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SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.

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  • Shanghai, CN
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    DISPLACEMENT MEASURING APPARATUS, DISPLACEMENT MEASURING METHOD AND...
    • Publication number 20220214193
    • Publication date Jul 7, 2022
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Ping WU
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    LITHOGRAPHY PROJECTION OBJECTIVE
    • Publication number 20220075159
    • Publication date Mar 10, 2022
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Yinzhang GUO
    • G02 - OPTICS
  • Information Patent Application

    EXPOSURE EQUIPMENT AND EXPOSURE METHOD
    • Publication number 20210011388
    • Publication date Jan 14, 2021
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Jun QIAN
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    HEAT EXCHANGE APPARATUS, AND HEAT EXCHANGE METHOD THEREFOR AND VAPO...
    • Publication number 20200363146
    • Publication date Nov 19, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Tengjun YANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MASK TRANSFER SYSTEM AND TRANSFER METHOD
    • Publication number 20200356014
    • Publication date Nov 12, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Gang WANG
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    SPIN COATING DEVICE AND METHOD
    • Publication number 20200350182
    • Publication date Nov 5, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Shiliang LU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    LINEAR MODULE AND OPERATING METHOD THEREOF
    • Publication number 20200347926
    • Publication date Nov 5, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Gang WANG
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    PROJECTION OBJECTIVE
    • Publication number 20200310256
    • Publication date Oct 1, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Fuping AN
    • G02 - OPTICS
  • Information Patent Application

    VERTICAL CONTROL METHOD FOR USE IN LITHOGRAPHY MACHINE
    • Publication number 20200272062
    • Publication date Aug 27, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Dan CHEN
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20200273730
    • Publication date Aug 27, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Feibiao CHEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PHOTOETCHING APPARATUS AND METHOD
    • Publication number 20200257207
    • Publication date Aug 13, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Chang ZHOU
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    WAFER TRANSFER BOX AND WAFER AUTOMATIC TRANSFER SYSTEM
    • Publication number 20200219743
    • Publication date Jul 9, 2020
    • SHANGHAI MICRO ELECTRONIC EQUIPMENT (GROUP) CO., LTD.
    • Jing ZHEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MASK FORK FOR TRANSFERRING MASK, AND CORRESPONDING MASK BOX AND MAS...
    • Publication number 20200201195
    • Publication date Jun 25, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Gang WANG
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    SILICON WAFER PROCESSING DEVICE AND METHOD
    • Publication number 20200192228
    • Publication date Jun 18, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Gang WANG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CHIP DEFECT DETECTION DEVICE AND DETECTION METHOD
    • Publication number 20200173932
    • Publication date Jun 4, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Pengli ZHANG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SCANNING ALIGNMENT DEVICE AND SCANNING METHOD THEREFOR
    • Publication number 20200168490
    • Publication date May 28, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Dawei YU
    • H04 - ELECTRIC COMMUNICATION TECHNIQUE
  • Information Patent Application

    VACUUMIZING DEVICE AND VACUUMIZING METHOD
    • Publication number 20200168459
    • Publication date May 28, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Yuangen YU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    OPTICAL PATH COMPENSATION DEVICE
    • Publication number 20200166849
    • Publication date May 28, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Shurong LI
    • G02 - OPTICS
  • Information Patent Application

    OBJECTIVE LENS PROTECTION DEVICE, OBJECTIVE LENS SYSTEM AND LITHOGR...
    • Publication number 20200166856
    • Publication date May 28, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Xianming LI
    • G02 - OPTICS
  • Information Patent Application

    LIQUID TEMPERATURE-CONTROL APPARATUS AND METHOD
    • Publication number 20200149792
    • Publication date May 14, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Ming WANG
    • F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
  • Information Patent Application

    CHIP BONDING APPARATUS AND BONDING METHOD
    • Publication number 20200144218
    • Publication date May 7, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Tianming WANG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SHUTTER BLADE DEVICE FOR LITHOGRAPHY MACHINE
    • Publication number 20200124939
    • Publication date Apr 23, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Yanfei WANG
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    MASK BOX
    • Publication number 20200117079
    • Publication date Apr 16, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Gang WANG
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    SHIFTING-IN/OUT MECHANISM, AND SHIFTING-IN/OUT DEVICE USED FOR WORK...
    • Publication number 20200117103
    • Publication date Apr 16, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Guodong CONG
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    HANDLING APPARATUS AND HANDLING METHOD THEREFOR
    • Publication number 20200118864
    • Publication date Apr 16, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Yudi ZHANG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SHUTTER DEVICE
    • Publication number 20200103727
    • Publication date Apr 2, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Yanfei WANG
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    EDGE EXPOSURE DEVICE AND METHOD
    • Publication number 20200089119
    • Publication date Mar 19, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Jinguo YANG
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    MACHINE VISION SYSTEM FOR SUBSTRATE ALIGNMENT AND ALIGNMENT D...
    • Publication number 20200090971
    • Publication date Mar 19, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO.,LTD.
    • Zhi ZHU
    • G02 - OPTICS
  • Information Patent Application

    LEVELLABLE MASK REPOSITORY DEVICE
    • Publication number 20200089133
    • Publication date Mar 19, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO.,LTD.
    • Yongwei FAN
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    METHOD OF DETECTING PARTICLES ON PANEL
    • Publication number 20200025691
    • Publication date Jan 23, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Xueshan HAN
    • G01 - MEASURING TESTING

Trademarklast 30 trademarks

  • Information Trademark

    79070448 - SMEE
    • Serial number 79070448
    • Registration number 3832044
    • Filing date Dec 12, 2008
    • SHANGHAI MICRO ELECTRONICS; EQUIPMENT CO., LTD.
    • 7 - Machines and machine tools