SINGULUS TECHNOLOGIES AG

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63796 KAHL/MAIN, DE

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Patents Grantslast 30 patents

Information Patent Grant
Slit diaphragm
- Patent number 12,243,730
- Issue date Mar 4, 2025
- Singulus Technologies AG
- Peter Weipert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Treatment machine, drive unit for a treatment machine and use of th...
- Patent number 12,196,260
- Issue date Jan 14, 2025
- Singulus Technologies AG
- Frank Hofmann
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Process and device for providing vapor
- Patent number 12,188,122
- Issue date Jan 7, 2025
- Singulus Technologies AG
- Oliver Hohn
- G05 - CONTROLLING REGULATING
Information Patent Grant
Vacuum lock and method for transferring a substrate carrier
- Patent number 11,597,998
- Issue date Mar 7, 2023
- Singulus Technologies AG
- Bernhard Cord
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of coating substrates
- Patent number 11,519,065
- Issue date Dec 6, 2022
- Singulus Technologies AG
- Berthold Ocker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device and method for treating substrates using a support roller ha...
- Patent number 11,062,929
- Issue date Jul 13, 2021
- SINGULUS TECHNOLOGIES AG
- Jens Eckstein
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Illuminant
- Patent number 10,902,758
- Issue date Jan 26, 2021
- Singulus Technologies AG
- Kilian Kruse
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Continuous system
- Patent number 10,167,548
- Issue date Jan 1, 2019
- Singulus Technologies AG
- Stefan Kempf
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Method and device for stringing substrates together in coating systems
- Patent number 9,845,202
- Issue date Dec 19, 2017
- Singulus Technologies AG
- Wolfgang Becker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for naturally oxidizing a substrate
- Patent number 9,842,755
- Issue date Dec 12, 2017
- Singulus Technologies AG
- Berthold Ocker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating substrates with an alloy by means of cathode sputtering
- Patent number 9,347,131
- Issue date May 24, 2016
- Singulus Technologies AG
- Wolfram Maass
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for aligning substrates
- Patent number 8,961,094
- Issue date Feb 24, 2015
- Singulus Technologies AG
- Edgar Rüth
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Method and device for identifying objects and for tracking objects...
- Patent number 8,903,125
- Issue date Dec 2, 2014
- Singulus Technologies AG
- Edgar Rüth
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and device for introducing and removing substrates
- Patent number 8,740,536
- Issue date Jun 3, 2014
- Singulus Technologies AG
- Michael Reising
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport device having a deflectable sealing frame
- Patent number 8,740,537
- Issue date Jun 3, 2014
- Singulus Technologies AG
- Michael Reising
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for control of layer thicknesses
- Patent number 8,062,705
- Issue date Nov 22, 2011
- Singulus Technologies AG
- Chieh Ou-Yang
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Sputtering cathode and device and method for coating a substrate wi...
- Patent number 7,799,179
- Issue date Sep 21, 2010
- Singulus Technologies AG
- Wolfram Maass
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for separating disc-shaped substrates
- Patent number 7,520,954
- Issue date Apr 21, 2009
- Singulus Technologies AG
- Martin Kratzer
- G11 - INFORMATION STORAGE
Information Patent Grant
Method and device for controlling thickness during spin coating
- Patent number 6,814,825
- Issue date Nov 9, 2004
- Singulus Technologies AG
- Wolfgang Becker
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Device and method for transporting separate substrates
- Patent number 6,368,435
- Issue date Apr 9, 2002
- Singulus Technologies AG
- Stefan Kempf
- G11 - INFORMATION STORAGE
Information Patent Grant
Magnetron sputtering cathode with magnet disposed between two yoke...
- Patent number 6,344,114
- Issue date Feb 5, 2002
- Singulus Technologies AG
- Eggo Sichmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron sputtering cathode with magnet disposed between two yoke...
- Patent number 6,338,781
- Issue date Jan 15, 2002
- Singulus Technologies AG
- Eggo Sichmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for preventing bubbles or small bubbles when connecting subs...
- Patent number 6,261,403
- Issue date Jul 17, 2001
- Singulus Technologies AG
- Reinhard Gerigk
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Cathodic sputtering device
- Patent number 6,096,180
- Issue date Aug 1, 2000
- Singulus Technologies AG
- Eggo Sichmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
COATING MODULE WITH IMPROVED CATHODE ARRANGEMENT
- Publication number 20250207238
- Publication date Jun 26, 2025
- SINGULUS TECHNOLOGIES AG
- Ralf HEILAND
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING SOURCE HAVING A REFILL DEVICE
- Publication number 20250188589
- Publication date Jun 12, 2025
- SINGULUS TECHNOLOGIES AG
- Sergiy BORODIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING CHAMBER WITH DISTANCE DETECTION FOR THE SUBSTRATES
- Publication number 20250075311
- Publication date Mar 6, 2025
- SINGULUS TECHNOLOGIES AG
- Sergiy BORODIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GENERATION OF TEXTURED SURFACES, MANUFACTURING OF TANDEM SOLAR CELL...
- Publication number 20250040257
- Publication date Jan 30, 2025
- SINGULUS TECHNOLOGIES AG
- Philipp NOACK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND WET BENCH FOR THE IN-LINE PROCESSING OF SOLAR-CELL SUBST...
- Publication number 20250015223
- Publication date Jan 9, 2025
- SINGULUS TECHNOLOGIES AG
- Philipp NOACK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING SOURCE, COATING INSTALLATION AND METHOD FOR COATING SUBSTRATES
- Publication number 20250003052
- Publication date Jan 2, 2025
- SINGULUS TECHNOLOGIES AG
- Andreas LUDWIG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT
- Publication number 20250001450
- Publication date Jan 2, 2025
- SINGULUS TECHNOLOGIES AG
- Stefan KEMPF
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PROCESS FOR MANUFACTURING A STARTING MATERIAL FOR A SILICON SOLAR C...
- Publication number 20240339554
- Publication date Oct 10, 2024
- SINGULUS TECHNOLOGIES AG
- Benjamin MANDLMEIER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPACER DEVICE FOR A HEATING SYSTEM FOR HEATING LARGE-AREA SUBSTRATE...
- Publication number 20240339354
- Publication date Oct 10, 2024
- SINGULUS TECHNOLOGIES AG
- Sergiy BORODIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER
- Publication number 20240286235
- Publication date Aug 29, 2024
- SINGULUS TECHNOLOGIES AG
- Torsten DIPPELL
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MONITORING A FLAME TREATMENT DEVICE
- Publication number 20240271871
- Publication date Aug 15, 2024
- SINGULUS TECHNOLOGIES AG
- Giani BRECHTL
- A62 - LIFE-SAVING FIRE-FIGHTING
Information Patent Application
SLIT DIAPHRAGM
- Publication number 20230274922
- Publication date Aug 31, 2023
- SINGULUS TECHNOLOGIES AG
- Peter WEIPERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATING SYSTEM AND METHOD FOR HEATING LARGE-SURFACE SUBSTRATES
- Publication number 20230260808
- Publication date Aug 17, 2023
- SINGULUS TECHNOLOGIES AG
- Bernhard CORD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR THE PRODUCTION OF A STARTING MATERIAL FOR A S...
- Publication number 20230246118
- Publication date Aug 3, 2023
- SINGULUS TECHNOLOGIES AG
- Benjamin Mandlmeier
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER WITH CENTERING FUNCTION
- Publication number 20220348422
- Publication date Nov 3, 2022
- SINGULUS TECHNOLOGIES AG
- Reiner ROHRMANN
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
PLASMA TREATMENT SYSTEM AND PLASMA TREATMENT METHOD
- Publication number 20220336188
- Publication date Oct 20, 2022
- SINGULUS TECHNOLOGIES AG
- Frank May
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTINUOUS FLOW SYSTEM AND METHOD FOR COATING SUBSTRATES
- Publication number 20210335585
- Publication date Oct 28, 2021
- SINGULUS TECHNOLOGIES AG
- Bernhard Cord
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS AND DEVICE FOR PROVIDING VAPOR
- Publication number 20210189559
- Publication date Jun 24, 2021
- SINGULUS TECHNOLOGIES AG
- Oliver Hohn
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Treatment machine, drive unit for a treatment machine and use of th...
- Publication number 20210190131
- Publication date Jun 24, 2021
- SINGULUS TECHNOLOGIES AG
- Frank HOFMANN
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Vacuum Lock and Method for Transferring a Substrate Carrier
- Publication number 20210002757
- Publication date Jan 7, 2021
- SINGULUS TECHNOLOGIES AG
- Bernhard CORD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR GAS PHASE DEPOSITION
- Publication number 20200283901
- Publication date Sep 10, 2020
- SINGULUS TECHNOLOGIES AG
- Alexey IVANOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF COATING SUBSTRATES
- Publication number 20200224306
- Publication date Jul 16, 2020
- Singulus Technologies AG
- Berthold OCKER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ILLUMINANT
- Publication number 20200143715
- Publication date May 7, 2020
- Singulus Technologies AG
- Kilian KRUSE
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Application
A Non-Contact Substrate Carrier for Simultaneous Rotation and Levi...
- Publication number 20190211446
- Publication date Jul 11, 2019
- Singulus Technologies AG
- Alexey IVANOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR GAS PHASE DEPOSITION
- Publication number 20190177851
- Publication date Jun 13, 2019
- SINGULUS TECHNOLOGIES AG
- Alexey IVANOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHOD FOR TREATING SUBSTRATES USING A SUPPORT ROLLER HA...
- Publication number 20190122914
- Publication date Apr 25, 2019
- SINGULUS TECHNOLOGIES AG
- Jens ECKSTEIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTINUOUS SYSTEM
- Publication number 20180195166
- Publication date Jul 12, 2018
- SINGULUS TECHNOLOGIES AG
- Stefan KEMPF
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR STRINGING SUBSTRATES TOGETHER IN COATING SYSTEMS
- Publication number 20160325941
- Publication date Nov 10, 2016
- SINGULUS TECHNOLOGIES AG
- Wolfgang BECKER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR NATURALLY OXIDIZING A SUBSTRATE
- Publication number 20150380287
- Publication date Dec 31, 2015
- SINGULUS TECHNOLOGIES AG
- Berthold OCKER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR PASSIVATING SOLAR CELLS WITH AN ALUMINIUM OXI...
- Publication number 20150004331
- Publication date Jan 1, 2015
- SINGULUS TECHNOLOGIES AG
- Torsten Dippell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Trademarklast 30 trademarks

Information Trademark
98286124 - TIMARIS
- Serial number 98286124
- Registration number 7692573
- Filing date Nov 27, 2023
- Singulus Technologies AG
- 7 - Machines and machine tools
Information Trademark
79305151 - POLYCOATER
- Serial number 79305151
- Filing date Dec 28, 2020
- Singulus Technologies AG
- 7 - Machines and machine tools
Information Trademark
79308544 - MEDLINE
- Serial number 79308544
- Filing date Dec 28, 2020
- Singulus Technologies AG
- 7 - Machines and machine tools
Information Trademark
79296654 - SINGULUS S
- Serial number 79296654
- Registration number 6661770
- Filing date Aug 12, 2020
- Singulus Technologies AG
- 7 - Machines and machine tools
Information Trademark
79212310 - SINGULUS
- Serial number 79212310
- Registration number 6092891
- Filing date Dec 14, 2016
- Singulus Technologies AG
- 1 - Chemicals used in industry, science and photography, as well as in agriculture, horticulture and forestry
Information Trademark
79131610 - ROTARIS
- Serial number 79131610
- Registration number 4594852
- Filing date Apr 19, 2013
- Singulus Technologies AG
- 7 - Machines and machine tools
Information Trademark
79107669 - CISARIS
- Serial number 79107669
- Registration number 4344645
- Filing date Nov 4, 2011
- Singulus Technologies AG
- 7 - Machines and machine tools
Information Trademark
76030929 - MODULUS
- Serial number 76030929
- Registration number 2647948
- Filing date Apr 19, 2000
- Singulus Technologies AG
- 7 - Machines and machine tools
Information Trademark
75417159 - SPACELINE
- Serial number 75417159
- Registration number 2409747
- Filing date Jan 13, 1998
- Singulus Technologies AG
- 7 - Machines and machine tools

SINGULUS TECHNOLOGIES AG

Organization

Patents Grantslast 30 patents

Slit diaphragm

Treatment machine, drive unit for a treatment machine and use of th...

Process and device for providing vapor

Vacuum lock and method for transferring a substrate carrier

Method of coating substrates

Device and method for treating substrates using a support roller ha...

Illuminant

Continuous system

Method and device for stringing substrates together in coating systems

Method and system for naturally oxidizing a substrate

Coating substrates with an alloy by means of cathode sputtering

Method and device for aligning substrates

Method and device for identifying objects and for tracking objects...

Method and device for introducing and removing substrates

Transport device having a deflectable sealing frame

Method and apparatus for control of layer thicknesses

Sputtering cathode and device and method for coating a substrate wi...

Method and apparatus for separating disc-shaped substrates

Method and device for controlling thickness during spin coating

Device and method for transporting separate substrates

Magnetron sputtering cathode with magnet disposed between two yoke...

Magnetron sputtering cathode with magnet disposed between two yoke...

Method for preventing bubbles or small bubbles when connecting subs...

Cathodic sputtering device

Patents Applicationslast 30 patents

COATING MODULE WITH IMPROVED CATHODE ARRANGEMENT

COATING SOURCE HAVING A REFILL DEVICE

COATING CHAMBER WITH DISTANCE DETECTION FOR THE SUBSTRATES

GENERATION OF TEXTURED SURFACES, MANUFACTURING OF TANDEM SOLAR CELL...

METHOD AND WET BENCH FOR THE IN-LINE PROCESSING OF SOLAR-CELL SUBST...

COATING SOURCE, COATING INSTALLATION AND METHOD FOR COATING SUBSTRATES

SUBSTRATE SUPPORT

PROCESS FOR MANUFACTURING A STARTING MATERIAL FOR A SILICON SOLAR C...

SPACER DEVICE FOR A HEATING SYSTEM FOR HEATING LARGE-AREA SUBSTRATE...

SUBSTRATE CARRIER

MONITORING A FLAME TREATMENT DEVICE

SLIT DIAPHRAGM

HEATING SYSTEM AND METHOD FOR HEATING LARGE-SURFACE SUBSTRATES

METHOD AND SYSTEM FOR THE PRODUCTION OF A STARTING MATERIAL FOR A S...

SUBSTRATE CARRIER WITH CENTERING FUNCTION

PLASMA TREATMENT SYSTEM AND PLASMA TREATMENT METHOD

CONTINUOUS FLOW SYSTEM AND METHOD FOR COATING SUBSTRATES

PROCESS AND DEVICE FOR PROVIDING VAPOR

Treatment machine, drive unit for a treatment machine and use of th...

Vacuum Lock and Method for Transferring a Substrate Carrier

SYSTEM AND METHOD FOR GAS PHASE DEPOSITION

METHOD OF COATING SUBSTRATES

ILLUMINANT

A Non-Contact Substrate Carrier for Simultaneous Rotation and Levi...

SYSTEM AND METHOD FOR GAS PHASE DEPOSITION

DEVICE AND METHOD FOR TREATING SUBSTRATES USING A SUPPORT ROLLER HA...

CONTINUOUS SYSTEM

METHOD AND DEVICE FOR STRINGING SUBSTRATES TOGETHER IN COATING SYSTEMS

METHOD AND SYSTEM FOR NATURALLY OXIDIZING A SUBSTRATE

METHOD AND DEVICE FOR PASSIVATING SOLAR CELLS WITH AN ALUMINIUM OXI...

Trademarklast 30 trademarks

98286124 - TIMARIS

79305151 - POLYCOATER

79308544 - MEDLINE

79296654 - SINGULUS S

79212310 - SINGULUS

79131610 - ROTARIS

79107669 - CISARIS

76030929 - MODULUS

75417159 - SPACELINE