent number 11,922,619
- Issue date Mar 5, 2024
- KLA Corporation
- Brian Duffy
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for determining target feature focus in image-bas...
- Patent number 11,921,825
- Issue date Mar 5, 2024
- KLA Corporation
- Etay Lavert
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for pumping laser sustained plasma with an illumi...
- Patent number 11,921,297
- Issue date Mar 5, 2024
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating a high-pressure laser-sustained-plasma lamp
- Patent number 11,923,185
- Issue date Mar 5, 2024
- KLA Corporation
- Mark S. Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection with previous step subtraction
- Patent number 11,921,052
- Issue date Mar 5, 2024
- KLA Corporation
- Robert M. Danen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical metrology tool equipped with modulated illumination sources
- Patent number 11,913,874
- Issue date Feb 27, 2024
- KLA Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Grant
Overlay measurement targets design
- Patent number 11,914,290
- Issue date Feb 27, 2024
- KLA Corporation
- Hong Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automatic teaching of substrate handling for production and process...
- Patent number 11,908,722
- Issue date Feb 20, 2024
- KLA Corporation
- Avner Safrani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Massive overlay metrology sampling with multiple measurement columns
- Patent number 11,899,375
- Issue date Feb 13, 2024
- KLA Corporation
- Jonathan Madsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deep ultraviolet laser using strontium tetraborate for frequency co...
- Patent number 11,899,338
- Issue date Feb 13, 2024
- KLA Corporation
- Yung-Ho Alex Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method to weight defects with co-located modeled faults
- Patent number 11,899,065
- Issue date Feb 13, 2024
- KLA Corporation
- David W. Price
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus, method and computer program product for defect detection...
- Patent number 11,892,493
- Issue date Feb 6, 2024
- KLA Corporation
- Tom Marivoet
- G01 - MEASURING TESTING
Information Patent Grant
Detection and correction of system responses in real-time
- Patent number 11,894,214
- Issue date Feb 6, 2024
- KLA Corporation
- Henning Stoschus
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Laser-sustained plasma lamps with graded concentration of hydroxyl...
- Patent number 11,887,835
- Issue date Jan 30, 2024
- KLA Corporation
- Oleg Khodykin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Setting up care areas for inspection of a specimen
- Patent number 11,887,296
- Issue date Jan 30, 2024
- KLA Corp.
- Raja Barnwal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of measuring misregistration in the manufacture of topograph...
- Patent number 11,880,141
- Issue date Jan 23, 2024
- KLA Corporation
- Daria Negri
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Self-aligning vacuum feed-through for liquid nitrogen
- Patent number 11,879,683
- Issue date Jan 23, 2024
- KLA Corporation
- Sherman Seelinger
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Electromagnet coils made from flexible circuits
- Patent number 11,882,661
- Issue date Jan 23, 2024
- KLA Corporation
- Oscar G. Florendo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Continuous degenerate elliptical retarder for sensitive particle de...
- Patent number 11,879,853
- Issue date Jan 23, 2024
- KLA Corporation
- Xuefeng Liu
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Self-calibrating overlay metrology
- Patent number 11,880,142
- Issue date Jan 23, 2024
- KLA Corporation
- Stilian Pandev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for rendering SEM images and predicting defect im...
- Patent number 11,880,193
- Issue date Jan 23, 2024
- KLA Corporation
- Arpit Yati
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Thick photo resist layer metrology target
- Patent number 11,874,102
- Issue date Jan 16, 2024
- KLA Corporation
- Lingyi Guo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Verification metrology targets and their design
- Patent number 11,874,605
- Issue date Jan 16, 2024
- KLA Corporation
- Michael E. Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for setting up a physics-based model
- Patent number 11,868,689
- Issue date Jan 9, 2024
- KLA Corp.
- Chad Huard
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
High throughput multi-electron beam system
- Patent number 11,869,743
- Issue date Jan 9, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS

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Patents Applicationslast 30 patents

Information Patent Application
Magnetically Opposed, Iron Core Linear Motor Based Motion Stages Fo...
- Publication number 20240120235
- Publication date Apr 11, 2024
- KLA Corporation
- Michel Pharand
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPROVED TARGETS FOR DIFFRACTION-BASED OVERLAY ERROR METROLOGY
- Publication number 20240118606
- Publication date Apr 11, 2024
- KLA Corporation
- Itay GDOR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE PRE-PROCESSING FOR OVERLAY METROLOGY USING DECOMPOSITION TECH...
- Publication number 20240119626
- Publication date Apr 11, 2024
- KLA Corporation
- Nireekshan K. Reddy
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CORRECTING TARGET LOCATIONS FOR TEMPERATURE IN SEMICONDUCTOR APPLIC...
- Publication number 20240120221
- Publication date Apr 11, 2024
- KLA Corporation
- Min-Yeong Moon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA HYPERMODEL INTEGRATED WITH FEATURE-SCALE PROFILE MODEL FOR A...
- Publication number 20240120186
- Publication date Apr 11, 2024
- KLA Corporation
- Chad HUARD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOSAIC OVERLAY TARGETS
- Publication number 20240110780
- Publication date Apr 4, 2024
- KLA Corporation
- Yoel Feler
- G01 - MEASURING TESTING
Information Patent Application
DISTORTION REDUCTION IN A MULTI-BEAM IMAGING SYSTEM
- Publication number 20240112884
- Publication date Apr 4, 2024
- KLA Corporation
- Michael I. Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FRICTIONLESS DESIGN OF HIGH-PRESSURE RECIRCULATION THERMO-PUMP
- Publication number 20240110549
- Publication date Apr 4, 2024
- KLA Corporation
- Anatoly Shchemelinin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION OF ADAPTIVE PATTERNED WORKPIECES WITH DYNAMIC DESIGN AND...
- Publication number 20240112326
- Publication date Apr 4, 2024
- KLA Corporation
- Pavan Kumar Perali
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PULSE-ASSISTED LASER-SUSTAINED PLASMA IN FLOWING HIGH-PRESSURE LIQUIDS
- Publication number 20240105440
- Publication date Mar 28, 2024
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Water Cooled, Air Bearing Based Rotating Anode X-ray Illumination S...
- Publication number 20240105414
- Publication date Mar 28, 2024
- KLA Corporation
- Michel Pharand
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Calibration Of Parametric Measurement Models Based On In-Line Wafer...
- Publication number 20240102941
- Publication date Mar 28, 2024
- KLA Corporation
- Brian C. Lin
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR DETERMINING POST BONDING OVERLAY
- Publication number 20240094642
- Publication date Mar 21, 2024
- KLA Corporation
- Franz Zach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS
- Publication number 20240096586
- Publication date Mar 21, 2024
- KLA Corporation
- Xinrong JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEEP LEARNING MODEL-BASED ALIGNMENT FOR SEMICONDUCTOR APPLICATIONS
- Publication number 20240095935
- Publication date Mar 21, 2024
- KLA Corporation
- Hong Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
HIGH-RESOLUTION EVALUATION OF OPTICAL METROLOGY TARGETS FOR PROCESS...
- Publication number 20240094639
- Publication date Mar 21, 2024
- KLA Corporation
- Nadav Gutman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ACQUIRING ALIGNMENT MEASUREMENTS OF STRUCTURE...
- Publication number 20240093985
- Publication date Mar 21, 2024
- KLA Corporation
- Nimrod Shuall
- G01 - MEASURING TESTING
Information Patent Application
Methods And Systems For Model-less, Scatterometry Based Measurement...
- Publication number 20240085321
- Publication date Mar 14, 2024
- KLA Corporation
- John Hench
- G01 - MEASURING TESTING
Information Patent Application
Confocal Chromatic Metrology for EUV Source Condition Monitoring
- Publication number 20240090110
- Publication date Mar 14, 2024
- KLA Corporation
- Patrick Tae
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
AUTO-FOCUS SENSOR IMPLEMENTATION FOR MULTI-COLUMN MICROSCOPES
- Publication number 20240079203
- Publication date Mar 7, 2024
- KLA Corporation
- Nicholas Petrone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-PITCH GRID OVERLAY TARGET FOR SCANNING OVERLAY METROLOGY
- Publication number 20240068804
- Publication date Feb 29, 2024
- KLA Corporation
- Yuval Lubashevsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NOISE DIAGNOSTICS FOR AN ELECTRON BEAM INSPECTION SYSTEM WITH SWATHING
- Publication number 20240068967
- Publication date Feb 29, 2024
- KLA Corporation
- Bo Xiong
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Back-Illuminated Sensor And A Method Of Manufacturing A Sensor Usin...
- Publication number 20240063248
- Publication date Feb 22, 2024
- KLA Corporation
- Abbas Haddadi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods And Systems For X-Ray Scatterometry Measurements Employing...
- Publication number 20240060914
- Publication date Feb 22, 2024
- KLA Corporation
- Mohsen Mahvash
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHY MASK REPAIR BY SIMULATION OF PHOTORESIST THICKNESS EVOL...
- Publication number 20240061327
- Publication date Feb 22, 2024
- KLA Corporation
- Pradeep Vukkadala
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR MITIGATING OVERLAY DISTORTION PATTERNS CAUSED...
- Publication number 20240053721
- Publication date Feb 15, 2024
- KLA Corporation
- Franz Zach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCATTEROMETRY OVERLAY METROLOGY WITH ORTHOGONAL FINE-PITCH SEGMENTA...
- Publication number 20240053687
- Publication date Feb 15, 2024
- KLA Corporation
- Vladimir Levinski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTING DEFECTS ON SPECIMENS
- Publication number 20240054632
- Publication date Feb 15, 2024
- KLA Corporation
- Li Yu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Methods And Systems For Systematic Error Compensation Across A Flee...
- Publication number 20240053280
- Publication date Feb 15, 2024
- KLA Corporation
- Ming Di
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOLUMINESCENCE FOR SEMICONDUCTOR YIELD RELATED APPLICATIONS
- Publication number 20240044799
- Publication date Feb 8, 2024
- KLA Corporation
- James Xu
- G01 - MEASURING TESTING

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Trademarklast 30 trademarks

Information Trademark
98249422 - PROSPECT
- Serial number 98249422
- Filing date Nov 1, 2023
- KLA Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
97520650 - ICON
- Serial number 97520650
- Filing date Jul 26, 2022
- KLA Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
90678377 - GEO
- Serial number 90678377
- Filing date Apr 28, 2021
- KLA Corporation
- 42 - Scientific and technological services and research and design relating thereto
Information Trademark
90678294 - GLOBAL EXPERT ONSITE
- Serial number 90678294
- Filing date Apr 28, 2021
- KLA Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
90678151 - TENCOR
- Serial number 90678151
- Registration number 7135308
- Filing date Apr 28, 2021
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
90021003 - TERAX
- Serial number 90021003
- Filing date Jun 25, 2020
- KLA Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88901359 - WAFERS LIKE ME
- Serial number 88901359
- Filing date May 5, 2020
- KLA Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88886964 - WIZARD
- Serial number 88886964
- Registration number 6349824
- Filing date Apr 24, 2020
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88840490 - INSPECTWISE
- Serial number 88840490
- Filing date Mar 19, 2020
- KLA Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88840572 - DESIGNWISE
- Serial number 88840572
- Registration number 6343121
- Filing date Mar 19, 2020
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88751673 - UNANO
- Serial number 88751673
- Registration number 6302414
- Filing date Jan 8, 2020
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88735858 - DEFECTWISE
- Serial number 88735858
- Registration number 6273955
- Filing date Dec 20, 2019
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88723858 - ROSETTA
- Serial number 88723858
- Filing date Dec 11, 2019
- KLA Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88683610 - IRARCHER
- Serial number 88683610
- Registration number 6646965
- Filing date Nov 7, 2019
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88677322 - RAIM
- Serial number 88677322
- Registration number 6512096
- Filing date Nov 1, 2019
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88653689 - PROETCH
- Serial number 88653689
- Registration number 6290375
- Filing date Oct 14, 2019
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88614442 - DAIM
- Serial number 88614442
- Filing date Sep 12, 2019
- KLA Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88602844 - SURFSERVER
- Serial number 88602844
- Registration number 6428983
- Filing date Sep 3, 2019
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88190458 - TERABEAM
- Serial number 88190458
- Registration number 6201029
- Filing date Nov 12, 2018
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88979159 - KEEP LOOKING AHEAD
- Serial number 88979159
- Registration number 6191737
- Filing date Sep 11, 2018
- KLA-Tencor Corporation
- 42 - Scientific and technological services and research and design relating thereto
Information Trademark
88112179 - KEEP LOOKING AHEAD
- Serial number 88112179
- Registration number 6493711
- Filing date Sep 11, 2018
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87923948 - MACH
- Serial number 87923948
- Registration number 6091521
- Filing date May 16, 2018
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87923976 - SPOT
- Serial number 87923976
- Registration number 6639495
- Filing date May 16, 2018
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87896185 - AXION
- Serial number 87896185
- Registration number 6228436
- Filing date Apr 27, 2018
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87472061 - I-PAT
- Serial number 87472061
- Registration number 6251635
- Filing date Jun 1, 2017
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments

KLA Corporation

Organization

Patents Grantslast 30 patents

Generative adversarial networks (GANs) for simulating specimen images

Water cooled, air bearing based rotating anode x-ray illumination s...

Method for measuring high resistivity test samples using voltages o...

Sensitive optical metrology in scanning and static modes

Shielding strategy for mitigation of stray field for permanent magn...

Context-based defect inspection

System and method for determining target feature focus in image-bas...

System and method for pumping laser sustained plasma with an illumi...

Method of fabricating a high-pressure laser-sustained-plasma lamp

Inspection with previous step subtraction

Optical metrology tool equipped with modulated illumination sources

Overlay measurement targets design

Automatic teaching of substrate handling for production and process...

Massive overlay metrology sampling with multiple measurement columns

Deep ultraviolet laser using strontium tetraborate for frequency co...

System and method to weight defects with co-located modeled faults

Apparatus, method and computer program product for defect detection...

Detection and correction of system responses in real-time

Laser-sustained plasma lamps with graded concentration of hydroxyl...

Setting up care areas for inspection of a specimen

Method of measuring misregistration in the manufacture of topograph...

Self-aligning vacuum feed-through for liquid nitrogen

Electromagnet coils made from flexible circuits

Continuous degenerate elliptical retarder for sensitive particle de...

Self-calibrating overlay metrology

System and method for rendering SEM images and predicting defect im...

Thick photo resist layer metrology target

Verification metrology targets and their design

Systems and methods for setting up a physics-based model

High throughput multi-electron beam system

Patents Applicationslast 30 patents

Magnetically Opposed, Iron Core Linear Motor Based Motion Stages Fo...

IMPROVED TARGETS FOR DIFFRACTION-BASED OVERLAY ERROR METROLOGY

IMAGE PRE-PROCESSING FOR OVERLAY METROLOGY USING DECOMPOSITION TECH...

CORRECTING TARGET LOCATIONS FOR TEMPERATURE IN SEMICONDUCTOR APPLIC...

PLASMA HYPERMODEL INTEGRATED WITH FEATURE-SCALE PROFILE MODEL FOR A...

MOSAIC OVERLAY TARGETS

DISTORTION REDUCTION IN A MULTI-BEAM IMAGING SYSTEM

FRICTIONLESS DESIGN OF HIGH-PRESSURE RECIRCULATION THERMO-PUMP

INSPECTION OF ADAPTIVE PATTERNED WORKPIECES WITH DYNAMIC DESIGN AND...

PULSE-ASSISTED LASER-SUSTAINED PLASMA IN FLOWING HIGH-PRESSURE LIQUIDS

Water Cooled, Air Bearing Based Rotating Anode X-ray Illumination S...

Calibration Of Parametric Measurement Models Based On In-Line Wafer...

SYSTEM AND METHOD FOR DETERMINING POST BONDING OVERLAY

METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS

DEEP LEARNING MODEL-BASED ALIGNMENT FOR SEMICONDUCTOR APPLICATIONS

HIGH-RESOLUTION EVALUATION OF OPTICAL METROLOGY TARGETS FOR PROCESS...

SYSTEM AND METHOD FOR ACQUIRING ALIGNMENT MEASUREMENTS OF STRUCTURE...

Methods And Systems For Model-less, Scatterometry Based Measurement...

Confocal Chromatic Metrology for EUV Source Condition Monitoring

AUTO-FOCUS SENSOR IMPLEMENTATION FOR MULTI-COLUMN MICROSCOPES

MULTI-PITCH GRID OVERLAY TARGET FOR SCANNING OVERLAY METROLOGY

NOISE DIAGNOSTICS FOR AN ELECTRON BEAM INSPECTION SYSTEM WITH SWATHING

Back-Illuminated Sensor And A Method Of Manufacturing A Sensor Usin...

Methods And Systems For X-Ray Scatterometry Measurements Employing...

LITHOGRAPHY MASK REPAIR BY SIMULATION OF PHOTORESIST THICKNESS EVOL...

SYSTEM AND METHOD FOR MITIGATING OVERLAY DISTORTION PATTERNS CAUSED...

SCATTEROMETRY OVERLAY METROLOGY WITH ORTHOGONAL FINE-PITCH SEGMENTA...

DETECTING DEFECTS ON SPECIMENS

Methods And Systems For Systematic Error Compensation Across A Flee...

PHOTOLUMINESCENCE FOR SEMICONDUCTOR YIELD RELATED APPLICATIONS

Trademarklast 30 trademarks

98249422 - PROSPECT

97520650 - ICON

90678377 - GEO

90678294 - GLOBAL EXPERT ONSITE

90678151 - TENCOR

90021003 - TERAX

88901359 - WAFERS LIKE ME

88886964 - WIZARD

88840490 - INSPECTWISE

88840572 - DESIGNWISE

88751673 - UNANO

88735858 - DEFECTWISE

88723858 - ROSETTA

88683610 - IRARCHER

88677322 - RAIM