Silicon Valley Group, Inc.

Organization

San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for processing wafers
- Patent number 6,616,394
- Issue date Sep 9, 2003
- Silicon Valley Group
- Jae Heon Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for optimizing the output beam characteristics...
- Patent number 6,570,713
- Issue date May 27, 2003
- Silicon Valley Group, Inc.
- Steven N. Bittenson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic tool with dual isolation system and method for configu...
- Patent number 6,538,720
- Issue date Mar 25, 2003
- Silicon Valley Group, Inc.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical reduction system with elimination of reticle diffraction in...
- Patent number 6,522,483
- Issue date Feb 18, 2003
- Silicon Valley Group, Inc.
- Justin L. Kreuzer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for selective linewidth optimization during a lit...
- Patent number 6,509,952
- Issue date Jan 21, 2003
- Silicon Valley Group, Inc.
- Pradeep Kumar Govil
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Ultraviolet polarization beam splitter for microlithography
- Patent number 6,480,330
- Issue date Nov 12, 2002
- Silicon Valley Group, Inc.
- James A. McClay
- G02 - OPTICS
Information Patent Grant
Substrate thermal management system
- Patent number 6,472,643
- Issue date Oct 29, 2002
- Silicon Valley Group, Inc.
- Dikran S. Babikian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Environment exchange control for material on a wafer surface
- Patent number 6,468,586
- Issue date Oct 22, 2002
- Silicon Valley Group, Inc.
- Emir Gurer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for resolving conflicts in a substrate process...
- Patent number 6,418,356
- Issue date Jul 9, 2002
- Silicon Valley Group, Inc.
- Hilario Oh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Process chamber assembly with reflective hot plate and pivoting lid
- Patent number 6,416,318
- Issue date Jul 9, 2002
- Silicon Valley Group, Inc.
- Jae Yun Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for substrate thermal management
- Patent number 6,414,276
- Issue date Jul 2, 2002
- Silicon Valley Group, Inc.
- Dikran S. Babikian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of cleaning reticles for use in a lithography...
- Patent number 6,387,602
- Issue date May 14, 2002
- Silicon Valley Group, Inc.
- Cindy J. Hayden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photoresist outgassing mitigation system method and apparatus for i...
- Patent number 6,369,874
- Issue date Apr 9, 2002
- Silicon Valley Group, Inc.
- Santiago E. del Puerto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for two dimensional adaptive process control of critical dim...
- Patent number 6,327,793
- Issue date Dec 11, 2001
- Silicon Valley Group
- Emir Gurer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Calcium fluoride (CaF2) stress plate and method of making the same
- Patent number 6,324,003
- Issue date Nov 27, 2001
- Silicon Valley Group, Inc.
- Gene Jay Martin
- C30 - CRYSTAL GROWTH
Information Patent Grant
Liquid dispensing systems and methods
- Patent number 6,322,337
- Issue date Nov 27, 2001
- Ivek Corporation
- Douglas S. Bensley
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Scanning framing blade apparatus
- Patent number 6,307,619
- Issue date Oct 23, 2001
- Silicon Valley Group, Inc.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Zoom illumination system for use in photolithography
- Patent number 6,307,682
- Issue date Oct 23, 2001
- Silicon Valley Group, Inc.
- Jeffrey M. Hoffman
- G02 - OPTICS
Information Patent Grant
Liquid dispensing systems and methods
- Patent number 6,302,662
- Issue date Oct 16, 2001
- Ivek Corporation
- Douglas S. Bensley
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Hot wall rapid thermal processor
- Patent number 6,300,600
- Issue date Oct 9, 2001
- Silicon Valley Group, Inc.
- Christopher Ratliff
- C30 - CRYSTAL GROWTH
Information Patent Grant
Environment exchange control for material on a wafer surface
- Patent number 6,254,936
- Issue date Jul 3, 2001
- Silicon Valley Group, Inc.
- Emir Gurer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Yield and line width performance for liquid polymers and other mate...
- Patent number 6,248,171
- Issue date Jun 19, 2001
- Silicon Valley Group, Inc.
- Emir Gurer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Direct skew control and interlock of gantry
- Patent number 6,246,203
- Issue date Jun 12, 2001
- Silicon Valley Group, Inc.
- Rexford Abbott
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma deposition of spin chucks to reduce contamination of silicon...
- Patent number 6,242,364
- Issue date Jun 5, 2001
- Silicon Valley Group, Inc.
- Emir Gurer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of uniformly coating a substrate
- Patent number 6,238,735
- Issue date May 29, 2001
- Silicon Valley Group, Inc.
- Robert P. Mandal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Removable cover for protecting a reticle, system including and meth...
- Patent number 6,239,863
- Issue date May 29, 2001
- Silicon Valley Group, Inc.
- Eric B. Catey
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High efficiency photoresist coating
- Patent number 6,191,053
- Issue date Feb 20, 2001
- Silicon Valley Group, Inc.
- Jung-Hoon Chun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for adaptive process control of critical dimen...
- Patent number 6,177,133
- Issue date Jan 23, 2001
- Silicon Valley Group, Inc.
- Emir Gurer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Chemical delivery systems and methods of delivery
- Patent number 6,098,843
- Issue date Aug 8, 2000
- Silicon Valley Group, Inc.
- David Soberanis
- B67 - OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS LIQUID...
Information Patent Grant
Hot plate oven for processing flat panel displays and large wafers
- Patent number 6,091,056
- Issue date Jul 18, 2000
- Silicon Valley Group, Inc.
- Chak D. Kannan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and system for efficient and accurate processing of a discre...
- Publication number 20040205425
- Publication date Oct 14, 2004
- Silicon Valley Group, Inc.
- Roberto B. Wiener
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Method and system for efficient and accurate processing of a discre...
- Publication number 20040177103
- Publication date Sep 9, 2004
- Silicon Valley Group, Inc.
- Roberto B. Wiener
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Lithographic tool with dual isolation system and method for configu...
- Publication number 20030164931
- Publication date Sep 4, 2003
- Silicon Valley Group, Inc.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Polarization beam splitter for photolithography
- Publication number 20030086158
- Publication date May 8, 2003
- Silicon Valley Group, Inc.
- James A. McClay
- G02 - OPTICS
Information Patent Application
Discrete time trajectory planner for lithography system
- Publication number 20030060921
- Publication date Mar 27, 2003
- Silicon Valley Group, Inc.
- Roberto B. Wiener
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system for efficient and accurate filtering and interpol...
- Publication number 20030055855
- Publication date Mar 20, 2003
- Silicon Valley Group, Inc.
- Roberto B. Wiener
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
SYSTEM AND METHOD FOR RETICLE PROTECTION AND TRANSPORT
- Publication number 20030031545
- Publication date Feb 13, 2003
- Silicon Valley Group, Inc.
- Michael DeMarco
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method and system for improving focus accuracy in a lithography system
- Publication number 20020158185
- Publication date Oct 31, 2002
- Silicon Valley Group, Inc.
- Michael L. Nelson
- D21 - PAPER-MAKING PRODUCTION OF CELLULOSE
Information Patent Application
Lithographic tool with dual isolation system and method for configu...
- Publication number 20020118346
- Publication date Aug 29, 2002
- Silicon Valley Group, Inc.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for optimizing the output beam characteristics...
- Publication number 20020118721
- Publication date Aug 29, 2002
- Silicon Valley Group, Inc.,
- Steven N. Bittenson
- G02 - OPTICS
Information Patent Application
Method and system of varying optical imaging performance in the pre...
- Publication number 20020085185
- Publication date Jul 4, 2002
- Silicon Valley Group, Inc.
- June L. Helmus
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical reduction system with control of illumination polarization
- Publication number 20020027719
- Publication date Mar 7, 2002
- Silicon Valley Group, Inc.
- Justin L. Kreuzer
- G02 - OPTICS
Information Patent Application
Optical reduction system with elimination of reticle diffraction in...
- Publication number 20020027718
- Publication date Mar 7, 2002
- Silicon Valley Group, Inc.
- Justin L. Kreuzer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and method for characterizing optical systems using holograp...
- Publication number 20020021460
- Publication date Feb 21, 2002
- Silicon Valley Group, Inc.
- Matthew E. Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Hot wall rapid thermal processor
- Publication number 20020011478
- Publication date Jan 31, 2002
- Silicon Valley Group, Inc.
- Christopher Ratliff
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for a non-contact scavenging seal
- Publication number 20010038442
- Publication date Nov 8, 2001
- Silicon Valley Group, Inc.
- Eric C. Hansell
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Apparatus, system, and method for precision positioning and alignme...
- Publication number 20010033437
- Publication date Oct 25, 2001
- Silicon Valley Group, Inc.
- Michael F. Meehan
- G02 - OPTICS

Trademarklast 30 trademarks

Information Trademark
90747918 - SVG
- Serial number 90747918
- Registration number 6830983
- Filing date Jun 1, 2021
- SILICON VALLEY GROUP, INC.
- 37 - Building construction
Information Trademark
90747839 - SVG
- Serial number 90747839
- Registration number 6830982
- Filing date Jun 1, 2021
- SILICON VALLEY GROUP, INC.
- 37 - Building construction
Information Trademark
88743409 - SV GROUP
- Serial number 88743409
- Registration number 6473010
- Filing date Dec 31, 2019
- SILICON VALLEY GROUP, INC.
- 37 - Building construction
Information Trademark
76052360 - XCELERATE
- Serial number 76052360
- Registration number 2557178
- Filing date May 18, 2000
- Silicon Valley Group, Inc.
- 7 - Machines and machine tools
Information Trademark
76046371 - XCELERUS
- Serial number 76046371
- Filing date May 10, 2000
- Silicon Valley Group, Inc.
- 7 - Machines and machine tools
Information Trademark
76046393 - CELERUS
- Serial number 76046393
- Filing date May 10, 2000
- Silicon Valley Group, Inc.
- 7 - Machines and machine tools
Information Trademark
75625236 - PROCELL
- Serial number 75625236
- Registration number 2474098
- Filing date Jan 21, 1999
- Silicon Valley Group, Inc.
- 7 - Machines and machine tools
Information Trademark
75550725 - 90 SERIES
- Serial number 75550725
- Registration number 2356744
- Filing date Sep 10, 1998
- Silicon Valley Group, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75550727 - 90-SE
- Serial number 75550727
- Registration number 2356746
- Filing date Sep 10, 1998
- Silicon Valley Group, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75550399 - 200 APS
- Serial number 75550399
- Filing date Sep 10, 1998
- Silicon Valley Group, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75550726 - 90-S
- Serial number 75550726
- Registration number 2356745
- Filing date Sep 10, 1998
- Silicon Valley Group, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75488206 - SILICON VALLEY GROUP, INC.
- Serial number 75488206
- Registration number 2834711
- Filing date May 20, 1998
- Silicon Valley Group, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
74319329 - THERMCO
- Serial number 74319329
- Registration number 1815790
- Filing date Oct 2, 1992
- Silicon Valley Group, Inc.
- 11 - Apparatus for lighting, heating, steam generating, cooking, refrigerating, drying, ventilating, water supply and sanitary purposes
Information Trademark
73485114 - PROXCON
- Serial number 73485114
- Registration number 1331801
- Filing date Jun 14, 1984
- Silicon Valley Group, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
73413077 - SVG
- Serial number 73413077
- Registration number 1316645
- Filing date Feb 10, 1983
- Silicon Valley Group, Inc.; The
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments

Silicon Valley Group, Inc.

Organization

Patents Grantslast 30 patents

Apparatus for processing wafers

Method and apparatus for optimizing the output beam characteristics...

Lithographic tool with dual isolation system and method for configu...

Optical reduction system with elimination of reticle diffraction in...

Method and system for selective linewidth optimization during a lit...

Ultraviolet polarization beam splitter for microlithography

Substrate thermal management system

Environment exchange control for material on a wafer surface

Method and apparatus for resolving conflicts in a substrate process...

Process chamber assembly with reflective hot plate and pivoting lid

Method for substrate thermal management

Apparatus and method of cleaning reticles for use in a lithography...

Photoresist outgassing mitigation system method and apparatus for i...

Method for two dimensional adaptive process control of critical dim...

Calcium fluoride (CaF2) stress plate and method of making the same

Liquid dispensing systems and methods

Scanning framing blade apparatus

Zoom illumination system for use in photolithography

Liquid dispensing systems and methods

Hot wall rapid thermal processor

Environment exchange control for material on a wafer surface

Yield and line width performance for liquid polymers and other mate...

Direct skew control and interlock of gantry

Plasma deposition of spin chucks to reduce contamination of silicon...

Method of uniformly coating a substrate

Removable cover for protecting a reticle, system including and meth...

High efficiency photoresist coating

Method and apparatus for adaptive process control of critical dimen...

Chemical delivery systems and methods of delivery

Hot plate oven for processing flat panel displays and large wafers

Patents Applicationslast 30 patents

Method and system for efficient and accurate processing of a discre...

Method and system for efficient and accurate processing of a discre...

Lithographic tool with dual isolation system and method for configu...

Polarization beam splitter for photolithography

Discrete time trajectory planner for lithography system

Method and system for efficient and accurate filtering and interpol...

SYSTEM AND METHOD FOR RETICLE PROTECTION AND TRANSPORT

Method and system for improving focus accuracy in a lithography system

Lithographic tool with dual isolation system and method for configu...

Method and apparatus for optimizing the output beam characteristics...

Method and system of varying optical imaging performance in the pre...

Optical reduction system with control of illumination polarization

Optical reduction system with elimination of reticle diffraction in...

System and method for characterizing optical systems using holograp...

Hot wall rapid thermal processor

Method and apparatus for a non-contact scavenging seal

Apparatus, system, and method for precision positioning and alignme...

Trademarklast 30 trademarks

90747918 - SVG

90747839 - SVG

88743409 - SV GROUP

76052360 - XCELERATE

76046371 - XCELERUS

76046393 - CELERUS

75625236 - PROCELL

75550725 - 90 SERIES

75550727 - 90-SE

75550399 - 200 APS

75550726 - 90-S

75488206 - SILICON VALLEY GROUP, INC.

74319329 - THERMCO

73485114 - PROXCON

73413077 - SVG