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SURFACE IMAGING SYSTEMS RASTERSONDEN-UND SENSORMESSTECHNIK GMBH (1/3 OWNER

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  • HERZOGENRATH, DE
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  • Information Patent Application

    Micro-electromechanical sensor device
    • Publication number 20080013102
    • Publication date Jan 17, 2008
    • Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V., a corporation...
    • Rudiger Berger
    • G01 - MEASURING TESTING

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