The present invention relates to the field of semiconductor fabrication and, in particular, to a reticle cassette.
In the field of semiconductor fabrication, reticles are usually stored and protected in reticle cassettes. Commonly-used existing 6″ reticle cassettes are of the following three types: Nikon, Canon and SMIF (Standard Mechanical Interface). In practical fabrication, reticles are handled by handling forks of manipulators for reticle transfer. However, limited to structures of the reticle cassettes, especially the Nikon ones, the manipulators typically retain reticles on their handling forks by vacuum suction and are provided with no reticle protection structure. Since the vacuum suction approach is adopted to retain the reticles, it is not sufficiently reliable in practical use and the security of reticles cannot be guaranteed. Sin addition, collisions may occur when the handling forks of the manipulator are moving, which may seriously jeopardize the security of the reticles retained thereon.
The present invention solves the above-described low reticle security problem with the prior art by presenting a novel reticle cassette.
To this end, the subject matter of the present invention lies in a reticle cassette, comprising a bottom panel, a frame arranged on the bottom panel and a top cover arranged on the frame, the bottom panel, the frame and the top cover defining a chamber with an opening, the reticle cassette further provided with a door panel at a side of the opening, wherein the bottom panel is provided thereon with a plurality of reticle supporting posts each separated from the frame by a lateral gap, and wherein the frame has a longitudinal cross-section comprising H-shaped structures, a web of the H-shaped structure separated from the bottom panel by a vertical gap, a first vertical wall on an inner side having a bottom surface separated from the bottom panel by another vertical gap.
Additionally, the web of the H-shaped structure may be separated from the top cover by a vertical gap.
Additionally, the reticle cassette may further comprise bottom panel mounting posts disposed on the bottom panel and corresponding to second vertical walls on outer sides of the H-shaped structures.
Additionally, a distance from the bottom surface of the first vertical wall of the H-shaped structure to a bottom surface of a reticle placed in the reticle cassette is configured to be smaller than a thickness of the reticle but not smaller than a vertical movement range of a top surface of a handling fork when the handling fork picks up the reticle.
Additionally, the door panel may be provided with a barcode scanning area.
Additionally, the frame may comprise a left side panel and a right side panel in opposition to each other and a rear panel coupled to the left and right side panels at two ends, wherein each of the left and right side panels is provided with a top cover locking member.
Additionally, the reticle supporting posts may include two first supporting posts close to the opening and two second supporting posts away from the opening.
Additionally, distances from the two first supporting posts to the respective left and right side panels may be equal.
Additionally, distances between the two second supporting posts and the rear panel of the frame may be equal.
Additionally, the second supporting post may be positioned such that a distance between a reticle positioning plane of the second supporting post and the rear panel of the frame is greater than a distance between a reticle positioning of a handling fork for the reticle and the rear panel of the frame during picking up or placing of the reticle.
Additionally, the second supporting post may be positioned such that during picking up or placing of a reticle, a smallest distance from one side of the second supporting post to a proximal side of a handling fork for the reticle may be greater than 2 mm.
Additionally, the distance from the bottom surface of the first vertical wall of the H-shaped structure to the bottom surface of the reticle placed in the reticle cassette may be greater than 3 mm and smaller than the thickness of the reticle.
Additionally, the top cover may be movably coupled to a top of the rear panel of the frame.
Additionally, the top cover may be movably coupled to the door panel.
Additionally, the top cover may be provided with a labeling area on a top side thereof.
The reticle cassette of the present invention comprises a bottom panel, a frame arranged on the bottom panel and a top cover arranged on the frame. The bottom panel, the frame and the top cover define a chamber with an opening. The door panel is provided at the opening. The bottom panel is provided with a number of reticle supporting posts that are separated from the frame by lateral gaps. The frame each has a longitudinal cross-section comprising the H-shaped structures. The web and bottom surface of the first vertical walls of the H-shaped structure are separated from the bottom panel by vertical gaps. The chamber defined by the bottom panel, the frame and the top cover can be used to store a reticle and accommodate reticle pickup and placement operations of a handling fork. The reticle can be supported on the reticle supporting posts arranged on the bottom panel, and the gaps arranged between the reticle supporting posts and the frame make the reticle cassette suitable for use with both vacuum suction type and physical clamping type handling forks to pick up the reticle. As the frame each has a longitudinal cross-section comprising H-shaped structures, and the gaps are arranged between the web and the bottom surface of the first vertical wall and the bottom panel, the reticle cassette can adapt not only to a handling fork without reticle protection but also to a handling fork equipped with reticle protection to pick up the reticle. All of these greatly enhance its versatility.
In these figures: 1, a bottom panel; 11, a bottom panel mounting post; 2, a frame; 21, a web; 22, a first vertical wall; 23, a second vertical wall; 24, a left side panel; 25, a right side panel; 26, a rear panel; 27, a top cover locking member; 3, a top cover; 4, a door panel; 41, a barcode scanning area; 51, a first supporting post; 52, a second supporting post; 6, a labeling area; 7, a reticle; 8, a spring assembly; 81, a lateral leg; and 82, a vertical leg.
The present invention will be described in detail below with reference to the accompanying drawings.
As shown in
Preferably, the web 21 of the H-shaped structure is separated from the top cover 3 by a gap to guarantee a movement space of a spring assembly 8 (see
Preferably, as shown in
Preferably, the distance from the bottom surfaces of the first vertical walls 22 on inner side of the H-shaped structures to a top surface of the reticle 7 (when it is placed within the reticle cassette) is taken as a positioning reference between the reticle 7 and the reticle cassette.
As shown in
Preferably, the door panel 4 is provided with a barcode scanning area 41 which facilitates monitoring and management of the reticle.
Preferably, the frame 2 includes a left side panel 24, a right side panel 25 opposing the left side panel 24 and a rear panel 26 coupled at both ends to the left and right side panels 24, 25. In addition, each of the left and right side panels 24 is provided with a top cover locking member 27 for locking the top cover 3.
As shown in
Preferably, the distance between a positioning plane defined by the second supporting posts 52 and the rear panel 26 of the frame, denoted at a1, is greater than the distance between a reticle positioning plane of reticle handling fork and the rear panel 26 of the frame 2 when picking up or placing the reticle 7, denoted at a3. In the embodiment shown in
Preferably, the top cover 3 is provided on its top side with a labeling area, e.g., a logo area, for reducing a confusion risk made by a handler who is handling the reticle cassette.
With particular reference to
To sum up, the present invention provides a reticle cassette comprising a bottom panel 1, a frame 2 arranged on the bottom panel 1 and a top cover 3 arranged on the frame 2. The bottom panel 1, the frame 2 and the top cover 3 together delimit a chamber with an opening. The door panel 4 is provided at the opening. The bottom panel 1 is provided thereon with a number of reticle supporting posts. Gaps are provided between the reticle supporting posts and the frame 2 gap. A longitudinal cross section of the frame 2 comprises H-shaped structures. Gaps are provided between the bottom panel 1 and web 21, and lower surface of a first vertical wall 22 on inner side of the H-shaped structure. The chamber with an opening is delimited by the bottom panel 1, the frame 2 and the top cover 3 so as to store a reticle 7 and to pickup and place the reticle 7 by a handling fork. A number of reticle supporting posts are arranged on the bottom panel 1 so as to support the reticle 7, and the gaps are arranged between the reticle supporting posts and the frame 2 so as to make the reticle cassette suitable for use with handling forks that pick up and retain the reticle respectively by vacuum suction and physical clamping. Moreover, a longitudinal cross section of the frame 2 is arranged to comprise H-shaped structures, and the gaps are arranged between the bottom panel 1 and the webs 21, and the bottom surfaces of the first vertical walls 22 of the H-shaped structures so that the reticle cassette can not only adapt to a handling fork without reticle protection but also to a handling fork equipped with reticle protection. All of these greatly enhance its versatility.
Although some embodiments of the present invention have been described herein, these embodiments are merely illustrative and are not intended to be construed as limiting the scope of the invention. Various omissions, substitutions and changes made without departing from the spirit of the invention are all intended to be included within the scope thereof.
Number | Date | Country | Kind |
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201611061938.X | Nov 2016 | CN | national |
Filing Document | Filing Date | Country | Kind |
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PCT/CN2017/111018 | 11/15/2017 | WO | 00 |