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Method for laser micromachining
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Patent number 8,263,901
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Issue date Sep 11, 2012
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Oerlikon Solar AG, Truebbach
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Robert Bann
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Process for laser scribing
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Patent number 7,964,820
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Issue date Jun 21, 2011
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Oerlikon Solar AG, Truebbach
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Robert Bann
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Magnetron sputtering apparatus
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Patent number 7,943,016
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Issue date May 17, 2011
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Oerlikon Solar AG, Truebbach
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Israel Wagner
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H01 - BASIC ELECTRIC ELEMENTS