Makoto ANDO

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Organization

Kawasaki-shi, Kanagawa-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for plasma processing
- Patent number 6,910,440
- Issue date Jun 28, 2005
- Tokyo Electron Ltd.
- Nobuo Ishii
Information Patent Grant
Plasma processing system
- Patent number 6,823,816
- Issue date Nov 30, 2004
- Tokyo Electron Limited
- Nobuo Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 6,695,948
- Issue date Feb 24, 2004
- Tokyo Electron Limited
- Nobuo Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus with annular waveguide
- Patent number 6,670,741
- Issue date Dec 30, 2003
- Tokyo Electron Limited
- Nobuo Ishii
- H01 - BASIC ELECTRIC ELEMENTS

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Patents Applicationslast 30 patents

Information Patent Application
Method for producing material of electronic device
- Publication number 20050233599
- Publication date Oct 20, 2005
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma processing apparatus
- Publication number 20050211382
- Publication date Sep 29, 2005
- Tokyo Electron Ltd.
- Nobuo Ishii
Information Patent Application
Plasma processing system
- Publication number 20040069229
- Publication date Apr 15, 2004
- TOKYO ELECTRON LIMITED
- Nobuo Ishii
- H01 - BASIC ELECTRIC ELEMENTS