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Makoto ANDO
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Kawasaki-shi, Kanagawa-ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus for plasma processing
Patent number
6,910,440
Issue date
Jun 28, 2005
Tokyo Electron Ltd.
Nobuo Ishii
Information
Patent Grant
Plasma processing system
Patent number
6,823,816
Issue date
Nov 30, 2004
Tokyo Electron Limited
Nobuo Ishii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
6,695,948
Issue date
Feb 24, 2004
Tokyo Electron Limited
Nobuo Ishii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus with annular waveguide
Patent number
6,670,741
Issue date
Dec 30, 2003
Tokyo Electron Limited
Nobuo Ishii
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method for producing material of electronic device
Publication number
20050233599
Publication date
Oct 20, 2005
TOKYO ELECTRON LIMITED
Takuya Sugawara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Plasma processing apparatus
Publication number
20050211382
Publication date
Sep 29, 2005
Tokyo Electron Ltd.
Nobuo Ishii
Information
Patent Application
Plasma processing system
Publication number
20040069229
Publication date
Apr 15, 2004
TOKYO ELECTRON LIMITED
Nobuo Ishii
H01 - BASIC ELECTRIC ELEMENTS
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last 30 trademarks