SUMCO TECHXIV Corp.

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Nagasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and device for polishing semiconductor wafer
- Patent number 10,553,420
- Issue date Feb 4, 2020
- Sumco Techxiv Corporation
- Kenji Yamashita
- B24 - GRINDING POLISHING
Information Patent Grant
Producing method and apparatus of silicon single crystal, and silic...
- Patent number 10,294,583
- Issue date May 21, 2019
- Sumco Techxiv Corporation
- Yasuhito Narushima
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for producing single crystal, and method for producing silic...
- Patent number 10,233,562
- Issue date Mar 19, 2019
- Sumco Techxiv Corporation
- Yasuhito Narushima
- C30 - CRYSTAL GROWTH
Information Patent Grant
Manufacturing method of silicon monocrystal
- Patent number 10,227,710
- Issue date Mar 12, 2019
- Sumco Techxiv Corporation
- Yasuhito Narushima
- C30 - CRYSTAL GROWTH
Information Patent Grant
Scattering plate, grinding wheel, and grinding device
- Patent number 9,975,217
- Issue date May 22, 2018
- Sumco Techxiv Corporation
- Yoshinobu Nishimura
- B24 - GRINDING POLISHING
Information Patent Grant
Method for slicing semiconductor single crystal ingot
- Patent number 9,876,078
- Issue date Jan 23, 2018
- Sumco Techxiv Corporation
- Hiroshi Noguchi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Manufacturing method of silicon single crystal having low-resistivi...
- Patent number 9,758,899
- Issue date Sep 12, 2017
- Sumco Techxiv Corporation
- Tomohiro Fukuda
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method and apparatus for manufacturing epitaxial silicon wafer
- Patent number 9,758,871
- Issue date Sep 12, 2017
- Sumco Techxiv Corporation
- Kazuhiro Narahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxial silicon wafer having reduced stacking faults
- Patent number 9,755,022
- Issue date Sep 5, 2017
- Sumco Techxiv Corporation
- Tadashi Kawashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for growing an epitaxial film on a phosphorous-doped silicon...
- Patent number 9,425,264
- Issue date Aug 23, 2016
- Sumco Corporation
- Tadashi Kawashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and etching apparatus of semiconductor wafer
- Patent number 9,305,850
- Issue date Apr 5, 2016
- Sumco Techxiv Corporation
- Kazuaki Kozasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer manufacturing method
- Patent number 9,293,318
- Issue date Mar 22, 2016
- Sumco Techxiv Corporation
- Kenji Yamashita
- B24 - GRINDING POLISHING
Information Patent Grant
Silicon single crystal pulling device and graphite member used therein
- Patent number 9,212,431
- Issue date Dec 15, 2015
- Sumco Techxiv Corporation
- Shinichi Kawazoe
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Silicon crystalline material and method for manufacturing the same
- Patent number 9,181,631
- Issue date Nov 10, 2015
- Sumco Techxiv Corporation
- Shinji Togawa
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for melting semiconductor wafer raw material and crystal gro...
- Patent number 9,103,049
- Issue date Aug 11, 2015
- Sumco Techxiv Kabushiki Kaisha
- Koichi Shimomura
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Single crystal silicon pulling device, method for preventing contam...
- Patent number 9,080,251
- Issue date Jul 14, 2015
- Sumco Techxiv Corporation
- Makato Kamogawa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Processes for production of silicon ingot, silicon wafer and epitax...
- Patent number 9,074,298
- Issue date Jul 7, 2015
- Sumco Techxiv Corporation
- Shinichi Kawazoe
- C30 - CRYSTAL GROWTH
Information Patent Grant
Susceptor for vapor phase epitaxial growth device
- Patent number 9,017,483
- Issue date Apr 28, 2015
- Sumco Corporation
- Takashi Fujikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning semiconductor wafer and semiconductor wafer
- Patent number 8,992,791
- Issue date Mar 31, 2015
- Sumco Techxiv Corporation
- Kazuaki Kozasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing monocrystal, flow straightening cylinder, a...
- Patent number 8,961,686
- Issue date Feb 24, 2015
- Sumco Techxiv Corporation
- Shinichi Kawazoe
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of manufacturing epitaxial silicon wafer and epitaxial silic...
- Patent number 8,956,927
- Issue date Feb 17, 2015
- Sumco Techxiv Corporation
- Tadashi Kawashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon single crystal pull-up apparatus that pulls a doped silicon...
- Patent number 8,920,561
- Issue date Dec 30, 2014
- Sumco Techxiv Corporation
- Yasuhito Narushima
- C30 - CRYSTAL GROWTH
Information Patent Grant
Methods for evaluating and manufacturing semiconductor wafer
- Patent number 8,906,777
- Issue date Dec 9, 2014
- Sumco Techxiv Corporation
- Kazuhiro Iriguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing epitaxial silicon wafer and apparatus therefor
- Patent number 8,888,913
- Issue date Nov 18, 2014
- Sumco Techxiv Corporation
- Kazuhiro Narahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of producing single crystal silicon
- Patent number 8,888,911
- Issue date Nov 18, 2014
- Sumco Techxiv Corporation
- Masayuki Uto
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for producing silicon wafer
- Patent number 8,864,906
- Issue date Oct 21, 2014
- Sumco Techxiv Kabushiki Kaisha
- Hidetoshi Kuroki
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for manufacturing semiconductor wafer
- Patent number 8,853,103
- Issue date Oct 7, 2014
- Sumco Techxiv Corporation
- Shinya Sadohara
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for manufacturing single crystal
- Patent number 8,852,340
- Issue date Oct 7, 2014
- Sumco Techxiv Corporation
- Yasuhito Narushima
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of manufacturing silicon single crystal
- Patent number 8,840,721
- Issue date Sep 23, 2014
- Sumco Techxiv Corporation
- Yasuhito Narushima
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor single crystal production device and producing method...
- Patent number 8,753,446
- Issue date Jun 17, 2014
- Sumco Techxiv Kabushiki Kaisha
- Akiko Noda
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
MANUFACTURING METHOD OF SILICON MONOCRYSTAL
- Publication number 20170029975
- Publication date Feb 2, 2017
- SUMCO TECHXIV CORPORATION
- Yasuhito NARUSHIMA
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD AND DEVICE FOR POLISHING SEMICONDUCTOR WAFER
- Publication number 20160196966
- Publication date Jul 7, 2016
- SUMCO TECHXIV CORPORATION
- Kenji YAMASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCATTERING PLATE, GRINDING WHEEL, AND GRINDING DEVICE
- Publication number 20160176020
- Publication date Jun 23, 2016
- SUMCO TECHXIV CORPORATION
- Yoshinobu NISHIMURA
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR PRODUCING SINGLE CRYSTAL, AND METHOD FOR PRODUCING SILIC...
- Publication number 20160102418
- Publication date Apr 14, 2016
- SUMCO TECHXIV CORPORATION
- Yasuhito NARUSHIMA
- C30 - CRYSTAL GROWTH
Information Patent Application
MANUFACTURING METHOD OF EPITAXIAL SILICON WAFER, AND EPITAXIAL SILI...
- Publication number 20150380493
- Publication date Dec 31, 2015
- SUMCO CORPORATION
- Tadashi KAWASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR WAFER MANUFACTURING METHOD
- Publication number 20150162181
- Publication date Jun 11, 2015
- SUMCO TECHXIV CORPORATION
- Kenji Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON SINGLE CRYSTAL PULLING APPARATUS AND MANUFACTURING METHOD O...
- Publication number 20150107509
- Publication date Apr 23, 2015
- SUMCO TECHXIV CORPORATION
- Tomohiro FUKUDA
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR SLICING SEMICONDUCTOR SINGLE CRYSTAL INGOT
- Publication number 20140295126
- Publication date Oct 2, 2014
- SUMCO TECHXIV CORPORATION
- Hiroshi NOGUCHI
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Application
METHOD FOR MANUFACTURING SINGLE CRYSTAL
- Publication number 20140033967
- Publication date Feb 6, 2014
- SUMCO TECHXIV CORPORATION
- Yasuhito NARUSHIMA
- C30 - CRYSTAL GROWTH
Information Patent Application
PROCESS FOR PRODUCTION OF SILICON SINGLE CRYSTAL, AND HIGHLY DOPED...
- Publication number 20140020617
- Publication date Jan 23, 2014
- SUMCO TECHXIV CORPORATION
- Shinichi KAWAZOE
- C30 - CRYSTAL GROWTH
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS OF SEMICONDUCTOR WAFER
- Publication number 20120305187
- Publication date Dec 6, 2012
- SUMCO TECHXIV CORPORATION
- Kazuaki Kozasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SINGLE CRYSTAL SILICON PULLING DEVICE, METHOD FOR PREVENTING CONTAM...
- Publication number 20120222613
- Publication date Sep 6, 2012
- SUMCO TECHXIV KABUSHIKI KAISHA
- Makato Kamogawa
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF MANUFACTURING EPITAXIAL SILICON WAFER AND APPARATUS THEREFOR
- Publication number 20120015454
- Publication date Jan 19, 2012
- Sumco Techxiv Corporation
- Kazuhiro Narahara
- C30 - CRYSTAL GROWTH
Information Patent Application
PROCESSES FOR PRODUCTION OF SILICON INGOT, SILICON WAFER AND EPITAX...
- Publication number 20110140241
- Publication date Jun 16, 2011
- SUMCO TECHXIV CORPORATION
- Shinichi Kawazoe
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR WAFER
- Publication number 20110143526
- Publication date Jun 16, 2011
- SUMCO TECHXIV CORPORATION
- Shinya Sadohara
- C30 - CRYSTAL GROWTH
Information Patent Application
SILICON SINGLE CRYSTAL PULL-UP APPARATUS
- Publication number 20110132257
- Publication date Jun 9, 2011
- SUMCO TECHXIV CORPORATION
- Yasuhito Narushima
- C30 - CRYSTAL GROWTH
Information Patent Application
SILICON SINGLE CRYSTAL PULL-UP APPARATUS
- Publication number 20110120367
- Publication date May 26, 2011
- SUMCO TECHXIV CORPORATION
- Yasuhito Narushima
- C30 - CRYSTAL GROWTH
Information Patent Application
SILICON SINGLE CRYSTAL PULLING APPARATUS AND MANUFACTURING METHOD O...
- Publication number 20110017948
- Publication date Jan 27, 2011
- SUMCO TECHXIV CORPORATION
- Tomohiro Fukuda
- C30 - CRYSTAL GROWTH
Information Patent Application
PRODUCING METHOD AND APPARATUS OF SILICON SINGLE CRYSTAL, AND SILIC...
- Publication number 20100294999
- Publication date Nov 25, 2010
- SUMCO TECHXIV CORPORATION
- Yasuhito Narushima
- C30 - CRYSTAL GROWTH
Information Patent Application
SEMICONDUCTOR WAFER MANUFACTURING METHOD
- Publication number 20100285665
- Publication date Nov 11, 2010
- SUMCO TECHXIV CORPORATION
- Hiroshi Takai
- B24 - GRINDING POLISHING
Information Patent Application
FILM FORMATION REACTIVE APPARATUS AND METHOD FOR PRODUCING FILM-FOR...
- Publication number 20100272892
- Publication date Oct 28, 2010
- SUMCO TECHXIV CORPORATION
- Hidenori KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING MONOCRYSTAL, FLOW STRAIGHTENING CYLINDER, A...
- Publication number 20100212580
- Publication date Aug 26, 2010
- SUMCO TECHXIV CORPORATION
- Shinichi Kawazoe
- C30 - CRYSTAL GROWTH
Information Patent Application
SEMICONDUCTOR SINGLE CRYSTAL PRODUCTION APPARATUS
- Publication number 20100212588
- Publication date Aug 26, 2010
- SUMCO TECHXIV CORPORATION
- Ayumi Suda
- C30 - CRYSTAL GROWTH
Information Patent Application
CLAMP
- Publication number 20100207385
- Publication date Aug 19, 2010
- SUMCO TECHXIV CORPORATION
- Tomokazu Nishimura
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
MANUFACTURING METHOD FOR SILICON SINGLE CRYSTAL
- Publication number 20100175612
- Publication date Jul 15, 2010
- SUMCO TECHXIV CORPORATION
- Yasuhito NARUSHIMA
- C30 - CRYSTAL GROWTH
Information Patent Application
DOPANT IMPLANTING METHOD AND DOPING APPARATUS
- Publication number 20100151667
- Publication date Jun 17, 2010
- SUMCO TECHXIV CORPORATION
- Yasuhito Narushima
- C30 - CRYSTAL GROWTH
Information Patent Application
DOUBLE-SIDE GRINDING APPARATUS FOR WAFER AND DOUBLE-SIDE GRINDING M...
- Publication number 20100144248
- Publication date Jun 10, 2010
- SUMCO TECHXIV CORPORATION
- Hiroyasu FUTAMURA
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR MANUFACTURING EPITAXIAL SILICON WAFER
- Publication number 20100143579
- Publication date Jun 10, 2010
- SUMCO TECHXIV CORPORATION
- Kazuhiro NARAHARA
- C30 - CRYSTAL GROWTH
Information Patent Application
PROCESS FOR PRODUCTION OF SILICON SINGLE CRYSTAL, AND SILICON SINGL...
- Publication number 20100133485
- Publication date Jun 3, 2010
- SUMCO TECHXIV CORPORATION
- Shinichi Kawazoe
- C30 - CRYSTAL GROWTH
Information Patent Application
SILICON CRYSTALLINE MATERIAL AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20100116194
- Publication date May 13, 2010
- SUMCO TECHXIV CORPORATION
- Shinji Togawa
- C30 - CRYSTAL GROWTH

SUMCO TECHXIV Corp.

Organization

Patents Grantslast 30 patents

Method and device for polishing semiconductor wafer

Producing method and apparatus of silicon single crystal, and silic...

Method for producing single crystal, and method for producing silic...

Manufacturing method of silicon monocrystal

Scattering plate, grinding wheel, and grinding device

Method for slicing semiconductor single crystal ingot

Manufacturing method of silicon single crystal having low-resistivi...

Method and apparatus for manufacturing epitaxial silicon wafer

Epitaxial silicon wafer having reduced stacking faults

Method for growing an epitaxial film on a phosphorous-doped silicon...

Etching method and etching apparatus of semiconductor wafer

Semiconductor wafer manufacturing method

Silicon single crystal pulling device and graphite member used therein

Silicon crystalline material and method for manufacturing the same

Method for melting semiconductor wafer raw material and crystal gro...

Single crystal silicon pulling device, method for preventing contam...

Processes for production of silicon ingot, silicon wafer and epitax...

Susceptor for vapor phase epitaxial growth device

Method of cleaning semiconductor wafer and semiconductor wafer

Method of manufacturing monocrystal, flow straightening cylinder, a...

Method of manufacturing epitaxial silicon wafer and epitaxial silic...

Silicon single crystal pull-up apparatus that pulls a doped silicon...

Methods for evaluating and manufacturing semiconductor wafer

Method of manufacturing epitaxial silicon wafer and apparatus therefor

Method of producing single crystal silicon

Method for producing silicon wafer

Method for manufacturing semiconductor wafer

Method for manufacturing single crystal

Method of manufacturing silicon single crystal

Semiconductor single crystal production device and producing method...

Patents Applicationslast 30 patents

MANUFACTURING METHOD OF SILICON MONOCRYSTAL

METHOD AND DEVICE FOR POLISHING SEMICONDUCTOR WAFER

SCATTERING PLATE, GRINDING WHEEL, AND GRINDING DEVICE

METHOD FOR PRODUCING SINGLE CRYSTAL, AND METHOD FOR PRODUCING SILIC...

MANUFACTURING METHOD OF EPITAXIAL SILICON WAFER, AND EPITAXIAL SILI...

SEMICONDUCTOR WAFER MANUFACTURING METHOD

SILICON SINGLE CRYSTAL PULLING APPARATUS AND MANUFACTURING METHOD O...

METHOD FOR SLICING SEMICONDUCTOR SINGLE CRYSTAL INGOT

METHOD FOR MANUFACTURING SINGLE CRYSTAL

PROCESS FOR PRODUCTION OF SILICON SINGLE CRYSTAL, AND HIGHLY DOPED...

ETCHING METHOD AND ETCHING APPARATUS OF SEMICONDUCTOR WAFER

SINGLE CRYSTAL SILICON PULLING DEVICE, METHOD FOR PREVENTING CONTAM...

METHOD OF MANUFACTURING EPITAXIAL SILICON WAFER AND APPARATUS THEREFOR

PROCESSES FOR PRODUCTION OF SILICON INGOT, SILICON WAFER AND EPITAX...

METHOD FOR MANUFACTURING SEMICONDUCTOR WAFER

SILICON SINGLE CRYSTAL PULL-UP APPARATUS

SILICON SINGLE CRYSTAL PULL-UP APPARATUS

SILICON SINGLE CRYSTAL PULLING APPARATUS AND MANUFACTURING METHOD O...

PRODUCING METHOD AND APPARATUS OF SILICON SINGLE CRYSTAL, AND SILIC...

SEMICONDUCTOR WAFER MANUFACTURING METHOD

FILM FORMATION REACTIVE APPARATUS AND METHOD FOR PRODUCING FILM-FOR...

METHOD OF MANUFACTURING MONOCRYSTAL, FLOW STRAIGHTENING CYLINDER, A...

SEMICONDUCTOR SINGLE CRYSTAL PRODUCTION APPARATUS

CLAMP

MANUFACTURING METHOD FOR SILICON SINGLE CRYSTAL

DOPANT IMPLANTING METHOD AND DOPING APPARATUS

DOUBLE-SIDE GRINDING APPARATUS FOR WAFER AND DOUBLE-SIDE GRINDING M...

METHOD AND APPARATUS FOR MANUFACTURING EPITAXIAL SILICON WAFER

PROCESS FOR PRODUCTION OF SILICON SINGLE CRYSTAL, AND SILICON SINGL...

SILICON CRYSTALLINE MATERIAL AND METHOD FOR MANUFACTURING THE SAME

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