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Patents Grants
last 30 patents
Information
Patent Grant
Phase shift blankmask and photomask for EUV lithography
Patent number
11,940,725
Issue date
Mar 26, 2024
S&S TECH CO., LTD.
Cheol Shin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase shift blankmask and photomask for EUV lithography
Patent number
11,927,880
Issue date
Mar 12, 2024
S&S TECH Co., Ltd.
Yong-Dae Kim
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reflective type blankmask and photomask for EUV
Patent number
11,815,801
Issue date
Nov 14, 2023
S&S TECH Co., Ltd.
Cheol Shin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reflective type blankmask and photomask for EUV
Patent number
11,579,521
Issue date
Feb 14, 2023
S&S TECH Co., Ltd.
Cheol Shin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Blankmask and photomask for extreme ultraviolet lithography
Patent number
11,467,485
Issue date
Oct 11, 2022
S&S TECH Co., Ltd.
Cheol Shin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reflective type blankmask for EUV, and method for manufacturing the...
Patent number
11,435,661
Issue date
Sep 6, 2022
S&S TECH Co., Ltd.
Chul-Kyu Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Half-tone attenuated phase shift blankmask and photomask for EUV li...
Patent number
11,360,377
Issue date
Jun 14, 2022
S&S TECH Co., Ltd.
Cheol Shin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Blankmask and photomask, and methods of fabricating the same
Patent number
10,942,445
Issue date
Mar 9, 2021
S&S TECH Co., Ltd.
Cheol Shin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pellicle for EUV lithography and method of fabricating the same
Patent number
10,859,901
Issue date
Dec 8, 2020
S&S TECH Co., Ltd.
Kee-Soo Nam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pellicle for EUV lithography and method of fabricating the same
Patent number
10,768,523
Issue date
Sep 8, 2020
S&S TECH Co., Ltd.
Kee-Soo Nam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Blankmask and photomask using the same
Patent number
10,036,947
Issue date
Jul 31, 2018
S&S TECH Co., Ltd.
Kee-Soo Nam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase shift blankmask and photomask
Patent number
10,018,905
Issue date
Jul 10, 2018
S & S TECH CO., LTD
Kee-Soo Nam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase-shift blankmask and photomask
Patent number
9,851,632
Issue date
Dec 26, 2017
S&S TECH Co., Ltd.
Kee-Soo Nam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Blankmask and photomask using the same
Patent number
9,551,925
Issue date
Jan 24, 2017
S&S TECH CO., LTD.
Kee-Soo Nam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Blankmask and photomask
Patent number
9,482,940
Issue date
Nov 1, 2016
S&S TECH CO., LTD.
Kee-Soo Nam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask blank, photomask, and method for manufacturing same
Patent number
9,389,500
Issue date
Jul 12, 2016
S&S TECH Co., Ltd.
Kee-Soo Nam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase-shift blankmask and method for fabricating the same
Patent number
9,256,119
Issue date
Feb 9, 2016
S&S TECH Co., Ltd.
Kee-Soo Nam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Blankmask and method for fabricating photomask using the same
Patent number
9,229,317
Issue date
Jan 5, 2016
S&S TECH Co., Ltd.
Kee-Soo Nam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Blankmask and photomask using the same
Patent number
8,846,276
Issue date
Sep 30, 2014
S&S TECH Co., Ltd.
Kee-Soo Nam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
BLANKMASK FOR EUV LITHOGRAPHY WITH ABSORBING FILM, AND PHOTOMASK FA...
Publication number
20240329515
Publication date
Oct 3, 2024
S&S TECH Co., Ltd.
Min-Kyu PARK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHASE SHIFT BLANKMASK AND PHOTOMASK FOR EUV LITHOGRAPHY
Publication number
20240329516
Publication date
Oct 3, 2024
S&S TECH Co., Ltd.
Min-Kwang PARK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHASE SHIFT BLANKMASK AND PHOTOMASK FOR EUV LITHOGRAPHY
Publication number
20240126162
Publication date
Apr 18, 2024
S&S TECH CO., LTD.
Yong-Dae KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHASE SHIFT BLANKMASK AND PHOTOMASK FOR EUV LITHOGRAPHY
Publication number
20240126163
Publication date
Apr 18, 2024
S&S TECH CO., LTD.
Yong-Dae KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE FOR EUV LITHOGRAPHY
Publication number
20240036461
Publication date
Feb 1, 2024
S&S TECH Co., Ltd.
Ju-Hee HONG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHASE SHIFT BLANKMASK AND PHOTOMASK FOR EUV LITHOGRAPHY
Publication number
20220269160
Publication date
Aug 25, 2022
S&S TECH CO., LTD.
Yong-Dae KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHASE SHIFT BLANKMASK AND PHOTOMASK FOR EUV LITHOGRAPHY
Publication number
20220236635
Publication date
Jul 28, 2022
S&S TECH CO., LTD.
Cheol SHIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BLANKMASK AND PHOTOMASK
Publication number
20220075258
Publication date
Mar 10, 2022
S&S TECH CO., LTD.
Cheol SHIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REFLECTIVE TYPE BLANKMASK FOR EUV, AND METHOD FOR MANUFACTURING THE...
Publication number
20220066311
Publication date
Mar 3, 2022
S&S TECH CO., LTD.
Chul-Kyu YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BLANKMASK WITH BACKSIDE CONDUCTIVE LAYER, AND PHOTOMASK MANUFACTURE...
Publication number
20220066310
Publication date
Mar 3, 2022
S&S TECH CO., LTD.
Gyeong-Won SEO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PELLICLE FOR EUV LITHOGRAPHY, AND METHOD FOR MANUFACTURING THE SAME
Publication number
20220043336
Publication date
Feb 10, 2022
S&S TECH CO., LTD.
Cheol SHIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REFLECTIVE TYPE BLANKMASK AND PHOTOMASK FOR EUV
Publication number
20210208495
Publication date
Jul 8, 2021
S&S TECH Co., Ltd.
Cheol SHIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REFLECTIVE TYPE BLANKMASK AND PHOTOMASK FOR EUV
Publication number
20210208496
Publication date
Jul 8, 2021
S&S TECH CO., LTD.
Cheol SHIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
BLANKMASK AND PHOTOMASK FOR EXTREME ULTRAVIOLET LITHOGRAPHY
Publication number
20210132487
Publication date
May 6, 2021
S&S TECH CO., LTD.
Cheol SHIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HALF-TONE ATTENUATED PHASE SHIFT BLANKMASK AND PHOTOMASK FOR EUV LI...
Publication number
20210124254
Publication date
Apr 29, 2021
S&S TECH CO., LTD.
Cheol SHIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE FOR EUV LITHOGRAPHY AND METHOD FOR MANUFACTURING THE SAME
Publication number
20210096458
Publication date
Apr 1, 2021
S&S TECH CO., LTD.
Kee-Soo NAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
BLANKMASK AND PHOTOMASK
Publication number
20200379337
Publication date
Dec 3, 2020
S&S TECH CO., LTD.
Cheol SHIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
BLANKMASK AND PHOTOMASK, AND METHODS OF FABRICATING THE SAME
Publication number
20200019053
Publication date
Jan 16, 2020
S&S TECH CO., LTD.
Cheol SHIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE FOR EUV LITHOGRAPHY AND METHOD OF FABRICATING THE SAME
Publication number
20190146324
Publication date
May 16, 2019
S&S TECH Co., Ltd.
Kee-Soo NAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHASE-SHIFT BLANKMASK AND PHASE-SHIFT PHOTOMASK
Publication number
20180335692
Publication date
Nov 22, 2018
S&S TECH CO., LTD.
Kee-Soo NAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHASE-SHIFT BLANKMASK AND METHOD OF FABRICATING THE SAME
Publication number
20180335691
Publication date
Nov 22, 2018
S&S TECH CO., LTD.
Kee-Soo NAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE FOR EUV LITHOGRAPHY AND METHOD OF FABRICATING THE SAME
Publication number
20180259845
Publication date
Sep 13, 2018
S&S TECH CO., LTD.
Kee-Soo NAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
BLANKMASK AND PHOTOMASK USING THE SAME
Publication number
20170023854
Publication date
Jan 26, 2017
S&S TECH Co., Ltd.
Kee-Soo NAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHASE SHIFT BLANKMASK AND PHOTOMASK
Publication number
20160291451
Publication date
Oct 6, 2016
S&S TECH Co., Ltd.
Kee-Soo NAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHASE-SHIFT BLANKMASK AND PHOTOMASK
Publication number
20160054650
Publication date
Feb 25, 2016
S&S TECH Co., Ltd.
Kee-Soo NAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
BLANKMASK AND PHOTOMASK USING THE SAME
Publication number
20150268552
Publication date
Sep 24, 2015
S&S TECH Co., Ltd.
Kee-Soo NAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK BLANK, PHOTOMASK, AND METHOD FOR MANUFACTURING SAME
Publication number
20150212403
Publication date
Jul 30, 2015
S&S TECH CO., LTD.
Kee-Soo NAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
BLANKMASK AND PHOTOMASK
Publication number
20150093689
Publication date
Apr 2, 2015
S&S TECH Co., Ltd.
Kee-Soo NAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHASE-SHIFT BLANKMASK AND METHOD FOR FABRICATING THE SAME
Publication number
20130288165
Publication date
Oct 31, 2013
S&S TECH CO., LTD.
Kee-Soo NAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
BLANKMASK AND PHOTOMASK USING THE SAME
Publication number
20130095415
Publication date
Apr 18, 2013
S&S TECH CO., LTD.
Kee-Soo NAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Trademark
last 30 trademarks