Number | Date | Country | Kind |
---|---|---|---|
95/09779 | Aug 1995 | FIX |
Filing Document | Filing Date | Country | Kind | 102e Date | 371c Date |
---|---|---|---|---|---|
PCT/FR96/01035 | 7/3/1996 | 1/27/1998 | 1/27/1998 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO97/07392 | 2/27/1997 |
Number | Name | Date | Kind |
---|---|---|---|
5329357 | Bernoux et al. | Jul 1994 | |
5742426 | York | Apr 1998 |
Number | Date | Country |
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2602338 | May 1988 | FRX |
2595471 | Jun 1988 | FRX |
Entry |
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"Spatially Resolved Ellipsometry"; Journal of Applied Physics, Aug. 1, 1986, vol. 60, No. 3; pp. 859-873, Erman M. et al. |
"Magneto-Optical Ellipsometer"; Review of Scientific Instruments, May 1985, pp. 687-690; Nederpel, P.Q.J. et al. |
"Presentation of a New Spectroscopic Phase Modulated Ellipsmeter for In-Situ-and Ex-Situ-Applications"; Laser und Optoelektronik; Apr. 24 (1992), No. 2, pp. 63-67; Brings R. |