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Insulation of micro structures
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Patent number 9,936,918
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Issue date Apr 10, 2018
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Silex Microsystems AB
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Edvard Kalvesten
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A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
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Thin capping for MEMS devices
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Patent number 9,718,674
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Issue date Aug 1, 2017
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Silex Microsystems AB
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Edvard Kalvesten
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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-
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Thin film capping
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Patent number 9,511,999
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Issue date Dec 6, 2016
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Silex Microsystems AB
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Thorbjorn Ebefors
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Barrier structure
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Patent number 8,598,676
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Issue date Dec 3, 2013
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Silex Microsystems AB
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Thorbjörn Ebefors
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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-
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Vias and method of making
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Patent number 8,324,103
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Issue date Dec 4, 2012
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Silex Microsystems AB
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Tomas Bauer
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H01 - BASIC ELECTRIC ELEMENTS
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-
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Pressure sensor
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Patent number 7,207,227
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Issue date Apr 24, 2007
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Silex Microsystems AB
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Pelle Rangsten
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G01 - MEASURING TESTING
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THIN CAPPING FOR MEMS DEVICES
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Publication number 20160207758
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Publication date Jul 21, 2016
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Silex Microsystems AB
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Edvard KALVESTEN
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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INSULATION OF MICRO STRUCTURES
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Publication number 20140378804
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Publication date Dec 25, 2014
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Silex Microsystems AB
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Edvard Kalvesten
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G01 - MEASURING TESTING
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THIN FILM CAPPING
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Publication number 20140346657
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Publication date Nov 27, 2014
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Silex Microsystems AB
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Thorbjorn Ebefors
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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VIA STRUCTURE AND METHOD THEREOF
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Publication number 20140063580
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Publication date Mar 6, 2014
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Silex Microsystems AB
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Thorbjörn Ebefors
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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BARRIER STRUCTURE
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Publication number 20120292736
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Publication date Nov 22, 2012
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Silex Microsystems AB
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Thorbjörn Ebefors
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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GLASS MICRO FLUIDIC DEVICE
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Publication number 20120288422
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Publication date Nov 15, 2012
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Silex Microsystems AB
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Edvard KALVESTEN
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Functional Capping
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Publication number 20120267773
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Publication date Oct 25, 2012
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Silex Microsystems AB
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Thorbjorn Ebefors
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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-
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VIA STRUCTURE AND METHOD THEREOF
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Publication number 20120018852
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Publication date Jan 26, 2012
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Silex Microsystems AB
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Thorbjörn Ebefors
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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VIA STRUCTURE AND METHOD THEREOF
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Publication number 20120018898
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Publication date Jan 26, 2012
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Silex Microsystems AB
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Thorbjörn Ebefors
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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VIA STRUCTURE AND METHOD THEREOF
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Publication number 20120019886
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Publication date Jan 26, 2012
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Silex Microsystems AB
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Thorbjörn Ebefors
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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MICROPACKAGING METHOD AND DEVICES
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Publication number 20100053922
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Publication date Mar 4, 2010
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Silex Microsystems AB
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Thorbjorn Ebefors
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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VIAS AND METHOD OF MAKING
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Publication number 20100052107
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Publication date Mar 4, 2010
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Silex Microsystems AB
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Tomas Bauer
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H01 - BASIC ELECTRIC ELEMENTS
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PRESSURE SENSOR
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Publication number 20060032039
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Publication date Feb 16, 2006
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Silex Microsystems AB
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Pelle Rangsten
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G01 - MEASURING TESTING
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85637042 - SMARTBLOCK
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Serial number 85637042
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Registration number 4455888
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Filing date May 29, 2012
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Silex Microsystems AB
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9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
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77888692 - MET-CAP
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Serial number 77888692
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Registration number 4013089
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Filing date Dec 8, 2009
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Silex Microsystems AB
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40 - Treatment of materials
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77888697 - SIL-CAP
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Serial number 77888697
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Registration number 4016475
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Filing date Dec 8, 2009
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Silex Microsystems AB
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40 - Treatment of materials
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77757976 - MET-VIA
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Serial number 77757976
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Registration number 4081638
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Filing date Jun 12, 2009
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Silex Microsystems AB
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40 - Treatment of materials
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77735584 - SIL-VIA
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Serial number 77735584
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Registration number 3809279
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Filing date May 13, 2009
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Silex Microsystems AB
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42 - Scientific and technological services and research and design relating thereto
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77735583 - SIL-VIA
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Serial number 77735583
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Registration number 3809278
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Filing date May 13, 2009
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Silex Microsystems AB
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40 - Treatment of materials
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77510236 - SILEX MICROSYSTEMS
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Serial number 77510236
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Registration number 3662718
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Filing date Jun 27, 2008
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Silex Microsystems AB
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42 - Scientific and technological services and research and design relating thereto
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78799765 - SILEX MICROSYSTEMS
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Serial number 78799765
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Filing date Jan 26, 2006
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Silex Microsystems AB
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42 - Scientific and technological services and research and design relating thereto
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78799761 - SILEX MICROSYSTEMS
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Serial number 78799761
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Registration number 3490410
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Filing date Jan 26, 2006
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Silex Microsystems AB
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40 - Treatment of materials
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78604474 - SILEX MICROSYSTEMS
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Serial number 78604474
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Filing date Apr 8, 2005
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Silex Microsystems AB
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9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments