MEMSSTAR LIMITED

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West Lothian, GB

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Patents Grantslast 30 patents

Information Patent Grant
Method for detecting defects in thin film layers
- Patent number 11,740,185
- Issue date Aug 29, 2023
- MEMSSTAR LIMITED
- Anthony O'Hara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapour etch of silicon dioxide with improved selectivity
- Patent number 10,354,884
- Issue date Jul 16, 2019
- MEMSSTAR LIMITED
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selectivity in a xenon difluoride etch process
- Patent number 10,173,894
- Issue date Jan 8, 2019
- MEMSSTAR LIMITED
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of etching a sacrificial silicon oxide layer
- Patent number 8,679,354
- Issue date Mar 25, 2014
- Memsstar Limited
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY

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Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING A MICROSTRUCTURE
- Publication number 20220388837
- Publication date Dec 8, 2022
- MEMSSTAR LIMITED
- Anthony O'HARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A METHOD FOR DETECTING DEFECTS IN THIN FILM LAYERS
- Publication number 20210341393
- Publication date Nov 4, 2021
- MEMSSTAR LIMITED
- Anthony O'HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVITY IN A XENON DIFLUORIDE ETCH PROCESS
- Publication number 20180029883
- Publication date Feb 1, 2018
- MEMSSTAR LIMITED
- Anthony O'HARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEPOSITION TECHNIQUE FOR DEPOSITING A COATING ON A DEVICE
- Publication number 20140308822
- Publication date Oct 16, 2014
- MEMSSTAR LIMITED
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VAPOUR ETCH OF SILICON DIOXIDE WITH IMPROVED SELECTIVITY
- Publication number 20140017901
- Publication date Jan 16, 2014
- MEMSSTAR LIMITED
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY