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SURFACE IMAGING SYSTEMS RASTERSONDEN-UND SENSORMESSTECHNIK GMBH (1/3 OWNER
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HERZOGENRATH, DE
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Patents Applications
last 30 patents
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Patent Application
Micro-electromechanical sensor device
Publication number
20080013102
Publication date
Jan 17, 2008
Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V., a corporation...
Rudiger Berger
G01 - MEASURING TESTING