Supercritical Systems Inc.

Organization

Fremont, CA, US

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Gate valve for plus-atmospheric pressure semiconductor process vessels
- Patent number 7,494,107
- Issue date Feb 24, 2009
- Supercritical Systems, Inc.
- Alexei Sheydayi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Method and apparatus for supercritical processing of multiple workp...
- Patent number 6,736,149
- Issue date May 18, 2004
- Supercritical Systems, Inc.
- Maximilian Albert Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Removal of CMP residue from semiconductors using supercritical carb...
- Patent number 6,277,753
- Issue date Aug 21, 2001
- Supercritical Systems Inc.
- William H. Mullee
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
PHASE CHANGE BASED HEATING ELEMENT SYSTEM AND METHOD
- Publication number 20100000681
- Publication date Jan 7, 2010
- SUPERCRITICAL SYSTEMS, INC.
- Ronald T. Bertram
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Computer architecture for communicating between objects
- Publication number 20080109509
- Publication date May 8, 2008
- Supercritical Systems, Inc.
- Joel Lee Dickerson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for selectively filtering residue from a proce...
- Publication number 20060102282
- Publication date May 18, 2006
- Supercritical Systems, Inc.
- Douglas Michael Scott
- B08 - CLEANING
Information Patent Application
Temperature controlled high pressure pump
- Publication number 20060073041
- Publication date Apr 6, 2006
- Supercritical Systems Inc.
- Gentaro Goshi
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
Ionic fluid in supercritical fluid for semiconductor processing
- Publication number 20050227187
- Publication date Oct 13, 2005
- Supercritical Systems Inc.
- Paul E. Schilling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Pump design for circulating supercritical carbon dioxide
- Publication number 20050112003
- Publication date May 26, 2005
- Supercritical Systems, Inc.
- William Dale Jones
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
Processing chamber including a circulation loop integrally formed i...
- Publication number 20050067002
- Publication date Mar 31, 2005
- Supercritical Systems, Inc.
- William Dale Jones
- B08 - CLEANING
Information Patent Application
Alignment means for chamber closure to reduce wear on surfaces
- Publication number 20050034660
- Publication date Feb 17, 2005
- Supercritical Systems, Inc.
- Joseph Hillman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum chuck apparatus and method for holding a wafer during high p...
- Publication number 20050035514
- Publication date Feb 17, 2005
- Supercritical Systems, Inc.
- Joseph Hillman
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Control of fluid flow in the processing of an object with a fluid
- Publication number 20050025628
- Publication date Feb 3, 2005
- Supercritical Systems, Inc.
- William Dale Jones
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
Regulation of flow of processing chemistry only into a processing c...
- Publication number 20050022850
- Publication date Feb 3, 2005
- Supercritical Systems, Inc.
- William Dale Jones
- B08 - CLEANING
Information Patent Application
High-pressure processing chamber for a semiconductor wafer
- Publication number 20050014370
- Publication date Jan 20, 2005
- Supercritical Systems, Inc.
- William Dale Jones
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method of securing a workpiece during high-pressure p...
- Publication number 20040211447
- Publication date Oct 28, 2004
- Supercritical Systems, Inc.
- Kenji Yokomizo
- B08 - CLEANING
Information Patent Application
Tetra-organic ammonium fluoride and HF in supercritical fluid for p...
- Publication number 20040177867
- Publication date Sep 16, 2004
- Supercritical Systems, Inc.
- Paul E. Schilling
- B08 - CLEANING
Information Patent Application
Method and apparatus of utilizing a coating for enhanced holding of...
- Publication number 20040154647
- Publication date Aug 12, 2004
- Supercritical Systems, Inc.
- Alexei Sheydayi
- B08 - CLEANING
Information Patent Application
Vacuum chuck utilizing sintered material and method of providing th...
- Publication number 20040157420
- Publication date Aug 12, 2004
- Supercritical Systems, Inc.
- Alexei Sheydayi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High-pressure processing chamber for a semiconductor wafer
- Publication number 20040157463
- Publication date Aug 12, 2004
- Supercritical Systems, Inc.
- William Dale Jones
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pressure enhanced diaphragm valve
- Publication number 20030155541
- Publication date Aug 21, 2003
- Supercritical Systems, Inc.
- Alexei Sheydayi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Removal of CMP residue from semiconductor substrate using supercrit...
- Publication number 20020086537
- Publication date Jul 4, 2002
- Supercritical Systems Inc.
- William H. Mullee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Removal of polishing residue from substrate using supercritical flu...
- Publication number 20010008800
- Publication date Jul 19, 2001
- Supercritical Systems Inc.
- Robert Koch
- H01 - BASIC ELECTRIC ELEMENTS

Supercritical Systems Inc.

Organization

Patents Grantslast 30 patents

Gate valve for plus-atmospheric pressure semiconductor process vessels

Method and apparatus for supercritical processing of multiple workp...

Removal of CMP residue from semiconductors using supercritical carb...

Patents Applicationslast 30 patents

PHASE CHANGE BASED HEATING ELEMENT SYSTEM AND METHOD

Computer architecture for communicating between objects

Method and apparatus for selectively filtering residue from a proce...

Temperature controlled high pressure pump

Ionic fluid in supercritical fluid for semiconductor processing

Pump design for circulating supercritical carbon dioxide

Processing chamber including a circulation loop integrally formed i...

Alignment means for chamber closure to reduce wear on surfaces

Vacuum chuck apparatus and method for holding a wafer during high p...

Control of fluid flow in the processing of an object with a fluid

Regulation of flow of processing chemistry only into a processing c...

High-pressure processing chamber for a semiconductor wafer

Apparatus and method of securing a workpiece during high-pressure p...

Tetra-organic ammonium fluoride and HF in supercritical fluid for p...

Method and apparatus of utilizing a coating for enhanced holding of...

Vacuum chuck utilizing sintered material and method of providing th...

High-pressure processing chamber for a semiconductor wafer

Pressure enhanced diaphragm valve

Removal of CMP residue from semiconductor substrate using supercrit...

Removal of polishing residue from substrate using supercritical flu...

Trademarklast 30 trademarks