Tegal Corporation

Organization

Petaluma, CA, US

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and a method for controlling the depth of etching during...
- Patent number 7,892,980
- Issue date Feb 22, 2011
- Tegal Corporation
- Michel Puech
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for semiconductor processing
- Patent number 7,867,905
- Issue date Jan 11, 2011
- Tegal Corporation
- Tue Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nanolayer deposition process
- Patent number 7,713,592
- Issue date May 11, 2010
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma semiconductor processing system and method
- Patent number 7,678,705
- Issue date Mar 16, 2010
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dry etch stop process for eliminating electrical shorting in MRAM d...
- Patent number 7,645,618
- Issue date Jan 12, 2010
- Tegal Corporation
- Robert Anthony Ditizio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for, and method of, etching a surface on a wafer
- Patent number 7,467,598
- Issue date Dec 23, 2008
- Tegal Corporation
- Pavel N. Laptev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing system and method
- Patent number 7,442,615
- Issue date Oct 28, 2008
- Tegal Corporation
- Tue Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactor with heated and textured electrodes and surfaces
- Patent number 7,439,188
- Issue date Oct 21, 2008
- Tegal Corporation
- Stephen DeOrnellas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High pressure chemical vapor trapping method
- Patent number 7,425,224
- Issue date Sep 16, 2008
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced pulsed layer deposition
- Patent number 7,361,387
- Issue date Apr 22, 2008
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for, and method of, etching a surface on a wafer
- Patent number 7,270,729
- Issue date Sep 18, 2007
- Tegal Corporation
- Pavel N. Laptev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nanolayer thick film processing system and method
- Patent number 7,235,484
- Issue date Jun 26, 2007
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma etch reactor and method
- Patent number 7,223,699
- Issue date May 29, 2007
- Tegal Corporation
- Stephen P. DeOrnellas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Permanent adherence of the back end of a wafer to an electrical com...
- Patent number 7,208,396
- Issue date Apr 24, 2007
- Tegal Corporation
- Valery V. Felmetsger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive sputtering of silicon nitride films by RF supported DC mag...
- Patent number 7,179,350
- Issue date Feb 20, 2007
- Tegal Corporation
- Pavel N. Laptev
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for processing a wafer including stop-on-aluminum...
- Patent number 7,169,623
- Issue date Jan 30, 2007
- Tegal Corporation
- Robert Ditizio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to plasma deposit on organic polymer dielectric film
- Patent number 7,163,721
- Issue date Jan 16, 2007
- Tegal Corporation
- Zhihong Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Assembly line processing method
- Patent number 7,153,542
- Issue date Dec 26, 2006
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Replaceable shielding apparatus
- Patent number 7,115,169
- Issue date Oct 3, 2006
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer copper structure for improving adhesion property
- Patent number 7,087,522
- Issue date Aug 8, 2006
- Tegal Corporation
- Tue Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Removable lid and floating pivot
- Patent number 7,074,278
- Issue date Jul 11, 2006
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-thermal zone shielding apparatus
- Patent number 7,049,549
- Issue date May 23, 2006
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High pressure chemical vapor trapping system
- Patent number 6,998,097
- Issue date Feb 14, 2006
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for using a hard mask for critical dimension growth containment
- Patent number 6,958,295
- Issue date Oct 25, 2005
- Tegal Corporation
- Stephen P. DeOrnellas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for sequential processing in a two-compartment ch...
- Patent number 6,921,555
- Issue date Jul 26, 2005
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to deposit an impermeable film on porous low-k dielectric film
- Patent number 6,919,101
- Issue date Jul 19, 2005
- Tegal Corporation
- Zhihong Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etch reactor and method
- Patent number 6,905,969
- Issue date Jun 14, 2005
- Tegal Corporation
- Stephen P. DeOrnellas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Redistributing radiation guide
- Patent number 6,859,262
- Issue date Feb 22, 2005
- Tegal Corporation
- Tue Nguyen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Two-compartment chamber for sequential processing
- Patent number 6,858,085
- Issue date Feb 22, 2005
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-thermal zone shielding apparatus
- Patent number 6,844,527
- Issue date Jan 18, 2005
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
NANOLAYER DEPOSITION PROCESS FOR COMPOSITE FILMS
- Publication number 20120021138
- Publication date Jan 26, 2012
- Tegal Corporation
- Robert Anthony Ditizio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND A METHOD FOR CONTROLLING THE DEPTH OF ETCHING DURING...
- Publication number 20110120648
- Publication date May 26, 2011
- Tegal Corporation
- Michel Puech
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NANOLAYER DEPOSITION USING BIAS POWER TREATMENT
- Publication number 20100285237
- Publication date Nov 11, 2010
- Tegal Corporation
- Robert Anthony Ditizio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NANOLAYER DEPOSITION PROCESS
- Publication number 20100190353
- Publication date Jul 29, 2010
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DRY ETCH STOP PROCESS FOR ELIMINATING ELECTRICAL SHORTING IN MRAM D...
- Publication number 20100022030
- Publication date Jan 28, 2010
- TEGAL CORPORATION
- Robert Anthony Ditizio
- C07 - ORGANIC CHEMISTRY
Information Patent Application
Stress adjustment in reactive sputtering
- Publication number 20090242388
- Publication date Oct 1, 2009
- Tegal Corporation
- Pavel N. LAPTEV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Control of crystal orientation and stress in sputter deposited thin...
- Publication number 20090246385
- Publication date Oct 1, 2009
- Tegal Corporation
- Valery FELMETSGER
- C30 - CRYSTAL GROWTH
Information Patent Application
Stress adjustment in reactive sputtering
- Publication number 20090242392
- Publication date Oct 1, 2009
- Tegal Corporation
- Pavel N. LAPTEV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTOR WITH HEATED AND TEXTURED ELECTRODES AND SURFACES
- Publication number 20080318432
- Publication date Dec 25, 2008
- Tegal Corporation
- Stephen P. DeOrnellas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High-adhesive backside metallization
- Publication number 20080083611
- Publication date Apr 10, 2008
- Tegal Corporation
- Valery Felmetsger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Nanolayer Thick Film Processing System
- Publication number 20070251451
- Publication date Nov 1, 2007
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dry etch stop process for eliminating electrical shorting in MRAM d...
- Publication number 20070155027
- Publication date Jul 5, 2007
- Tegal Corporation
- Robert Anthony Ditizio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Integrated decoupling capacitor process
- Publication number 20070026626
- Publication date Feb 1, 2007
- Tegal Corporation
- Robert Ditizio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing system and method
- Publication number 20070020945
- Publication date Jan 25, 2007
- Tegal Corporation
- Tue Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method for semiconductor processing
- Publication number 20070020898
- Publication date Jan 25, 2007
- Tegal Corporation
- Tue Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method for processing a wafer including stop-on-alumina...
- Publication number 20060186496
- Publication date Aug 24, 2006
- Tegal Corporation
- Robert Ditizio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High pressure chemical vapor trapping method
- Publication number 20060131363
- Publication date Jun 22, 2006
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System and method for processing a wafer including stop-on-aluminum...
- Publication number 20060051881
- Publication date Mar 9, 2006
- Tegal Corporation
- Robert Ditizio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for sequential processing in a two-compartment ch...
- Publication number 20060046412
- Publication date Mar 2, 2006
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and system for sequential processing in a two-compartment ch...
- Publication number 20060040055
- Publication date Feb 23, 2006
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma etch reactor and method
- Publication number 20050164513
- Publication date Jul 28, 2005
- Tegal Corporation
- Stephen P. DeOrnellas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method to deposit an impermeable film on porous low-k dielectric film
- Publication number 20050084619
- Publication date Apr 21, 2005
- Tegal Corporation
- Zhihong Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma enhanced pulsed layer deposition
- Publication number 20050005855
- Publication date Jan 13, 2005
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-thermal zone shielding apparatus
- Publication number 20040261722
- Publication date Dec 30, 2004
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Nanolayer thick film processing system and method
- Publication number 20040224505
- Publication date Nov 11, 2004
- Tegal Corporation
- Tue Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma etch reactor and method
- Publication number 20020139665
- Publication date Oct 3, 2002
- Tegal Corporation
- Stephen P. DeOrnellas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for using a hard mask for critical dimension growth containment
- Publication number 20020132485
- Publication date Sep 19, 2002
- Tegal Corporation
- Stephen P. DeOrnellas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reactor with heated and textured electrodes and surfaces
- Publication number 20020036064
- Publication date Mar 28, 2002
- Tegal Corporation
- Stephen DeOrnellas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for minimizing the critical dimension growth of a feature on...
- Publication number 20010031561
- Publication date Oct 18, 2001
- Tegal Corporation
- Stephen P. DeOrnellas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma reactor with a deposition shield
- Publication number 20010029894
- Publication date Oct 18, 2001
- Tegal Corporation
- Stephen P. DeOrnellas
- H01 - BASIC ELECTRIC ELEMENTS

Trademarklast 30 trademarks

Information Trademark
78449048 - ONCORE
- Serial number 78449048
- Filing date Jul 12, 2004
- Tegal Corporation
- 7 - Machines and machine tools
Information Trademark
78414643 - SIMPLUS
- Serial number 78414643
- Registration number 3027091
- Filing date May 6, 2004
- Tegal Corporation
- 7 - Machines and machine tools
Information Trademark
78414028 - NLD
- Serial number 78414028
- Registration number 3596485
- Filing date May 6, 2004
- Tegal Corporation
- 7 - Machines and machine tools
Information Trademark
76228216 - SPECTRA
- Serial number 76228216
- Registration number 2836852
- Filing date Mar 21, 2001
- Tegal Corporation
- 7 - Machines and machine tools
Information Trademark
76201857 - 901G
- Serial number 76201857
- Filing date Jan 30, 2001
- Tegal Corporation
- 7 - Machines and machine tools
Information Trademark
76201864 - 903G
- Serial number 76201864
- Filing date Jan 30, 2001
- Tegal Corporation
- 7 - Machines and machine tools
Information Trademark
76201866 - I901
- Serial number 76201866
- Filing date Jan 30, 2001
- Tegal Corporation
- 7 - Machines and machine tools
Information Trademark
76201854 - 981
- Serial number 76201854
- Filing date Jan 30, 2001
- Tegal Corporation
- 7 - Machines and machine tools
Information Trademark
76201858 - 980
- Serial number 76201858
- Registration number 2967426
- Filing date Jan 30, 2001
- Tegal Corporation
- 7 - Machines and machine tools
Information Trademark
76201861 - I903
- Serial number 76201861
- Filing date Jan 30, 2001
- Tegal Corporation
- 7 - Machines and machine tools
Information Trademark
76201862 - 983
- Serial number 76201862
- Filing date Jan 30, 2001
- Tegal Corporation
- 7 - Machines and machine tools
Information Trademark
75873098 - TEGAL
- Serial number 75873098
- Registration number 2495626
- Filing date Dec 16, 1999
- Tegal Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75460085 - NOVOL
- Serial number 75460085
- Filing date Apr 1, 1998
- Tegal Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
74572276 - HRE-
- Serial number 74572276
- Filing date Sep 12, 1994
- Tegal Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
74572630 - T TEGAL
- Serial number 74572630
- Filing date Sep 12, 1994
- Tegal Corporation
- 42 - Scientific and technological services and research and design relating thereto
Information Trademark
74572277 - ZERO CONSUMABLES
- Serial number 74572277
- Filing date Sep 12, 1994
- Tegal Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
73668774 - TEGAL
- Serial number 73668774
- Registration number 1494896
- Filing date Jun 26, 1987
- Tegal Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
73668780 - TEGAL COMPLETE CUSTOMER SATISFACTION
- Serial number 73668780
- Registration number 1493986
- Filing date Jun 26, 1987
- Tegal Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
73236833 - PLASMALINE
- Serial number 73236833
- Registration number 1168140
- Filing date Oct 26, 1979
- Tegal Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
73236826 - TEGAL CORPORATION
- Serial number 73236826
- Registration number 1183548
- Filing date Oct 26, 1979
- Tegal Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments

Tegal Corporation

Organization

Patents Grantslast 30 patents

Apparatus and a method for controlling the depth of etching during...

System and method for semiconductor processing

Nanolayer deposition process

Plasma semiconductor processing system and method

Dry etch stop process for eliminating electrical shorting in MRAM d...

System for, and method of, etching a surface on a wafer

Semiconductor processing system and method

Reactor with heated and textured electrodes and surfaces

High pressure chemical vapor trapping method

Plasma enhanced pulsed layer deposition

System for, and method of, etching a surface on a wafer

Nanolayer thick film processing system and method

Plasma etch reactor and method

Permanent adherence of the back end of a wafer to an electrical com...

Reactive sputtering of silicon nitride films by RF supported DC mag...

System and method for processing a wafer including stop-on-aluminum...

Method to plasma deposit on organic polymer dielectric film

Assembly line processing method

Replaceable shielding apparatus

Multilayer copper structure for improving adhesion property

Removable lid and floating pivot

Multi-thermal zone shielding apparatus

High pressure chemical vapor trapping system

Method for using a hard mask for critical dimension growth containment

Method and system for sequential processing in a two-compartment ch...

Method to deposit an impermeable film on porous low-k dielectric film

Plasma etch reactor and method

Redistributing radiation guide

Two-compartment chamber for sequential processing

Multi-thermal zone shielding apparatus

Patents Applicationslast 30 patents

NANOLAYER DEPOSITION PROCESS FOR COMPOSITE FILMS

APPARATUS AND A METHOD FOR CONTROLLING THE DEPTH OF ETCHING DURING...

NANOLAYER DEPOSITION USING BIAS POWER TREATMENT

NANOLAYER DEPOSITION PROCESS

DRY ETCH STOP PROCESS FOR ELIMINATING ELECTRICAL SHORTING IN MRAM D...

Stress adjustment in reactive sputtering

Control of crystal orientation and stress in sputter deposited thin...

Stress adjustment in reactive sputtering

REACTOR WITH HEATED AND TEXTURED ELECTRODES AND SURFACES

High-adhesive backside metallization

Nanolayer Thick Film Processing System

Dry etch stop process for eliminating electrical shorting in MRAM d...

Integrated decoupling capacitor process

Semiconductor processing system and method

System and method for semiconductor processing

System and method for processing a wafer including stop-on-alumina...

High pressure chemical vapor trapping method

System and method for processing a wafer including stop-on-aluminum...

Method and system for sequential processing in a two-compartment ch...

Method and system for sequential processing in a two-compartment ch...

Plasma etch reactor and method

Method to deposit an impermeable film on porous low-k dielectric film

Plasma enhanced pulsed layer deposition

Multi-thermal zone shielding apparatus

Nanolayer thick film processing system and method

Plasma etch reactor and method

Method for using a hard mask for critical dimension growth containment

Reactor with heated and textured electrodes and surfaces

Method for minimizing the critical dimension growth of a feature on...

Plasma reactor with a deposition shield

Trademarklast 30 trademarks

78449048 - ONCORE

78414643 - SIMPLUS

78414028 - NLD

76228216 - SPECTRA

76201857 - 901G

76201864 - 903G

76201866 - I901

76201854 - 981

76201858 - 980

76201861 - I903

76201862 - 983

75873098 - TEGAL

75460085 - NOVOL

74572276 - HRE-

74572630 - T TEGAL