PIOTECH CO., LTD.

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Shenyang, CN

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for processing wafer
- Patent number 12,020,975
- Issue date Jun 25, 2024
- PIOTECH INC.
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer support pin lifting device
- Patent number 11,990,363
- Issue date May 21, 2024
- PIOTECH INC.
- Dezan Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas-dispersing apparatus for multiple chemical resources
- Patent number 11,767,592
- Issue date Sep 26, 2023
- PIOTECH INC.
- Huaqiang Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple section showerhead assembly
- Patent number 11,731,145
- Issue date Aug 22, 2023
- PIOTECH INC.
- Gregory Siu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of temperature measurement used in radio-frequency processin...
- Patent number 11,562,891
- Issue date Jan 24, 2023
- PIOTECH CO., LTD.
- Junichi Arami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device for condition-controlled radio frequency system
- Patent number 11,488,802
- Issue date Nov 1, 2022
- PIOTECH INC.
- Huaqiang Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer pedestal with contact array
- Patent number 11,437,253
- Issue date Sep 6, 2022
- PIOTECH CO., LTD.
- Junichi Arami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer susceptor apparatus with thermal insulation and method for ma...
- Patent number 11,088,012
- Issue date Aug 10, 2021
- PIOTECH INC.
- Junichi Arami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic ring with a ladder structure
- Patent number 10,643,882
- Issue date May 5, 2020
- PIOTECH CO., LTD.
- Xuyen Pham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load lock chamber and the cluster tool system using the same
- Patent number 10,497,591
- Issue date Dec 3, 2019
- PIOTECH CO., LTD.
- Ren Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Waffer pedestal and support structure thereof
- Patent number 10,410,909
- Issue date Sep 10, 2019
- PIOTECH CO., LTD.
- Ren Zhou
- H01 - BASIC ELECTRIC ELEMENTS

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Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING HIGH-QUALITY FILM BY CVD PROCESS
- Publication number 20240200187
- Publication date Jun 20, 2024
- PIOTECH INC.
- Tiezhu Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-STATION PROCESSING CHAMBER FOR SEMICONDUCTOR
- Publication number 20230274957
- Publication date Aug 31, 2023
- PIOTECH CO., LTD.
- HUAQIANG TAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHOD
- Publication number 20220351942
- Publication date Nov 3, 2022
- PIOTECH INC.
- Zhuo Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR ADJUSTING PLASMA EDGE IN PROCESSING CHAMBER AND CONTROL...
- Publication number 20220208528
- Publication date Jun 30, 2022
- PIOTECH INC.
- Saiqian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANIPULATOR FINGER, MANIPULATOR, AND METHOD OF OPERATING THE SAME
- Publication number 20220208577
- Publication date Jun 30, 2022
- PIOTECH INC.
- Chun Liu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
COATING DEVICE AND CARRIER SEAT THEREOF
- Publication number 20220205092
- Publication date Jun 30, 2022
- PIOTECH INC.
- Yue Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER SUPPORT PIN LIFTING DEVICE
- Publication number 20220208595
- Publication date Jun 30, 2022
- PIOTECH INC.
- Dezan Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-CAVITY CLEANING METHOD
- Publication number 20220205087
- Publication date Jun 30, 2022
- PIOTECH INC.
- Yaxin Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SHOWERHEAD WITH CONTROLLABLE AIRFLOW DISTRIBUTION
- Publication number 20220205101
- Publication date Jun 30, 2022
- PIOTECH INC.
- Zhenjie Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER TRANSFER METHOD AND MECHANICAL ARM
- Publication number 20220208584
- Publication date Jun 30, 2022
- PIOTECH INC.
- Jason Tian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR FILM
- Publication number 20220205102
- Publication date Jun 30, 2022
- PIOTECH INC.
- Huaqiang Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHOD
- Publication number 20220208590
- Publication date Jun 30, 2022
- PIOTECH INC.
- Zhuo Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROTECTION MECHANISM AND METHOD FOR PROTECTING WAFER AND PIN
- Publication number 20220208598
- Publication date Jun 30, 2022
- PIOTECH INC.
- Huaqiang Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATIC WAFER CARRYING SYSTEM AND METHOD FOR TRANSFERRING WAFER U...
- Publication number 20210407843
- Publication date Dec 30, 2021
- PIOTECH INC.
- Hualong Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE FOR CONDITION-CONTROLLED RADIO FREQUENCY SYSTEM
- Publication number 20210398771
- Publication date Dec 23, 2021
- PIOTECH INC.
- Huaqiang Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS, SYSTEM, AND METHOD FOR IMPEDANCE ADJUSTMENT OF PROCESSIN...
- Publication number 20210398779
- Publication date Dec 23, 2021
- PIOTECH INC.
- Giyoul Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING WAFER
- Publication number 20210375661
- Publication date Dec 2, 2021
- PIOTECH INC.
- Junichi Arami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MODULE AND SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20210358782
- Publication date Nov 18, 2021
- PIOTECH INC.
- Jason Lee Tian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOUBLE-SIDED DEPOSITION APPARATUS AND METHOD
- Publication number 20210305019
- Publication date Sep 30, 2021
- PIOTECH INC.
- Brian Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS-DISPERSING APPARATUS FOR MULTIPLE CHEMICAL MATERIALS
- Publication number 20210172063
- Publication date Jun 10, 2021
- PIOTECH INC.
- HUAQIANG TAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER PEDESTAL WITH CONTACT ARRAY
- Publication number 20200381270
- Publication date Dec 3, 2020
- PIOTECH CO., LTD.
- JUNICHI ARAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE SECTION SHOWERHEAD ASSEMBLY
- Publication number 20200360943
- Publication date Nov 19, 2020
- PIOTECH CO., LTD.
- GREGORY SIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-STATION PROCESSING CHAMBER FOR SEMICONDUCTOR
- Publication number 20200203197
- Publication date Jun 25, 2020
- PIOTECH CO., LTD.
- HUAQIANG TAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF TEMPERATURE MEASUREMENT USED IN RADIO-FREQUENCY PROCESSIN...
- Publication number 20200176231
- Publication date Jun 4, 2020
- PIOTECH CO., LTD.
- JUNICHI ARAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER SUSCEPTOR APPARATUS WITH THERMAL INSULATION AND METHOD FOR MA...
- Publication number 20200161166
- Publication date May 21, 2020
- PIOTECH CO., LTD.
- JUNICHI ARAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFFER PEDESTAL WITH HEATING MECHANISM AND REACTION CHAMBER INCLUDI...
- Publication number 20190341280
- Publication date Nov 7, 2019
- PIOTECH CO., LTD.
- JUNICHI ARAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFFER PEDESTAL AND SUPPORT STRUCTURE THEREOF
- Publication number 20190096736
- Publication date Mar 28, 2019
- PIOTECH CO., LTD.
- Ren Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF SIGNAL TRANSMITTING DEVICE USED IN PLASMA PROCESSING APPARATUS
- Publication number 20190057842
- Publication date Feb 21, 2019
- PIOTECH CO., LTD.
- JUNICHI ARAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC RING WITH A LADDER STRUCTURE
- Publication number 20180053682
- Publication date Feb 22, 2018
- PIOTECH CO., LTD.
- XUYEN PHAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD LOCK CHAMBER AND THE CLUSTER TOOL SYSTEM USING THE SAME
- Publication number 20170271187
- Publication date Sep 21, 2017
- PIOTECH CO., LTD.
- Ren ZHOU
- H01 - BASIC ELECTRIC ELEMENTS

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Trademarklast 30 trademarks

Information Trademark
79326735
- Serial number 79326735
- Registration number 6799743
- Filing date May 10, 2021
- PIOTECH INC.
- 7 - Machines and machine tools
Information Trademark
79300512 - PIOTECH
- Serial number 79300512
- Registration number 6350914
- Filing date Aug 31, 2020
- PIOTECH INC.
- 7 - Machines and machine tools
Information Trademark
79298577 - PIOTECH
- Serial number 79298577
- Registration number 6350900
- Filing date Aug 31, 2020
- PIOTECH INC.
- 7 - Machines and machine tools

PIOTECH CO., LTD.

Organization

Patents Grantslast 30 patents

Apparatus and method for processing wafer

Wafer support pin lifting device

Gas-dispersing apparatus for multiple chemical resources

Multiple section showerhead assembly

Method of temperature measurement used in radio-frequency processin...

Semiconductor device for condition-controlled radio frequency system

Wafer pedestal with contact array

Wafer susceptor apparatus with thermal insulation and method for ma...

Ceramic ring with a ladder structure

Load lock chamber and the cluster tool system using the same

Waffer pedestal and support structure thereof

Patents Applicationslast 30 patents

METHOD FOR FORMING HIGH-QUALITY FILM BY CVD PROCESS

MULTI-STATION PROCESSING CHAMBER FOR SEMICONDUCTOR

SEMICONDUCTOR PROCESSING APPARATUS AND METHOD

DEVICE FOR ADJUSTING PLASMA EDGE IN PROCESSING CHAMBER AND CONTROL...

MANIPULATOR FINGER, MANIPULATOR, AND METHOD OF OPERATING THE SAME

COATING DEVICE AND CARRIER SEAT THEREOF

WAFER SUPPORT PIN LIFTING DEVICE

IN-CAVITY CLEANING METHOD

GAS SHOWERHEAD WITH CONTROLLABLE AIRFLOW DISTRIBUTION

WAFER TRANSFER METHOD AND MECHANICAL ARM

APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR FILM

SEMICONDUCTOR PROCESSING APPARATUS AND METHOD

PROTECTION MECHANISM AND METHOD FOR PROTECTING WAFER AND PIN

AUTOMATIC WAFER CARRYING SYSTEM AND METHOD FOR TRANSFERRING WAFER U...

SEMICONDUCTOR DEVICE FOR CONDITION-CONTROLLED RADIO FREQUENCY SYSTEM

APPARATUS, SYSTEM, AND METHOD FOR IMPEDANCE ADJUSTMENT OF PROCESSIN...

APPARATUS AND METHOD FOR PROCESSING WAFER

SUBSTRATE TRANSFER MODULE AND SEMICONDUCTOR PROCESSING SYSTEM

DOUBLE-SIDED DEPOSITION APPARATUS AND METHOD

GAS-DISPERSING APPARATUS FOR MULTIPLE CHEMICAL MATERIALS

WAFER PEDESTAL WITH CONTACT ARRAY

MULTIPLE SECTION SHOWERHEAD ASSEMBLY

MULTI-STATION PROCESSING CHAMBER FOR SEMICONDUCTOR

METHOD OF TEMPERATURE MEASUREMENT USED IN RADIO-FREQUENCY PROCESSIN...

WAFER SUSCEPTOR APPARATUS WITH THERMAL INSULATION AND METHOD FOR MA...

WAFFER PEDESTAL WITH HEATING MECHANISM AND REACTION CHAMBER INCLUDI...

WAFFER PEDESTAL AND SUPPORT STRUCTURE THEREOF

RF SIGNAL TRANSMITTING DEVICE USED IN PLASMA PROCESSING APPARATUS

CERAMIC RING WITH A LADDER STRUCTURE

LOAD LOCK CHAMBER AND THE CLUSTER TOOL SYSTEM USING THE SAME

Trademarklast 30 trademarks

79326735

79300512 - PIOTECH

79298577 - PIOTECH