Societe de Production et de Recherches Appliquees

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Patents Grantslast 30 patents

Information Patent Grant
Equipment and method for monitoring an immersion lithography device
- Patent number 7,714,992
- Issue date May 11, 2010
- Societe de Production et de Recherches Appliquees (S.O.P.R.A.)
- Jean-Philippe Piel
- G01 - MEASURING TESTING
Information Patent Grant
Compact spectroscopic ellipsometer
- Patent number 7,230,701
- Issue date Jun 12, 2007
- Societe de Production et de Recherches Appliquees
- Jean-Louis Stehle
- G01 - MEASURING TESTING
Information Patent Grant
High spatial resolution infrared ellipsometer
- Patent number 6,819,423
- Issue date Nov 16, 2004
- Societe de Production et de Recherches Appliquees
- Jean-Louise Stehle
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for ellipsometric metrology for a sample conta...
- Patent number 6,687,002
- Issue date Feb 3, 2004
- Societe de Production et de Recherches Appliquees
- Jean-Louis Stehle
- G01 - MEASURING TESTING
Information Patent Grant
Fibre optic device for homogenizing a laser beam
- Patent number 6,055,346
- Issue date Apr 25, 2000
- Societe de Production et de Recherches Appliquees
- Bruno Godard
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Device for controlling a laser source with multiple laser units for...
- Patent number 6,014,401
- Issue date Jan 11, 2000
- Societe de Production et de Recherches Appliquees
- Bruno Godard
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical device for homogenizing a laser beam
- Patent number 6,014,260
- Issue date Jan 11, 2000
- Societe de Production et de Recherches Appliquees
- Bruno Godard
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High spatial resolution ellipsometry device
- Patent number 5,991,037
- Issue date Nov 23, 1999
- Societe de Production et de Recherches Appliquees
- Jean-Philippe Piel
- G01 - MEASURING TESTING

Societe de Production et de Recherches Appliquees

Organization

Patents Grantslast 30 patents

Equipment and method for monitoring an immersion lithography device

Compact spectroscopic ellipsometer

High spatial resolution infrared ellipsometer

Method and apparatus for ellipsometric metrology for a sample conta...

Fibre optic device for homogenizing a laser beam

Device for controlling a laser source with multiple laser units for...

Optical device for homogenizing a laser beam

High spatial resolution ellipsometry device

Patents Applicationslast 30 patents

Trademarklast 30 trademarks