KLA-TENCOR MIE GMBH

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Weilburg, DE

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Method for focusing an object plane and optical assembly
- Patent number 9,091,525
- Issue date Jul 28, 2015
- KLA-Tencor MIE GmbH
- Wolfgang Sulik
- G01 - MEASURING TESTING
Information Patent Grant
Method for inspection and detection of defects on surfaces of disc-...
- Patent number 8,705,837
- Issue date Apr 22, 2014
- KLA-Tencor MIE GmbH
- Detlef Michelsson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Device for determining the position of at least one structure on an...
- Patent number 8,582,113
- Issue date Nov 12, 2013
- KLA-Tencor MIE GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for the optical inspection of wafers
- Patent number 8,451,440
- Issue date May 28, 2013
- KLA-Tencor MIE GmbH
- Kurt Hahn
- G01 - MEASURING TESTING
Information Patent Grant
Method for the reproducible determination of the position of struct...
- Patent number 8,352,886
- Issue date Jan 8, 2013
- KLA-Tencor MIE GmbH
- Frank Laske
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for the optical inspection of wafers
- Patent number 8,305,587
- Issue date Nov 6, 2012
- KLA-Tencor MIE GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Grant
Method of learning a knowledge-based database used in automatic def...
- Patent number 7,623,698
- Issue date Nov 24, 2009
- KLA-Tencor MIE GmbH
- Dirk Soenksen
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
Method for Inspection and Detection of Defects on Surfaces of Disc-...
- Publication number 20120163698
- Publication date Jun 28, 2012
- KLA-TENCOR MIE GMBH
- Detlef Michelsson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for the Reproducible Determination of the Position of Struct...
- Publication number 20110225554
- Publication date Sep 15, 2011
- KLA-TENCOR MIE GMBH
- Frank Laske
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for focusing an object plane and optical assembly
- Publication number 20110205553
- Publication date Aug 25, 2011
- KLA-TENCOR MIE GMBH
- Wolfgang Sulik
- G02 - OPTICS
Information Patent Application
Apparatus for the optical inspection of wafers
- Publication number 20110090483
- Publication date Apr 21, 2011
- KLA-TENCOR MIE GMBH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Metrology system and method for monitoring and correcting system ge...
- Publication number 20100302555
- Publication date Dec 2, 2010
- KLA-TENCOR MIE GMBH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for the Optical Inspection of Wafers
- Publication number 20100295938
- Publication date Nov 25, 2010
- KLA-TENCOR MIE GMBH
- Kurt Hahn
- G01 - MEASURING TESTING

KLA-TENCOR MIE GMBH

Organization

Patents Grantslast 30 patents

Method for focusing an object plane and optical assembly

Method for inspection and detection of defects on surfaces of disc-...

Device for determining the position of at least one structure on an...

Apparatus for the optical inspection of wafers

Method for the reproducible determination of the position of struct...

Apparatus for the optical inspection of wafers

Method of learning a knowledge-based database used in automatic def...

Patents Applicationslast 30 patents

Method for Inspection and Detection of Defects on Surfaces of Disc-...

Method for the Reproducible Determination of the Position of Struct...

Method for focusing an object plane and optical assembly

Apparatus for the optical inspection of wafers

Metrology system and method for monitoring and correcting system ge...

Apparatus for the Optical Inspection of Wafers

Trademarklast 30 trademarks