Nanometrics Incorporated

Organization

Milpitas, CA, US

Ticker Symbols

NASDAQ:NANO

MEASURING & CONTROLLING DEVICES, NEC
Business Address
1550 BUCKEYE DRIVE MILPITAS CA 95035 408-435-9600
Mailing Address
1550 BUCKEYE DRIVE MILPITAS CA 95035
State Location
CA
State of Incorporation
DE

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Interferometric characterization of surface topography
- Patent number 10,488,184
- Issue date Nov 26, 2019
- Nanometrics Incorporated
- Kevin Eduard Heidrich
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Local purge within metrology and inspection systems
- Patent number 10,451,542
- Issue date Oct 22, 2019
- Nanometrics Incorporated
- Paul A. Doyle
- G01 - MEASURING TESTING
Information Patent Grant
Correction of angular error of plane-of-incidence azimuth of optica...
- Patent number 10,296,554
- Issue date May 21, 2019
- Nanometrics Incorporated
- Pedro Vagos
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning white-light interferometry system for characterization of...
- Patent number 10,288,408
- Issue date May 14, 2019
- Nanometrics Incorporated
- Nigel P. Smith
- G02 - OPTICS
Information Patent Grant
Deconvolution to reduce the effective spot size of a spectroscopic...
- Patent number 10,274,367
- Issue date Apr 30, 2019
- Nanometrics Incorporated
- Amit Shachaf
- G01 - MEASURING TESTING
Information Patent Grant
Via characterization for BCD and depth metrology
- Patent number 10,254,110
- Issue date Apr 9, 2019
- Nanometrics Incorporated
- Ke Xiao
- G01 - MEASURING TESTING
Information Patent Grant
Image based overlay measurement with finite gratings
- Patent number 10,107,621
- Issue date Oct 23, 2018
- Nanometrics Incorporated
- Nigel P. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical metrology with purged reference chip
- Patent number 10,082,461
- Issue date Sep 25, 2018
- Nanometrics Incorporated
- Andrew S. Klassen
- G01 - MEASURING TESTING
Information Patent Grant
3D target for monitoring multiple patterning process
- Patent number 10,061,210
- Issue date Aug 28, 2018
- Nanometrics Incorporated
- Jiangtao Hu
- G01 - MEASURING TESTING
Information Patent Grant
Optical metrology using differential fitting
- Patent number 9,995,689
- Issue date Jun 12, 2018
- Nanometrics Incorporated
- Pedro Vagos
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Protected lens cover plate for an optical metrology device
- Patent number 9,958,673
- Issue date May 1, 2018
- Nanometrics Incorporated
- Jason Robert Shields
- G02 - OPTICS
Information Patent Grant
Deconvolution to reduce the effective spot size of a spectroscopic...
- Patent number 9,958,327
- Issue date May 1, 2018
- Nanometrics Incorporated
- Amit Shachaf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Focusing system with filter for open or closed loop control
- Patent number 9,903,806
- Issue date Feb 27, 2018
- Nanometrics Incorporated
- Amit Shachaf
- G02 - OPTICS
Information Patent Grant
Optical metrology system for spectral imaging of a sample
- Patent number 9,846,122
- Issue date Dec 19, 2017
- Nanometrics Incorporated
- Andrzej Buczkowski
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Optical critical dimension target design
- Patent number 9,824,176
- Issue date Nov 21, 2017
- Nanometrics Incorporated
- Jiangtao Hu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Simultaneous measurement of multiple overlay errors using diffracti...
- Patent number 9,547,244
- Issue date Jan 17, 2017
- Nanometrics Incorporated
- Jie Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Ellipsometer focusing system
- Patent number 9,243,999
- Issue date Jan 26, 2016
- Nanometrics Incorporated
- Barry J. Blasenheim
- G01 - MEASURING TESTING
Information Patent Grant
Diffraction based overlay linearity testing
- Patent number 9,239,523
- Issue date Jan 19, 2016
- Nanometrics Incorporated
- Jie Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical metrology system for spectral imaging of a sample
- Patent number 9,182,351
- Issue date Nov 10, 2015
- Nanometrics Incorporated
- Andrzej Buczkowski
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Optical metrology with multiple angles of incidence and/or azimuth...
- Patent number 9,115,987
- Issue date Aug 25, 2015
- Nanometrics Incorporated
- Zhuan Liu
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for electrical characterization by selecting a...
- Patent number 9,110,127
- Issue date Aug 18, 2015
- Nanometrics Incorporated
- Emil Kamieniecki
- G01 - MEASURING TESTING
Information Patent Grant
Simultaneous measurement of multiple overlay errors using diffracti...
- Patent number 9,007,584
- Issue date Apr 14, 2015
- Nanometrics Incorporated
- Jie Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Automated system check for metrology unit
- Patent number 8,825,444
- Issue date Sep 2, 2014
- Nanometrics Incorporated
- Pablo I. Rovira
- G05 - CONTROLLING REGULATING
Information Patent Grant
Thin films and surface topography measurement using reduced library
- Patent number 8,818,754
- Issue date Aug 26, 2014
- Nanometrics Incorporated
- Boris V. Kamenev
- G01 - MEASURING TESTING
Information Patent Grant
Dark field diffraction based overlay
- Patent number 8,817,273
- Issue date Aug 26, 2014
- Nanometrics Incorporated
- Hwan J. Jeong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Ellipsometer focusing system
- Patent number 8,559,008
- Issue date Oct 15, 2013
- Nanometrics Incorporated
- Barry J. Blasenheim
- G01 - MEASURING TESTING
Information Patent Grant
Capacitive displacement transducer for a weak-motion inertial sensor
- Patent number 8,544,325
- Issue date Oct 1, 2013
- Nanometrics Inc.
- Nicholas Jason Ackerley
- G01 - MEASURING TESTING
Information Patent Grant
Local stress measurement
- Patent number 8,534,135
- Issue date Sep 17, 2013
- Nanometrics Incorporated
- Timothy A Johnson
- G01 - MEASURING TESTING
Information Patent Grant
Scatterometry measurement of asymmetric structures
- Patent number 8,525,993
- Issue date Sep 3, 2013
- Nanometrics Incorporated
- Silvio J. Rabello
- G01 - MEASURING TESTING
Information Patent Grant
Measurement of a sample using multiple models
- Patent number 8,501,501
- Issue date Aug 6, 2013
- Nanometrics Incorporated
- Ye Feng
- G01 - MEASURING TESTING

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Patents Applicationslast 30 patents

Information Patent Application
FOUP PURGE SHIELD
- Publication number 20200035531
- Publication date Jan 30, 2020
- Nanometrics Incorporated
- Paul A. DOYLE
- B08 - CLEANING
Information Patent Application
LOCAL PURGE WITHIN METROLOGY AND INSPECTION SYSTEMS
- Publication number 20200011786
- Publication date Jan 9, 2020
- Nanometrics Incorporated
- Paul A. DOYLE
- G01 - MEASURING TESTING
Information Patent Application
SURFACE HEIGHT DETERMINATION OF TRANSPARENT FILM
- Publication number 20190391088
- Publication date Dec 26, 2019
- Nanometrics Incorporated
- Graham M. LYNCH
- G01 - MEASURING TESTING
Information Patent Application
SAMPLE INSPECTION USING TOPOGRAPHY
- Publication number 20190304851
- Publication date Oct 3, 2019
- Nanometrics Incorporated
- Nigel P. SMITH
- G01 - MEASURING TESTING
Information Patent Application
CORRECTION OF ANGULAR ERROR OF PLANE-OF-INCIDENCE AZIMUTH OF OPTICA...
- Publication number 20190272305
- Publication date Sep 5, 2019
- Nanometrics Incorporated
- Pedro VAGOS
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LOCAL PURGE WITHIN METROLOGY AND INSPECTION SYSTEMS
- Publication number 20190170634
- Publication date Jun 6, 2019
- Nanometrics Incorporated
- Paul A. DOYLE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUB-RESOLUTION DEFECT DETECTION
- Publication number 20190170655
- Publication date Jun 6, 2019
- Nanometrics Incorporated
- Nigel P. Smith
- G01 - MEASURING TESTING
Information Patent Application
DECONVOLUTION TO REDUCE THE EFFECTIVE SPOT SIZE OF A SPECTROSCOPIC...
- Publication number 20180348055
- Publication date Dec 6, 2018
- Nanometrics Incorporated
- Amit Shachaf
- G01 - MEASURING TESTING
Information Patent Application
NON-ADHESIVE MOUNTING ASSEMBLY FOR A TALL ROCHON POLARIZER
- Publication number 20180259742
- Publication date Sep 13, 2018
- Nanometrics Incorporated
- Andrew Saul Klassen
- G02 - OPTICS
Information Patent Application
FOCUSING SYSTEM WITH FILTER FOR OPEN OR CLOSED LOOP CONTROL
- Publication number 20180252634
- Publication date Sep 6, 2018
- Nanometrics Incorporated
- Amit Shachaf
- G01 - MEASURING TESTING
Information Patent Application
SCANNING WHITE-LIGHT INTERFEROMETRY SYSTEM FOR CHARACTERIZATION OF...
- Publication number 20180156597
- Publication date Jun 7, 2018
- Nanometrics Incorporated
- Nigel P. Smith
- G01 - MEASURING TESTING
Information Patent Application
3D TARGET FOR MONITORING MULTIPLE PATTERNING PROCESS
- Publication number 20170031248
- Publication date Feb 2, 2017
- Nanometrics Incorporated
- Jiangtao HU
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL CRITICAL DIMENSION TARGET DESIGN
- Publication number 20170024509
- Publication date Jan 26, 2017
- Nanometrics Incorporated
- Jiangtao HU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INTERFEROMETRIC CHARACTERIZATION OF SURFACE TOPOGRAPHY
- Publication number 20170016715
- Publication date Jan 19, 2017
- Nanometrics Incorporated
- Kevin Eduard HEIDRICH
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL METROLOGY USING DIFFERENTIAL FITTING
- Publication number 20160341670
- Publication date Nov 24, 2016
- Nanometrics Incorporated
- Pedro Vagos
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL METROLOGY SYSTEM FOR SPECTRAL IMAGING OF A SAMPLE
- Publication number 20160290927
- Publication date Oct 6, 2016
- Nanometrics Incorporated
- Andrzej Buczkowski
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL METROLOGY SYSTEM FOR SPECTRAL IMAGING OF A SAMPLE
- Publication number 20160116411
- Publication date Apr 28, 2016
- Nanometrics Incorporated
- Andrzej Buczkowski
- G01 - MEASURING TESTING
Information Patent Application
DECONVOLUTION TO REDUCE THE EFFECTIVE SPOT SIZE OF A SPECTROSCOPIC...
- Publication number 20160097677
- Publication date Apr 7, 2016
- Nanometrics Incorporated
- Amit Shachaf
- G01 - MEASURING TESTING
Information Patent Application
PROTECTED LENS COVER PLATE FOR AN OPTICAL METROLOGY DEVICE
- Publication number 20160033763
- Publication date Feb 4, 2016
- Nanometrics Incorporated
- Jason Robert SHIELDS
- G02 - OPTICS
Information Patent Application
OPTICAL METROLOGY WITH PURGED REFERENCE CHIP
- Publication number 20160033399
- Publication date Feb 4, 2016
- Nanometrics Incorporated
- Andrew S. KLASSEN
- G01 - MEASURING TESTING
Information Patent Application
SIMULTANEOUS MEASUREMENT OF MULTIPLE OVERLAY ERRORS USING DIFFRACTI...
- Publication number 20150308817
- Publication date Oct 29, 2015
- Nanometrics Incorporated
- Jie Li
- G01 - MEASURING TESTING
Information Patent Application
VIA CHARACTERIZATION FOR BCD AND DEPTH METROLOGY
- Publication number 20150168128
- Publication date Jun 18, 2015
- Nanometrics Incorporated
- Ke XIAO
- G01 - MEASURING TESTING
Information Patent Application
FOCUSING SYSTEM WITH FILTER FOR OPEN OR CLOSED LOOP CONTROL
- Publication number 20150168290
- Publication date Jun 18, 2015
- Nanometrics Incorporated
- Amit Shachaf
- G02 - OPTICS
Information Patent Application
OPTICAL METROLOGY WITH MULTIPLE ANGLES OF INCIDENCE AND/OR AZUMITH...
- Publication number 20150153165
- Publication date Jun 4, 2015
- Nanometrics Incorporated
- Zhuan Liu
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL METROLOGY SYSTEM FOR SPECTRAL IMAGING OF A SAMPLE
- Publication number 20150146193
- Publication date May 28, 2015
- Nanometrics Incorporated
- Andrzej Buczkowski
- G01 - MEASURING TESTING
Information Patent Application
ELLIPSOMETER FOCUSING SYSTEM
- Publication number 20140098369
- Publication date Apr 10, 2014
- Nanometrics Incorporated
- Barry J. Blasenheim
- G02 - OPTICS
Information Patent Application
DARK FIELD DIFFRACTION BASED OVERLAY
- Publication number 20130278942
- Publication date Oct 24, 2013
- Nanometrics Incorporated
- Hwan J. Jeong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PLASMA LAMP IGNITION SOURCE
- Publication number 20130257270
- Publication date Oct 3, 2013
- Nanometrics Incorporated
- Ronald A. Rojeski
- B82 - NANO-TECHNOLOGY
Information Patent Application
DUAL ANGLES OF INCIDENCE AND AZIMUTH ANGLES OPTICAL METROLOGY
- Publication number 20130242303
- Publication date Sep 19, 2013
- Nanometrics Incorporated
- Zhuan Liu
- G01 - MEASURING TESTING
Information Patent Application
IMAGE BASED OVERLAY MEASUREMENT WITH FINITE GRATINGS
- Publication number 20130208279
- Publication date Aug 15, 2013
- Nanometrics Incorporated
- Nigel P. Smith
- G01 - MEASURING TESTING

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Trademarklast 30 trademarks

Information Trademark
88032561 - ZFECT
- Serial number 88032561
- Filing date Jul 10, 2018
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88032556 - ZBEAM
- Serial number 88032556
- Filing date Jul 10, 2018
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
86385876 - IMPERIA
- Serial number 86385876
- Registration number 4847391
- Filing date Sep 4, 2014
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
86028955 - SENTINEL
- Serial number 86028955
- Filing date Aug 5, 2013
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
85244590 - UNIFIRE
- Serial number 85244590
- Registration number 4191474
- Filing date Feb 17, 2011
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
85244594 - VERTEX
- Serial number 85244594
- Filing date Feb 17, 2011
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
85244592 - TRAJECTORY
- Serial number 85244592
- Registration number 4140065
- Filing date Feb 17, 2011
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
77771069 - SENTINEL
- Serial number 77771069
- Filing date Jun 30, 2009
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
77771084 - SENTINEL PLI
- Serial number 77771084
- Filing date Jun 30, 2009
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
77726367 - NANOLYNX
- Serial number 77726367
- Filing date Apr 30, 2009
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
77711584 - CALIPER MOSAIC
- Serial number 77711584
- Registration number 3804439
- Filing date Apr 10, 2009
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
77653441 - NANODIFFRACT
- Serial number 77653441
- Registration number 3681748
- Filing date Jan 21, 2009
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76694146 - LYNX
- Serial number 76694146
- Registration number 3987463
- Filing date Nov 10, 2008
- Nanometrics Incorporated
- 7 - Machines and machine tools
Information Trademark
77609519 - NANOMETRICS
- Serial number 77609519
- Registration number 4169596
- Filing date Nov 7, 2008
- Nanometrics Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
77411874 - IMPULSE
- Serial number 77411874
- Registration number 3605146
- Filing date Mar 3, 2008
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76684036 - NANOSTATION
- Serial number 76684036
- Registration number 3589489
- Filing date Nov 14, 2007
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76683287 - CALIPER INSIGHT
- Serial number 76683287
- Filing date Oct 25, 2007
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76680269 - LYNXWARE
- Serial number 76680269
- Filing date Aug 3, 2007
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76680167 - NANOLYNX
- Serial number 76680167
- Filing date Jul 30, 2007
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76670761 - PREDICTIVE METRICS
- Serial number 76670761
- Registration number 3373479
- Filing date Dec 26, 2006
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76668127 - PREDICTIVE METRICS
- Serial number 76668127
- Filing date Oct 23, 2006
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76613111 - N,K EXPERT
- Serial number 76613111
- Filing date Sep 28, 2004
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76551346 - ATLAS
- Serial number 76551346
- Registration number 2909975
- Filing date Oct 14, 2003
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76466035 - NANOCLP
- Serial number 76466035
- Filing date Nov 8, 2002
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76444643 - OCDSE
- Serial number 76444643
- Filing date Aug 26, 2002
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76442279 - NANOUDI
- Serial number 76442279
- Filing date Aug 20, 2002
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76391052 - NANOOCS
- Serial number 76391052
- Filing date Apr 2, 2002
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76317800 - NANOOCD
- Serial number 76317800
- Registration number 2725536
- Filing date Sep 28, 2001
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76317801 - NANOCD
- Serial number 76317801
- Filing date Sep 28, 2001
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76303604 - TNK
- Serial number 76303604
- Filing date Aug 23, 2001
- Nanometrics Incorporated
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments

Nanometrics Incorporated

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Mailing Address

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Patents Grantslast 30 patents

Interferometric characterization of surface topography

Local purge within metrology and inspection systems

Correction of angular error of plane-of-incidence azimuth of optica...

Scanning white-light interferometry system for characterization of...

Deconvolution to reduce the effective spot size of a spectroscopic...

Via characterization for BCD and depth metrology

Image based overlay measurement with finite gratings

Optical metrology with purged reference chip

3D target for monitoring multiple patterning process

Optical metrology using differential fitting

Protected lens cover plate for an optical metrology device

Deconvolution to reduce the effective spot size of a spectroscopic...

Focusing system with filter for open or closed loop control

Optical metrology system for spectral imaging of a sample

Optical critical dimension target design

Simultaneous measurement of multiple overlay errors using diffracti...

Ellipsometer focusing system

Diffraction based overlay linearity testing

Optical metrology system for spectral imaging of a sample

Optical metrology with multiple angles of incidence and/or azimuth...

Apparatus and method for electrical characterization by selecting a...

Simultaneous measurement of multiple overlay errors using diffracti...

Automated system check for metrology unit

Thin films and surface topography measurement using reduced library

Dark field diffraction based overlay

Ellipsometer focusing system

Capacitive displacement transducer for a weak-motion inertial sensor

Local stress measurement

Scatterometry measurement of asymmetric structures

Measurement of a sample using multiple models

Patents Applicationslast 30 patents

FOUP PURGE SHIELD

LOCAL PURGE WITHIN METROLOGY AND INSPECTION SYSTEMS

SURFACE HEIGHT DETERMINATION OF TRANSPARENT FILM

SAMPLE INSPECTION USING TOPOGRAPHY

CORRECTION OF ANGULAR ERROR OF PLANE-OF-INCIDENCE AZIMUTH OF OPTICA...

LOCAL PURGE WITHIN METROLOGY AND INSPECTION SYSTEMS

SUB-RESOLUTION DEFECT DETECTION

DECONVOLUTION TO REDUCE THE EFFECTIVE SPOT SIZE OF A SPECTROSCOPIC...

NON-ADHESIVE MOUNTING ASSEMBLY FOR A TALL ROCHON POLARIZER

FOCUSING SYSTEM WITH FILTER FOR OPEN OR CLOSED LOOP CONTROL

SCANNING WHITE-LIGHT INTERFEROMETRY SYSTEM FOR CHARACTERIZATION OF...

3D TARGET FOR MONITORING MULTIPLE PATTERNING PROCESS

OPTICAL CRITICAL DIMENSION TARGET DESIGN

INTERFEROMETRIC CHARACTERIZATION OF SURFACE TOPOGRAPHY

OPTICAL METROLOGY USING DIFFERENTIAL FITTING

OPTICAL METROLOGY SYSTEM FOR SPECTRAL IMAGING OF A SAMPLE

OPTICAL METROLOGY SYSTEM FOR SPECTRAL IMAGING OF A SAMPLE

DECONVOLUTION TO REDUCE THE EFFECTIVE SPOT SIZE OF A SPECTROSCOPIC...

PROTECTED LENS COVER PLATE FOR AN OPTICAL METROLOGY DEVICE

OPTICAL METROLOGY WITH PURGED REFERENCE CHIP

SIMULTANEOUS MEASUREMENT OF MULTIPLE OVERLAY ERRORS USING DIFFRACTI...

VIA CHARACTERIZATION FOR BCD AND DEPTH METROLOGY

FOCUSING SYSTEM WITH FILTER FOR OPEN OR CLOSED LOOP CONTROL

OPTICAL METROLOGY WITH MULTIPLE ANGLES OF INCIDENCE AND/OR AZUMITH...

OPTICAL METROLOGY SYSTEM FOR SPECTRAL IMAGING OF A SAMPLE

ELLIPSOMETER FOCUSING SYSTEM

DARK FIELD DIFFRACTION BASED OVERLAY

PLASMA LAMP IGNITION SOURCE

DUAL ANGLES OF INCIDENCE AND AZIMUTH ANGLES OPTICAL METROLOGY

IMAGE BASED OVERLAY MEASUREMENT WITH FINITE GRATINGS

Trademarklast 30 trademarks

88032561 - ZFECT

88032556 - ZBEAM

86385876 - IMPERIA

86028955 - SENTINEL

85244590 - UNIFIRE

85244594 - VERTEX

85244592 - TRAJECTORY

77771069 - SENTINEL

77771084 - SENTINEL PLI

77726367 - NANOLYNX