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Patents Grants
last 30 patents
Information
Patent Grant
Constant-force profilometer with stylus-stabilizing sensor assembly...
Patent number
5,705,741
Issue date
Jan 6, 1998
Tencor Instruments
Steven G. Eaton
G01 - MEASURING TESTING
Information
Patent Grant
Variable spot-size scanning apparatus
Patent number
5,633,747
Issue date
May 27, 1997
Tencor Instruments
Mehrdad Nikoonahad
G02 - OPTICS
Information
Patent Grant
Focused beam spectroscopic ellipsometry method and system
Patent number
5,608,526
Issue date
Mar 4, 1997
Tencor Instruments
Timothy R. Piwonka-Corle
G01 - MEASURING TESTING
Information
Patent Grant
Particle detection system employing a subsystem for collecting scat...
Patent number
5,604,585
Issue date
Feb 18, 1997
Tencor Instruments
Ralph Johnson
G01 - MEASURING TESTING
Information
Patent Grant
Method and system for calibrating an ellipsometer
Patent number
5,581,350
Issue date
Dec 3, 1996
Tencor Instruments
Xing Chen
G01 - MEASURING TESTING
Information
Patent Grant
Wafer alignment sensor
Patent number
5,576,831
Issue date
Nov 19, 1996
Tencor Instruments
Mehrdad Nikoonahad
G01 - MEASURING TESTING
Information
Patent Grant
Surface scanning apparatus and method using crossed-cylinder optica...
Patent number
5,565,979
Issue date
Oct 15, 1996
Tencor Instruments
Kenneth P. Gross
G01 - MEASURING TESTING
Information
Patent Grant
Eddy current test method and apparatus for measuring conductance by...
Patent number
5,552,704
Issue date
Sep 3, 1996
Tencor Instruments
Chester L. Mallory
G01 - MEASURING TESTING
Information
Patent Grant
Optical wafer positioning system
Patent number
5,530,550
Issue date
Jun 25, 1996
Tencor Instruments
Mehrdad Nikoonahad
G01 - MEASURING TESTING
Information
Patent Grant
Surface scanner with thin film gauge
Patent number
5,416,594
Issue date
May 16, 1995
Tencor Instruments
Kenneth P. Gross
G01 - MEASURING TESTING
Information
Patent Grant
Process for inspecting patterned wafers
Patent number
5,355,212
Issue date
Oct 11, 1994
Tencor Instruments
Keith B. Wells
G01 - MEASURING TESTING
Information
Patent Grant
Profilometer stylus assembly insensitive to vibration
Patent number
5,309,755
Issue date
May 10, 1994
Tencor Instruments
William R. Wheeler
G01 - MEASURING TESTING
Information
Patent Grant
Adaptive spatial filter for surface inspection
Patent number
5,276,498
Issue date
Jan 4, 1994
Tencor Instruments
Lee K. Galbraith
G02 - OPTICS
Information
Patent Grant
Speckle reduction track filter apparatus for optical inspection of...
Patent number
5,264,912
Issue date
Nov 23, 1993
Tencor Instruments
John L. Vaught
G02 - OPTICS
Information
Patent Grant
Area-division beamsplitter with broad spectral bandwidth
Patent number
5,243,465
Issue date
Sep 7, 1993
Tencor Instruments
Michael E. Fein
G02 - OPTICS
Information
Patent Grant
Thin film thickness monitor
Patent number
5,241,366
Issue date
Aug 31, 1993
Tencor Instruments
Christopher F. Bevis
G01 - MEASURING TESTING
Information
Patent Grant
Particle detector for rough surfaces
Patent number
5,189,481
Issue date
Feb 23, 1993
Tencor Instruments
Peter C. Jann
G01 - MEASURING TESTING
Information
Patent Grant
Flat field telecentric scanner
Patent number
5,168,386
Issue date
Dec 1, 1992
Tencor Instruments
Lee K. Galbraith
G02 - OPTICS
Information
Patent Grant
Position location in surface scanning using interval timing between...
Patent number
5,083,035
Issue date
Jan 21, 1992
Tencor Instruments
Jiri Pecen
G02 - OPTICS
Information
Patent Grant
Particle detection on a patterned or bare wafer surface
Patent number
5,076,692
Issue date
Dec 31, 1991
Tencor Instruments
Armand P. Neukermans
G01 - MEASURING TESTING
Information
Patent Grant
Cantilevered microtip manufacturing by ion implantation and etching
Patent number
5,026,437
Issue date
Jun 25, 1991
Tencor Instruments
Armand P. Neukermans
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Shock wave particle removal method and apparatus
Patent number
5,023,424
Issue date
Jun 11, 1991
Tencor Instruments
John L. Vaught
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Photoemission contaminant detector
Patent number
4,998,019
Issue date
Mar 5, 1991
Tencor Instruments
Stanley Stokowski
G01 - MEASURING TESTING
Information
Patent Grant
Via hole checker
Patent number
4,988,877
Issue date
Jan 29, 1991
Tencor Instruments
Stanley Stokowksi
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for detecting and sizing particles on surfaces
Patent number
4,967,095
Issue date
Oct 30, 1990
Tencor Instruments
Josef Berger
G01 - MEASURING TESTING
Information
Patent Grant
Vapor discharge lamp with gradient temperature control
Patent number
4,965,484
Issue date
Oct 23, 1990
Tencor Instruments
Michael E. Fein
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle detection on patterned wafers and the like
Patent number
4,898,471
Issue date
Feb 6, 1990
Tencor Instruments
John L. Vaught
G01 - MEASURING TESTING
Information
Patent Grant
Thin film thickness measuring method
Patent number
4,899,055
Issue date
Feb 6, 1990
Tencor Instruments
Arnold Adams
G01 - MEASURING TESTING
Information
Patent Grant
High brightness and viewed gas discharge lamp
Patent number
4,877,997
Issue date
Oct 31, 1989
Tencor Instruments
Michael E. Fein
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Suspension assembly for a scanning mirror
Patent number
4,861,125
Issue date
Aug 29, 1989
Tencor Instruments
John L. Vaught
G02 - OPTICS
Patents Applications
last 30 patents
Trademark
last 30 trademarks
Information
Trademark
75181704 - HRP
Serial number
75181704
Registration number
2316918
Filing date
Oct 15, 1996
TENCOR INSTRUMENTS
9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information
Trademark
75181771 - ULTRALITE
Serial number
75181771
Registration number
2446633
Filing date
Oct 15, 1996
TENCOR INSTRUMENTS
9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information
Trademark
75181772 - DURASHARP
Serial number
75181772
Registration number
2444630
Filing date
Oct 15, 1996
TENCOR INSTRUMENTS
9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information
Trademark
75074075 - DBS
Serial number
75074075
Filing date
Mar 18, 1996
TENCOR INSTRUMENTS
9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information
Trademark
75023317 - MICROVIEW
Serial number
75023317
Registration number
2236992
Filing date
Nov 22, 1995
Tencor Instruments
9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information
Trademark
74693396 - SWIFTACCESS
Serial number
74693396
Filing date
Jun 26, 1995
Tencor Instruments
9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information
Trademark
73792473 - SURFSCAN
Serial number
73792473
Registration number
1615482
Filing date
Apr 10, 1989
Tencor Instruments
9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information
Trademark
73757817 - TENCOR
Serial number
73757817
Registration number
1549939
Filing date
Oct 17, 1988
Tencor Instruments
9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information
Trademark
73199618 - SONOGAGE RT2
Serial number
73199618
Registration number
1142341
Filing date
Jan 11, 1979
Tencor Instruments
9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information
Trademark
73159311 - TI
Serial number
73159311
Registration number
1122240
Filing date
Feb 21, 1978
TENCOR INSTRUMENTS
9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information
Trademark
73159312 - ALPHA-STEP
Serial number
73159312
Registration number
1122241
Filing date
Feb 21, 1978
TENCOR INSTRUMENTS
9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments