SensArray Corporation

Organization

Santa Clara, CA, US

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Process condition sensing wafer and data analysis system
- Patent number 7,360,463
- Issue date Apr 22, 2008
- SensArray Corporation
- Wayne G. Renken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of configuring a sensor network
- Patent number 7,363,195
- Issue date Apr 22, 2008
- SensArray Corporation
- Forrest Gilbert Yetter, Jr.
- G05 - CONTROLLING REGULATING
Information Patent Grant
System and method for heating and cooling wafer at accelerated rates
- Patent number 7,156,924
- Issue date Jan 2, 2007
- SensArray Corporation
- Wayne Glenn Renken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated process condition sensing wafer and data analysis system
- Patent number 7,151,366
- Issue date Dec 19, 2006
- SensArray Corporation
- Wayne Glenn Renken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated process condition sensing wafer and data analysis system
- Patent number 7,149,643
- Issue date Dec 12, 2006
- SensArray Corporation
- Wayne Glenn Renken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated process condition sensing wafer and data analysis system
- Patent number 7,135,852
- Issue date Nov 14, 2006
- SensArray Corporation
- Wayne Glenn Renken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor positioning systems and methods
- Patent number 6,915,589
- Issue date Jul 12, 2005
- SensArray Corporation
- Mei H. Sun
- G01 - MEASURING TESTING
Information Patent Grant
Process condition sensing wafer and data analysis system
- Patent number 6,889,568
- Issue date May 10, 2005
- SensArray Corporation
- Wayne G. Renken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical techniques for measuring parameters such as temperature acr...
- Patent number 6,616,332
- Issue date Sep 9, 2003
- SensArray Corporation
- Wayne Renken
- G01 - MEASURING TESTING
Information Patent Grant
Integrated wafer temperature sensors
- Patent number 6,325,536
- Issue date Dec 4, 2001
- SensArray Corporation
- Wayne Glenn Renken
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for sensing temperature on a substrate in an integrated c...
- Patent number 6,190,040
- Issue date Feb 20, 2001
- SensArray Corporation
- Wayne G. Renken
- G01 - MEASURING TESTING
Information Patent Grant
Temperature calibration substrate
- Patent number 5,967,661
- Issue date Oct 19, 1999
- SensArray Corporation
- Wayne Glenn Renken
- G01 - MEASURING TESTING
Information Patent Grant
Temperature calibration substrate
- Patent number 5,746,513
- Issue date May 5, 1998
- SensArray Corporation
- Wayne Renken
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DATA COLLECTION AND ANALYSIS SYSTEM
- Publication number 20080228306
- Publication date Sep 18, 2008
- SensArray Corporation
- Forrest Gilbert Yetter
- G05 - CONTROLLING REGULATING
Information Patent Application
PROCESS CONDITION SENSING WAFER AND DATA ANALYSIS SYSTEM
- Publication number 20080228419
- Publication date Sep 18, 2008
- SensArray Corporation
- Wayne G. Renken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shear Force Sensing Device
- Publication number 20080087105
- Publication date Apr 17, 2008
- SensArray Corporation
- Wayne G. Renken
- G01 - MEASURING TESTING
Information Patent Application
Pressure Sensing Device
- Publication number 20080087069
- Publication date Apr 17, 2008
- SensArray Corporation
- Wayne G. Renken
- G01 - MEASURING TESTING
Information Patent Application
Process Condition Measuring Device with Shielding
- Publication number 20070251338
- Publication date Nov 1, 2007
- SensArray Corporation
- Lynn Karl Wiese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process Condition Measuring Device with Shielding
- Publication number 20070251339
- Publication date Nov 1, 2007
- SensArray Corporation
- Lynn Karl Wiese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Integrated Process Condition Sensing Wafer and Data Analysis System
- Publication number 20070046284
- Publication date Mar 1, 2007
- SensArray Corporation
- Wayne Glenn Renken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process condition sensing wafer and data analysis system
- Publication number 20060174720
- Publication date Aug 10, 2006
- SensArray Corporation
- Wayne G. Renken
- G01 - MEASURING TESTING
Information Patent Application
Sensor positioning systems and methods
- Publication number 20050081398
- Publication date Apr 21, 2005
- SensArray Corporation
- Mei H. Sun
- G01 - MEASURING TESTING

Trademarklast 30 trademarks

Information Trademark
75783386 - THERMAL TRACK
- Serial number 75783386
- Filing date Aug 24, 1999
- SensArray Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75412525 - THERMAL TRACK
- Serial number 75412525
- Filing date Dec 30, 1997
- SensArray Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
74651089 - SENSARRAY
- Serial number 74651089
- Registration number 2073017
- Filing date Mar 24, 1995
- SensArray Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
74648164 - PROCESS PROBE
- Serial number 74648164
- Registration number 2022951
- Filing date Mar 17, 1995
- SensArray Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
74648132 - THERMAL MAP
- Serial number 74648132
- Registration number 2100649
- Filing date Mar 17, 1995
- SensArray Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments

SensArray Corporation

Organization

Patents Grantslast 30 patents

Process condition sensing wafer and data analysis system

Methods of configuring a sensor network

System and method for heating and cooling wafer at accelerated rates

Integrated process condition sensing wafer and data analysis system

Integrated process condition sensing wafer and data analysis system

Integrated process condition sensing wafer and data analysis system

Sensor positioning systems and methods

Process condition sensing wafer and data analysis system

Optical techniques for measuring parameters such as temperature acr...

Integrated wafer temperature sensors

Apparatus for sensing temperature on a substrate in an integrated c...

Temperature calibration substrate

Temperature calibration substrate

Patents Applicationslast 30 patents

DATA COLLECTION AND ANALYSIS SYSTEM

PROCESS CONDITION SENSING WAFER AND DATA ANALYSIS SYSTEM

Shear Force Sensing Device

Pressure Sensing Device

Process Condition Measuring Device with Shielding

Process Condition Measuring Device with Shielding

Integrated Process Condition Sensing Wafer and Data Analysis System

Process condition sensing wafer and data analysis system

Sensor positioning systems and methods

Trademarklast 30 trademarks

75783386 - THERMAL TRACK

75412525 - THERMAL TRACK

74651089 - SENSARRAY

74648164 - PROCESS PROBE

74648132 - THERMAL MAP