KLA-Tencor Corporation

Organization

San Jose, CA, US

Ticker Symbols

NASDAQ:KLAC

OPTICAL INSTRUMENTS & LENSES
Business Address
ONE TECHNOLOGY DRIVE MILPITAS CA 95035 4088756000
Mailing Address
ONE TECHNOLOGY DRIVE MILPITAS CA 95035
State Location
CA
State of Incorporation
DE

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Reducing device overlay errors
- Patent number 11,971,664
- Issue date Apr 30, 2024
- KLA-Tencor Corporation
- Liran Yerushalmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process monitoring of deep structures with X-ray scatterometry
- Patent number 11,955,391
- Issue date Apr 9, 2024
- KLA-Tencor Corporation
- Antonio Arion Gellineau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical near-field metrology
- Patent number 11,815,347
- Issue date Nov 14, 2023
- KLA-Tencor Corporation
- Yuri Paskover
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement of overlay error using device inspection system
- Patent number 11,784,097
- Issue date Oct 10, 2023
- KLA-Tencor Corporation
- Choon Hoong Hoo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Device-like metrology targets
- Patent number 11,709,433
- Issue date Jul 25, 2023
- KLA-Tencor Corporation
- Vladimir Levinski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cross layer common-unique analysis for nuisance filtering
- Patent number 11,694,327
- Issue date Jul 4, 2023
- KLA-Tencor Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Accelerated training of a machine learning based model for semicond...
- Patent number 11,580,375
- Issue date Feb 14, 2023
- KLA-Tencor Corp.
- Kris Bhaskar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measuring thin films on grating and bandgap on grating
- Patent number 11,555,689
- Issue date Jan 17, 2023
- KLA-Tencor Corporation
- Houssam Chouaib
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic amelioration of misregistration measurement
- Patent number 11,551,980
- Issue date Jan 10, 2023
- KLA-Tencor Corporation
- Roie Volkovich
- G01 - MEASURING TESTING
Information Patent Grant
Reduction or elimination of pattern placement error in metrology me...
- Patent number 11,537,043
- Issue date Dec 27, 2022
- KLA-Tencor Corporation
- Yoel Feler
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
3D microscope including insertable components to provide multiple i...
- Patent number 11,536,940
- Issue date Dec 27, 2022
- KLA-Tencor Corporation
- James Jianguo Xu
- G02 - OPTICS
Information Patent Grant
Automated accuracy-oriented model optimization system for critical...
- Patent number 11,537,837
- Issue date Dec 27, 2022
- KLA-Tencor Corporation
- Yuerui Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for real time measurement control
- Patent number 11,519,869
- Issue date Dec 6, 2022
- KLA-Tencor Corporation
- Antonio Arion Gellineau
- G01 - MEASURING TESTING
Information Patent Grant
Transmission small-angle X-ray scattering metrology system
- Patent number 11,519,719
- Issue date Dec 6, 2022
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Nuisance mining for novel defect discovery
- Patent number 11,514,357
- Issue date Nov 29, 2022
- KLA-Tencor Corporation
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Determining critical parameters using a high-dimensional variable s...
- Patent number 11,456,194
- Issue date Sep 27, 2022
- KLA-Tencor Corporation
- Wei Chang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Vacuum hold-down apparatus for flattening bowed semiconductor wafers
- Patent number 11,430,687
- Issue date Aug 30, 2022
- KLA-Tencor Corporation
- Ariel Hildesheim
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Automatic optimization of measurement accuracy through advanced mac...
- Patent number 11,380,594
- Issue date Jul 5, 2022
- KLA-Tencor Corporation
- Tianrong Zhan
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Simultaneous multi-directional laser wafer inspection
- Patent number 11,366,069
- Issue date Jun 21, 2022
- KLA-Tencor Corporation
- Guoheng Zhao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Data-driven misregistration parameter configuration and measurement...
- Patent number 11,353,493
- Issue date Jun 7, 2022
- KLA-Tencor Corporation
- Shlomit Katz
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for semiconductor metrology based on polychroma...
- Patent number 11,333,621
- Issue date May 17, 2022
- KLA-Tencor Corporation
- Daniel Wack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process control metrology
- Patent number 11,313,809
- Issue date Apr 26, 2022
- KLA-Tencor Corporation
- Stilian Ivanov Pandev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bright and clean x-ray source for x-ray based metrology
- Patent number 11,317,500
- Issue date Apr 26, 2022
- KLA-Tencor Corporation
- Oleg Khodykin
- G01 - MEASURING TESTING
Information Patent Grant
Topographic phase control for overlay measurement
- Patent number 11,314,173
- Issue date Apr 26, 2022
- KLA-Tencor Corporation
- Vladimir Levinski
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for optimizing focus for imaging-based overlay...
- Patent number 11,313,669
- Issue date Apr 26, 2022
- KLA-Tencor Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Grant
Space charge insensitive electron gun designs
- Patent number 11,302,510
- Issue date Apr 12, 2022
- KLA-Tencor Corporation
- Christopher Sears
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for measuring and correcting misregistration between layers...
- Patent number 11,302,544
- Issue date Apr 12, 2022
- KLA-Tencor Corporation
- Roie Volkovich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3D microscope including insertable components to provide multiple i...
- Patent number 11,294,161
- Issue date Apr 5, 2022
- KLA-Tencor Corporation
- James Jianguo Xu
- G02 - OPTICS
Information Patent Grant
Broad band plasma inspection based on a nuisance map
- Patent number 11,295,432
- Issue date Apr 5, 2022
- KLA-Tencor Corporation
- Kaushik Reddy Vemareddy
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for optical three dimensional topography measurement
- Patent number 11,287,248
- Issue date Mar 29, 2022
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING

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Patents Applicationslast 30 patents

Information Patent Application
REDUCTION OR ELIMINATION OF PATTERN PLACEMENT ERROR IN METROLOGY ME...
- Publication number 20230099105
- Publication date Mar 30, 2023
- KLA-Tencor Corporation
- Yoel Feler
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
3D Microscope Including Insertable Components To Provide Multiple I...
- Publication number 20230087619
- Publication date Mar 23, 2023
- KLA-Tencor Corporation
- James Jianguo Xu
- G02 - OPTICS
Information Patent Application
METHOD FOR MEASURING AND CORRECTING MISREGISTRATION BETWEEN LAYERS...
- Publication number 20220199437
- Publication date Jun 23, 2022
- KLA-Tencor Corporation
- Roie Volkovich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE-LIKE METROLOGY TARGETS
- Publication number 20220197152
- Publication date Jun 23, 2022
- KLA-Tencor Corporation
- Vladimir Levinski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Machine Learning in Metrology Measurements
- Publication number 20220107175
- Publication date Apr 7, 2022
- KLA-Tencor Corporation
- Eran AMIT
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION OF RETICLES USING MACHINE LEARNING
- Publication number 20220084179
- Publication date Mar 17, 2022
- KLA-Tencor Corporation
- Hawren Fang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CROSS LAYER COMMON-UNIQUE ANALYSIS FOR NUISANCE FILTERING
- Publication number 20220012866
- Publication date Jan 13, 2022
- KLA-Tencor Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Single Cell Grey Scatterometry Overlay Targets and Their Measuremen...
- Publication number 20210373445
- Publication date Dec 2, 2021
- KLA-Tencor Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Application
Topographic Phase Control For Overlay Measurement
- Publication number 20210255551
- Publication date Aug 19, 2021
- KLA-Tencor Corporation
- Vladimir Levinski
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
VACUUM HOLD-DOWN APPARATUS FOR FLATTENING BOWED SEMICONDUCTOR WAFERS
- Publication number 20210217645
- Publication date Jul 15, 2021
- KLA-Tencor Corporation
- Ariel Hildesheim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACCURACY IMPROVEMENTS IN OPTICAL METROLOGY
- Publication number 20210175132
- Publication date Jun 10, 2021
- KLA-Tencor Corporation
- Barak Bringoltz
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Measurement of Overlay Error Using Device Inspection System
- Publication number 20210159128
- Publication date May 27, 2021
- KLA-Tencor Corporation
- Choon Hoong Hoo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
REDUCTION OR ELIMINATION OF PATTERN PLACEMENT ERROR IN METROLOGY ME...
- Publication number 20210149296
- Publication date May 20, 2021
- KLA-Tencor Corporation
- Yoel Feler
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF MEASURING MISREGISTRATION OF SEMICONDUCTOR DEVICES
- Publication number 20210149314
- Publication date May 20, 2021
- KLA-Tencor Corporation
- Roie VOLKOVICH
- G01 - MEASURING TESTING
Information Patent Application
3D MICROSCOPE INCLUDING INSERTABLE COMPONENTS TO PROVIDE MULTIPLE I...
- Publication number 20210088768
- Publication date Mar 25, 2021
- KLA-Tencor Corporation
- James Jianguo Xu
- G02 - OPTICS
Information Patent Application
3D MICROSCOPE INCLUDING INSERTABLE COMPONENTS TO PROVIDE MULTIPLE I...
- Publication number 20210080710
- Publication date Mar 18, 2021
- KLA-Tencor Corporation
- James Jianguo Xu
- G02 - OPTICS
Information Patent Application
DATA-DRIVEN MISREGISTRATION PARAMETER CONFIGURATION AND MEASUREMENT...
- Publication number 20210011073
- Publication date Jan 14, 2021
- KLA-Tencor Corporation
- Shlomit Katz
- G05 - CONTROLLING REGULATING
Information Patent Application
Expediting Spectral Measurement in Semiconductor Device Fabrication
- Publication number 20200393373
- Publication date Dec 17, 2020
- KLA-Tencor Corporation
- Vincent Immer
- G01 - MEASURING TESTING
Information Patent Application
OVERLAY MEASUREMENT USING MULTIPLE WAVELENGTHS
- Publication number 20200381312
- Publication date Dec 3, 2020
- KLA-Tencor Corporation
- Yuval Lamhot
- G01 - MEASURING TESTING
Information Patent Application
High-Brightness Illumination Source for Optical Metrology
- Publication number 20200333612
- Publication date Oct 22, 2020
- KLA-Tencor Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Application
SIMULTANEOUS MULTI-DIRECTIONAL LASER WAFER INSPECTION
- Publication number 20200333262
- Publication date Oct 22, 2020
- KLA-Tencor Corporation
- Guoheng Zhao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Inspection System with Grounded Capacitive Sample Proximity Sensor
- Publication number 20200326211
- Publication date Oct 15, 2020
- KLA-Tencor Corporation
- Yang Xie
- G01 - MEASURING TESTING
Information Patent Application
Die Screening Using Inline Defect Information
- Publication number 20200312778
- Publication date Oct 1, 2020
- KLA-Tencor Corporation
- Alex Teng Song Lim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR MEASURING AND CORRECTING MISREGISTRATION BETWEEN LAYERS...
- Publication number 20200312687
- Publication date Oct 1, 2020
- KLA-Tencor Corporation
- Roie Volkovich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CORRELATING SEM AND OPTICAL IMAGES FOR WAFER NOISE NUISANCE IDENTIF...
- Publication number 20200292468
- Publication date Sep 17, 2020
- KLA-Tencor Corporation
- Qiang Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DYNAMIC AMELIORATION OF MISREGISTRATION MEASUREMENT
- Publication number 20200286794
- Publication date Sep 10, 2020
- KLA-Tencor Corporation
- Roie Volkovich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOCATHODE EMITTER SYSTEM THAT GENERATES MULTIPLE ELECTRON BEAMS
- Publication number 20200279713
- Publication date Sep 3, 2020
- KLA-Tencor Corporation
- Gildardo R. Delgado
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Visualization of Three-Dimensional Semiconductor Structures
- Publication number 20200271595
- Publication date Aug 27, 2020
- KLA-Tencor Corporation
- Aaron J. Rosenberg
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF MEASURING MISREGISTRATION OF SEMICONDUCTOR DEVICES
- Publication number 20200271596
- Publication date Aug 27, 2020
- KLA-Tencor Corporation
- Roie VOLKOVICH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Air Scattering Standard for Light Scattering Based Optical Instrume...
- Publication number 20200264099
- Publication date Aug 20, 2020
- KLA-Tencor Corporation
- Frank Li
- G01 - MEASURING TESTING

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Trademarklast 30 trademarks

Information Trademark
88462960 - SHAPESHIFT
- Serial number 88462960
- Filing date Jun 6, 2019
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88285787 - VOYAGER
- Serial number 88285787
- Registration number 5839199
- Filing date Feb 1, 2019
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88190458 - TERABEAM
- Serial number 88190458
- Registration number 6201029
- Filing date Nov 12, 2018
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88142130 - KLA+
- Serial number 88142130
- Registration number 5858762
- Filing date Oct 3, 2018
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88979159 - KEEP LOOKING AHEAD
- Serial number 88979159
- Registration number 6191737
- Filing date Sep 11, 2018
- KLA-Tencor Corporation
- 42 - Scientific and technological services and research and design relating thereto
Information Trademark
88112179 - KEEP LOOKING AHEAD
- Serial number 88112179
- Registration number 6493711
- Filing date Sep 11, 2018
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88041391 - KLA
- Serial number 88041391
- Registration number 5909443
- Filing date Jul 17, 2018
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87923948 - MACH
- Serial number 87923948
- Registration number 6091521
- Filing date May 16, 2018
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87923976 - SPOT
- Serial number 87923976
- Registration number 6639495
- Filing date May 16, 2018
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87921923 - YELLOWSTONE
- Serial number 87921923
- Filing date May 15, 2018
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87896185 - AXION
- Serial number 87896185
- Registration number 6228436
- Filing date Apr 27, 2018
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87472061 - I-PAT
- Serial number 87472061
- Registration number 6251635
- Filing date Jun 1, 2017
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87176971 - PROAIM
- Serial number 87176971
- Filing date Sep 20, 2016
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87074433 - XSIDE
- Serial number 87074433
- Filing date Jun 16, 2016
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
86935805 - FLASHSCAN
- Serial number 86935805
- Registration number 5402219
- Filing date Mar 10, 2016
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
86818669 - KTDESIGNWORKS
- Serial number 86818669
- Registration number 5448920
- Filing date Nov 12, 2015
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
86692587 - 5D PATTERNING CONTROL SOLUTION
- Serial number 86692587
- Registration number 5228713
- Filing date Jul 14, 2015
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
86692558 - 5D ANALYZER
- Serial number 86692558
- Registration number 5074408
- Filing date Jul 14, 2015
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
86652230 - CIRCL-FOCUS
- Serial number 86652230
- Filing date Jun 4, 2015
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
86652199 - CIRCL-EDGE
- Serial number 86652199
- Filing date Jun 4, 2015
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
86591516 - CIRCL-AP
- Serial number 86591516
- Filing date Apr 8, 2015
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
86399095 - VALUE@VELOCITY
- Serial number 86399095
- Filing date Sep 18, 2014
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
86396566 - BRI
- Serial number 86396566
- Filing date Sep 16, 2014
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
86396509 - ASI
- Serial number 86396509
- Filing date Sep 16, 2014
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
86386785 - DISCOVERY AT THE SPEED OF LIGHT
- Serial number 86386785
- Filing date Sep 5, 2014
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
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86367971 - 3DWAVE
- Serial number 86367971
- Filing date Aug 15, 2014
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
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85886985 - ENABLING THE DIGITAL AGE
- Serial number 85886985
- Filing date Mar 26, 2013
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
85887013 - XCRACK
- Serial number 85887013
- Filing date Mar 26, 2013
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
85868933 - XPORT
- Serial number 85868933
- Filing date Mar 6, 2013
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
85693662 - APVI
- Serial number 85693662
- Registration number 4351617
- Filing date Aug 2, 2012
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments

KLA-Tencor Corporation

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Patents Grantslast 30 patents

Reducing device overlay errors

Process monitoring of deep structures with X-ray scatterometry

Optical near-field metrology

Measurement of overlay error using device inspection system

Device-like metrology targets

Cross layer common-unique analysis for nuisance filtering

Accelerated training of a machine learning based model for semicond...

Measuring thin films on grating and bandgap on grating

Dynamic amelioration of misregistration measurement

Reduction or elimination of pattern placement error in metrology me...

3D microscope including insertable components to provide multiple i...

Automated accuracy-oriented model optimization system for critical...

Methods and systems for real time measurement control

Transmission small-angle X-ray scattering metrology system

Nuisance mining for novel defect discovery

Determining critical parameters using a high-dimensional variable s...

Vacuum hold-down apparatus for flattening bowed semiconductor wafers

Automatic optimization of measurement accuracy through advanced mac...

Simultaneous multi-directional laser wafer inspection

Data-driven misregistration parameter configuration and measurement...

Methods and systems for semiconductor metrology based on polychroma...

Process control metrology

Bright and clean x-ray source for x-ray based metrology

Topographic phase control for overlay measurement

Systems and methods for optimizing focus for imaging-based overlay...

Space charge insensitive electron gun designs

Method for measuring and correcting misregistration between layers...

3D microscope including insertable components to provide multiple i...

Broad band plasma inspection based on a nuisance map

Method and system for optical three dimensional topography measurement

Patents Applicationslast 30 patents

REDUCTION OR ELIMINATION OF PATTERN PLACEMENT ERROR IN METROLOGY ME...

3D Microscope Including Insertable Components To Provide Multiple I...

METHOD FOR MEASURING AND CORRECTING MISREGISTRATION BETWEEN LAYERS...

DEVICE-LIKE METROLOGY TARGETS

Machine Learning in Metrology Measurements

INSPECTION OF RETICLES USING MACHINE LEARNING

CROSS LAYER COMMON-UNIQUE ANALYSIS FOR NUISANCE FILTERING

Single Cell Grey Scatterometry Overlay Targets and Their Measuremen...

Topographic Phase Control For Overlay Measurement

VACUUM HOLD-DOWN APPARATUS FOR FLATTENING BOWED SEMICONDUCTOR WAFERS

ACCURACY IMPROVEMENTS IN OPTICAL METROLOGY

Measurement of Overlay Error Using Device Inspection System

REDUCTION OR ELIMINATION OF PATTERN PLACEMENT ERROR IN METROLOGY ME...

METHOD OF MEASURING MISREGISTRATION OF SEMICONDUCTOR DEVICES

3D MICROSCOPE INCLUDING INSERTABLE COMPONENTS TO PROVIDE MULTIPLE I...

3D MICROSCOPE INCLUDING INSERTABLE COMPONENTS TO PROVIDE MULTIPLE I...

DATA-DRIVEN MISREGISTRATION PARAMETER CONFIGURATION AND MEASUREMENT...

Expediting Spectral Measurement in Semiconductor Device Fabrication

OVERLAY MEASUREMENT USING MULTIPLE WAVELENGTHS

High-Brightness Illumination Source for Optical Metrology

SIMULTANEOUS MULTI-DIRECTIONAL LASER WAFER INSPECTION

Inspection System with Grounded Capacitive Sample Proximity Sensor

Die Screening Using Inline Defect Information

METHOD FOR MEASURING AND CORRECTING MISREGISTRATION BETWEEN LAYERS...

CORRELATING SEM AND OPTICAL IMAGES FOR WAFER NOISE NUISANCE IDENTIF...

DYNAMIC AMELIORATION OF MISREGISTRATION MEASUREMENT

PHOTOCATHODE EMITTER SYSTEM THAT GENERATES MULTIPLE ELECTRON BEAMS

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