NOVA MEASURING INSTRUMENTS INC

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SANTA CLARA, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for non-destructive metrology of thin layers
- Patent number 12,066,391
- Issue date Aug 20, 2024
- NOVA MEASURING INSTRUMENTS, INC.
- Wei Ti Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Patterned x-ray emitting target
- Patent number 11,996,259
- Issue date May 28, 2024
- NOVA MEASURING INSTRUMENTS INC.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Characterizing and measuring in small boxes using XPS with multiple...
- Patent number 11,988,502
- Issue date May 21, 2024
- NOVA MEASURING INSTRUMENTS INC.
- Heath Pois
- G01 - MEASURING TESTING
Information Patent Grant
System and method for measuring a sample by x-ray reflectance scatt...
- Patent number 11,874,237
- Issue date Jan 16, 2024
- NOVA MEASURING INSTRUMENTS INC.
- Heath Pois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for monitoring deposition process
- Patent number 11,852,467
- Issue date Dec 26, 2023
- NOVA MEASURING INSTRUMENTS, INC.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Grant
Mass spectrometer detector and system and method using the same
- Patent number 11,823,883
- Issue date Nov 21, 2023
- NOVA MEASURING INSTRUMENTS, INC.
- Christopher F. Bevis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and approaches for semiconductor metrology and surface anal...
- Patent number 11,764,050
- Issue date Sep 19, 2023
- NOVA MEASURING INSTRUMENTS INC.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Feed-forward of multi-layer and multi-process information using XPS...
- Patent number 11,733,035
- Issue date Aug 22, 2023
- NOVA MEASURING INSTRUMENTS INC.
- Heath Pois
- G01 - MEASURING TESTING
Information Patent Grant
XPS metrology for process control in selective deposition
- Patent number 11,680,915
- Issue date Jun 20, 2023
- NOVA MEASURING INSTRUMENTS, INC.
- Charles Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for non-destructive metrology of thin layers
- Patent number 11,668,663
- Issue date Jun 6, 2023
- NOVA MEASURING INSTRUMENTS, INC.
- Wei Ti Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and approaches for semiconductor metrology and surface anal...
- Patent number 11,430,647
- Issue date Aug 30, 2022
- NOVA MEASURING INSTRUMENTS, INC.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
XPS metrology for process control in selective deposition
- Patent number 11,346,795
- Issue date May 31, 2022
- NOVA MEASURING INSTRUMENTS, INC.
- Charles Thomas Larson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mass spectrometer detector and system and method using the same
- Patent number 11,183,377
- Issue date Nov 23, 2021
- NOVA MEASURING INSTRUMENTS, INC.
- Christopher F. Bevis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Feed-forward of multi-layer and multi-process information using XPS...
- Patent number 11,029,148
- Issue date Jun 8, 2021
- NOVA MEASURING INSTRUMENTS, INC.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Grant
Systems and approaches for semiconductor metrology and surface anal...
- Patent number 10,910,208
- Issue date Feb 2, 2021
- NOVA MEASURING INSTRUMENTS, INC.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for measuring periodic structures using multi-a...
- Patent number 10,859,519
- Issue date Dec 8, 2020
- NOVA MEASURING INSTRUMENTS, INC.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Grant
XPS metrology for process control in selective deposition
- Patent number 10,801,978
- Issue date Oct 13, 2020
- NOVA MEASURING INSTRUMENTS, INC.
- Charles Thomas Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Feed-forward of multi-layer and multi-process information using XPS...
- Patent number 10,648,802
- Issue date May 12, 2020
- NOVA MEASURING INSTRUMENTS, INC.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Grant
Systems and approaches for semiconductor metrology and surface anal...
- Patent number 10,636,644
- Issue date Apr 28, 2020
- Nova Measuring Instruments Inc.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for non-destructive metrology of thin layers
- Patent number 10,533,961
- Issue date Jan 14, 2020
- NOVA MEASURING INSTRUMENTS, INC.
- Wei Ti Lee
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for measuring periodic structures using multi-a...
- Patent number 10,481,112
- Issue date Nov 19, 2019
- Nova Measuring Instruments Inc.
- Heath A. Pois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and approaches for semiconductor metrology and surface anal...
- Patent number 10,403,489
- Issue date Sep 3, 2019
- Nova Measuring Instruments Inc.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for measuring periodic structures using multi-a...
- Patent number 10,119,925
- Issue date Nov 6, 2018
- Nova Measuring Instruments Inc.
- Heath A. Pois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Feed-forward of multi-layer and multi-process information using XPS...
- Patent number 10,082,390
- Issue date Sep 25, 2018
- Nova Measuring Instruments Inc.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Grant
Systems and approaches for semiconductor metrology and surface anal...
- Patent number 10,056,242
- Issue date Aug 21, 2018
- Nova Measuring Instruments Inc.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon germanium thickness and composition determination using com...
- Patent number 9,952,166
- Issue date Apr 24, 2018
- Nova Measuring Instruments Inc.
- Heath A. Pois
- G01 - MEASURING TESTING

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Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR MEASURING A SAMPLE BY X-RAY REFLECTANCE SCATT...
- Publication number 20240345006
- Publication date Oct 17, 2024
- NOVA MEASURING INSTRUMENTS INC.
- Heath POIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR MONITORING DEPOSITION PROCESS
- Publication number 20240167814
- Publication date May 23, 2024
- NOVA MEASURING INSTRUMENTS, INC.
- Heath A. POIS
- G01 - MEASURING TESTING
Information Patent Application
FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...
- Publication number 20240085174
- Publication date Mar 14, 2024
- NOVA MEASURING INSTRUMENTS INC.
- Heath POIS
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20240087869
- Publication date Mar 14, 2024
- NOVA MEASURING INSTRUMENTS INC.
- David A. REED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
XPS METROLOGY FOR PROCESS CONTROL IN SELECTIVE DEPOSITION
- Publication number 20240044825
- Publication date Feb 8, 2024
- NOVA MEASURING INSTRUMENTS INC.
- Charles LARSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR NON-DESTRUCTIVE METROLOGY OF THIN LAYERS
- Publication number 20230408430
- Publication date Dec 21, 2023
- NOVA MEASURING INSTRUMENTS, INC.
- Wei Ti Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SMALL SPOT
- Publication number 20230288196
- Publication date Sep 14, 2023
- NOVA MEASURING INSTRUMENTS INC.
- Heath POIS
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20230091625
- Publication date Mar 23, 2023
- NOVA MEASURING INSTRUMENTS INC.
- David A. REED
- G01 - MEASURING TESTING
Information Patent Application
XPS METROLOGY FOR PROCESS CONTROL IN SELECTIVE DEPOSITION
- Publication number 20230021209
- Publication date Jan 19, 2023
- NOVA MEASURING INSTRUMENTS INC.
- Charles LARSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PATTERNED X-RAY EMITTING TARGET
- Publication number 20220390395
- Publication date Dec 8, 2022
- NOVA MEASURING INSTRUMENTS INC.
- David A. REED
- G01 - MEASURING TESTING
Information Patent Application
MASS SPECTROMETER DETECTOR AND SYSTEM AND METHOD USING THE SAME
- Publication number 20220223395
- Publication date Jul 14, 2022
- NOVA MEASURING INSTRUMENTS, INC.
- Christopher F. BEVIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR MONITORING DEPOSITION PROCESS
- Publication number 20220155064
- Publication date May 19, 2022
- Nova Measuring Instruments, Inc.
- Heath A. POIS
- G01 - MEASURING TESTING
Information Patent Application
FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...
- Publication number 20210372787
- Publication date Dec 2, 2021
- NOVA MEASURING INSTRUMENTS INC.
- Heath POIS
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20210305037
- Publication date Sep 30, 2021
- NOVA MEASURING INSTRUMENTS INC.
- David A. REED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
XPS METROLOGY FOR PROCESS CONTROL IN SELECTIVE DEPOSITION
- Publication number 20210025839
- Publication date Jan 28, 2021
- Nova Measuring Instruments, Inc.
- Charles Thomas Larson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...
- Publication number 20200370885
- Publication date Nov 26, 2020
- Nova Measuring Instruments, Inc.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20200258733
- Publication date Aug 13, 2020
- NOVA MEASURING INSTRUMENTS INC.
- David A. REED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR NON-DESTRUCTIVE METROLOGY OF THIN LAYERS
- Publication number 20200191734
- Publication date Jun 18, 2020
- Nova Measuring Instruments, Inc.
- Wei Ti Lee
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...
- Publication number 20200088656
- Publication date Mar 19, 2020
- Nova Measuring Instruments, Inc.
- Heath A. Pois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASS SPECTROMETER DETECTOR AND SYSTEM AND METHOD USING THE SAME
- Publication number 20200066502
- Publication date Feb 27, 2020
- Nova Measuring Instruments, Inc.
- Christopher F. BEVIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20190385831
- Publication date Dec 19, 2019
- NOVA MEASURING INSTRUMENTS INC.
- David A. REED
- G01 - MEASURING TESTING
Information Patent Application
FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...
- Publication number 20190360800
- Publication date Nov 28, 2019
- Nova Measuring Instruments, Inc.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
XPS METROLOGY FOR PROCESS CONTROL IN SELECTIVE DEPOSITION
- Publication number 20190277783
- Publication date Sep 12, 2019
- Nova Measuring Instruments, Inc.
- Charles Thomas Larson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...
- Publication number 20190086342
- Publication date Mar 21, 2019
- Nova Measuring Instruments, Inc.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...
- Publication number 20190033069
- Publication date Jan 31, 2019
- Nova Measuring Instruments, Inc.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20180330935
- Publication date Nov 15, 2018
- NOVA MEASURING INSTRUMENTS INC.
- David A. REED
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR NON-DESTRUCTIVE METROLOGY OF THIN LAYERS
- Publication number 20180328871
- Publication date Nov 15, 2018
- Nova Measuring Instruments, Inc.
- Wei Ti Lee
- G01 - MEASURING TESTING

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Trademarklast 30 trademarks

Information Trademark
97382438 - POLARION
- Serial number 97382438
- Filing date Apr 26, 2022
- Nova Measuring Instruments Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88312507 - METRION
- Serial number 88312507
- Registration number 6154247
- Filing date Feb 22, 2019
- Nova Measuring Instruments, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments

NOVA MEASURING INSTRUMENTS INC

Organization

Patents Grantslast 30 patents

Method and system for non-destructive metrology of thin layers

Patterned x-ray emitting target

Characterizing and measuring in small boxes using XPS with multiple...

System and method for measuring a sample by x-ray reflectance scatt...

Method and system for monitoring deposition process

Mass spectrometer detector and system and method using the same

Systems and approaches for semiconductor metrology and surface anal...

Feed-forward of multi-layer and multi-process information using XPS...

XPS metrology for process control in selective deposition

Method and system for non-destructive metrology of thin layers

Systems and approaches for semiconductor metrology and surface anal...

XPS metrology for process control in selective deposition

Mass spectrometer detector and system and method using the same

Feed-forward of multi-layer and multi-process information using XPS...

Systems and approaches for semiconductor metrology and surface anal...

Methods and systems for measuring periodic structures using multi-a...

XPS metrology for process control in selective deposition

Feed-forward of multi-layer and multi-process information using XPS...

Systems and approaches for semiconductor metrology and surface anal...

Method and system for non-destructive metrology of thin layers

Methods and systems for measuring periodic structures using multi-a...

Systems and approaches for semiconductor metrology and surface anal...

Methods and systems for measuring periodic structures using multi-a...

Feed-forward of multi-layer and multi-process information using XPS...

Systems and approaches for semiconductor metrology and surface anal...

Silicon germanium thickness and composition determination using com...

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR MEASURING A SAMPLE BY X-RAY REFLECTANCE SCATT...

METHOD AND SYSTEM FOR MONITORING DEPOSITION PROCESS

FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

XPS METROLOGY FOR PROCESS CONTROL IN SELECTIVE DEPOSITION

METHOD AND SYSTEM FOR NON-DESTRUCTIVE METROLOGY OF THIN LAYERS

SMALL SPOT

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

XPS METROLOGY FOR PROCESS CONTROL IN SELECTIVE DEPOSITION

PATTERNED X-RAY EMITTING TARGET

MASS SPECTROMETER DETECTOR AND SYSTEM AND METHOD USING THE SAME

METHOD AND SYSTEM FOR MONITORING DEPOSITION PROCESS

FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

XPS METROLOGY FOR PROCESS CONTROL IN SELECTIVE DEPOSITION

FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

METHOD AND SYSTEM FOR NON-DESTRUCTIVE METROLOGY OF THIN LAYERS

METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...

MASS SPECTROMETER DETECTOR AND SYSTEM AND METHOD USING THE SAME

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...

XPS METROLOGY FOR PROCESS CONTROL IN SELECTIVE DEPOSITION

METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...

FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

METHOD AND SYSTEM FOR NON-DESTRUCTIVE METROLOGY OF THIN LAYERS

Trademarklast 30 trademarks

97382438 - POLARION

88312507 - METRION