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West Lothian, GB
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Patents Grants
last 30 patents
Information
Patent Grant
Method for detecting defects in thin film layers
Patent number
11,740,185
Issue date
Aug 29, 2023
MEMSSTAR LIMITED
Anthony O'Hara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vapour etch of silicon dioxide with improved selectivity
Patent number
10,354,884
Issue date
Jul 16, 2019
MEMSSTAR LIMITED
Anthony O'Hara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Selectivity in a xenon difluoride etch process
Patent number
10,173,894
Issue date
Jan 8, 2019
MEMSSTAR LIMITED
Anthony O'Hara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of etching a sacrificial silicon oxide layer
Patent number
8,679,354
Issue date
Mar 25, 2014
Memsstar Limited
Anthony O'Hara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF MANUFACTURING A MICROSTRUCTURE
Publication number
20240239649
Publication date
Jul 18, 2024
MEMSSTAR LIMITED
Anthony O'HARA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MANUFACTURING A MICROSTRUCTURE
Publication number
20220388837
Publication date
Dec 8, 2022
MEMSSTAR LIMITED
Anthony O'HARA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
A METHOD FOR DETECTING DEFECTS IN THIN FILM LAYERS
Publication number
20210341393
Publication date
Nov 4, 2021
MEMSSTAR LIMITED
Anthony O'HARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVITY IN A XENON DIFLUORIDE ETCH PROCESS
Publication number
20180029883
Publication date
Feb 1, 2018
MEMSSTAR LIMITED
Anthony O'HARA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEPOSITION TECHNIQUE FOR DEPOSITING A COATING ON A DEVICE
Publication number
20140308822
Publication date
Oct 16, 2014
MEMSSTAR LIMITED
Anthony O'Hara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
VAPOUR ETCH OF SILICON DIOXIDE WITH IMPROVED SELECTIVITY
Publication number
20140017901
Publication date
Jan 16, 2014
MEMSSTAR LIMITED
Anthony O'Hara
B81 - MICRO-STRUCTURAL TECHNOLOGY
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