Tel Kyushu Limited

Organization

Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Heat process device
- Patent number 5,225,663
- Issue date Jul 6, 1993
- Tel Kyushu Limited
- Kimiharu Matsumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating apparatus and method for applying a liquid to a semiconduct...
- Patent number 5,089,305
- Issue date Feb 18, 1992
- Tokyo Electron Limited
- Mitsuru Ushijima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating apparatus
- Patent number 5,070,813
- Issue date Dec 10, 1991
- Tokyo Electron Limited
- Hiroyuki Sakai
- G05 - CONTROLLING REGULATING
Information Patent Grant
Resist process apparatus
- Patent number 5,061,144
- Issue date Oct 29, 1991
- Tokyo Electron Limited
- Masami Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for measuring the flow rate of exhaust gas
- Patent number 5,038,608
- Issue date Aug 13, 1991
- Tokyo Electron Limited
- Hiroyuki Sakai
- G01 - MEASURING TESTING
Information Patent Grant
Processing liquid supply unit
- Patent number 5,035,200
- Issue date Jul 30, 1991
- Tokyo Electron Limited
- Masashi Moriyama
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Coating apparatus and method for applying a liquid to a semiconduct...
- Patent number 5,002,008
- Issue date Mar 26, 1991
- Tokyo Electron Limited
- Mitsuru Ushijima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for coating a photo-resist film and/or developing it afte...
- Patent number 4,985,722
- Issue date Jan 15, 1991
- Tokyo Electron Limited
- Mitsuru Ushijima
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Exposure method and apparatus therefor
- Patent number 4,910,549
- Issue date Mar 20, 1990
- Tokyo Electron Limited
- Mamoru Sugita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating device
- Patent number 4,899,686
- Issue date Feb 13, 1990
- Tokyo Electron Limited
- Takayuki Toshima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tel Kyushu Limited

Organization

Patents Grantslast 30 patents

Heat process device

Coating apparatus and method for applying a liquid to a semiconduct...

Coating apparatus

Resist process apparatus

Method for measuring the flow rate of exhaust gas

Processing liquid supply unit

Coating apparatus and method for applying a liquid to a semiconduct...

Apparatus for coating a photo-resist film and/or developing it afte...

Exposure method and apparatus therefor

Coating device

Patents Applicationslast 30 patents

Trademarklast 30 trademarks