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Patents Grants
last 30 patents
Information
Patent Grant
F-P sensor probe, absolute distance measurement device, and absolut...
Patent number
12,174,322
Issue date
Dec 24, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang Luo
G01 - MEASURING TESTING
Information
Patent Grant
Template mark detection method and template position correction met...
Patent number
12,100,188
Issue date
Sep 24, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang Luo
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Mask topology optimization method and system for surface plasmon ne...
Patent number
12,092,960
Issue date
Sep 17, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for inverse optical proximity correction of super-resolution...
Patent number
12,085,846
Issue date
Sep 10, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for preparing super-resolution lens based on metal-dielectri...
Patent number
12,085,741
Issue date
Sep 10, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang Luo
G02 - OPTICS
Information
Patent Grant
Near-field lithography immersion system, immersion unit and interfa...
Patent number
12,078,937
Issue date
Sep 3, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multifunctional lithography device
Patent number
11,868,055
Issue date
Jan 9, 2024
The Institute of Optics and Electronics, the Chinese Academy of Sciences
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Visible light-transparent and radiative-cooling multilayer film
Patent number
11,754,352
Issue date
Sep 12, 2023
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang Luo
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Method for etching curved substrate
Patent number
11,724,962
Issue date
Aug 15, 2023
The Institute of Optics and Electronics, the Chinese Academy of Sciences
Xiangang Luo
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Intelligent correction device control system for super-resolution l...
Patent number
11,714,358
Issue date
Aug 1, 2023
The Institute of Optics and Electronics, the Chinese Academy of Sciences
Xiangang Luo
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Secondary imaging optical lithography method and apparatus
Patent number
11,693,320
Issue date
Jul 4, 2023
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of fabricating micro-nano structure
Patent number
11,675,273
Issue date
Jun 13, 2023
The Institute of Optics and Electronics, the Chinese Academy of Sciences
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sub-wavelength structural material having patch type array and comp...
Patent number
11,592,602
Issue date
Feb 28, 2023
THE INSTITUTE OF OPTICS AND ELECTRONICS, CHINESE ACADEMY OF SCIENCES
Xiangang Luo
F41 - WEAPONS
Information
Patent Grant
Stitching-measurement device and stitching-measurement method
Patent number
11,365,964
Issue date
Jun 21, 2022
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Fuchao Xu
G01 - MEASURING TESTING
Information
Patent Grant
Detection device for detecting lens surface in stitching interferom...
Patent number
11,268,808
Issue date
Mar 8, 2022
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Dachun Gan
G01 - MEASURING TESTING
Information
Patent Grant
Three-dimensional dynamic adjustment and locking mechanism
Patent number
11,175,472
Issue date
Nov 16, 2021
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xianchang Zhu
G02 - OPTICS
Information
Patent Grant
Methods and apparatuses for coating photoresist
Patent number
11,061,330
Issue date
Jul 13, 2021
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang Luo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for detecting optimal focal plane of lithograp...
Patent number
10,976,670
Issue date
Apr 13, 2021
The Institute of Optics and Electronics, the Chinese Academy of Sciences
Jiajun Xu
G02 - OPTICS
Information
Patent Grant
Flaw detecting apparatus, method for detecting flaw of plane mirror...
Patent number
10,962,487
Issue date
Mar 30, 2021
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Fuchao Xu
G01 - MEASURING TESTING
Information
Patent Grant
Automatic detection device and method for detecting surface detects...
Patent number
10,782,248
Issue date
Sep 22, 2020
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Haiyang Quan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Adaptive optical retina imaging device and method
Patent number
10,070,782
Issue date
Sep 11, 2018
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Yi He
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Super-resolution imaging photolithography
Patent number
9,958,784
Issue date
May 1, 2018
THE INSTITUTE OF OPTICS AND ELECTRONICS, CHINESE ACADEMY OF SCIENCES
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
High accuracy measurement system for focusing and leveling
Patent number
9,846,373
Issue date
Dec 19, 2017
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Yanli Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for resisting noise of co-phasing system of dispersed fringe...
Patent number
9,829,718
Issue date
Nov 28, 2017
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Changhui Rao
G02 - OPTICS
Information
Patent Grant
Microscopic surgery system and navigation method guided by optical...
Patent number
9,693,829
Issue date
Jul 4, 2017
The Institute of Optics and Electronics, the Chinese Academy of Sciences
Guohua Shi
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Adaptive optical objective inspection instrument for optic nerve fu...
Patent number
9,610,022
Issue date
Apr 4, 2017
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Yun Dai
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Dual beamsplitting element based excimer laser pulse stretching device
Patent number
9,537,280
Issue date
Jan 3, 2017
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Bincheng Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for detecting focus plane based on Hartmann wavefront detect...
Patent number
9,400,220
Issue date
Jul 26, 2016
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xianchang Zhu
G01 - MEASURING TESTING
Information
Patent Grant
Detection devices and methods using diffraction wavefront of a pinh...
Patent number
9,250,059
Issue date
Feb 2, 2016
Institute of Optics and Electronics, Chinese Academy of Science
Xin Jia
G01 - MEASURING TESTING
Information
Patent Grant
Method of eliminating offset in spot centroid due to crosstalk
Patent number
9,236,943
Issue date
Jan 12, 2016
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiaoyu Ma
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Patents Applications
last 30 patents
Information
Patent Application
OPTICAL MONITORING DEVICE AND METHOD FOR CONTROLLING COATING THICKN...
Publication number
20240318302
Publication date
Sep 26, 2024
Institute of Optics and Electronics, Chinese Academy of Sciences
Cunding LIU
G01 - MEASURING TESTING
Information
Patent Application
PHOTORESIST COMPOSITION AND USE THEREOF
Publication number
20240280901
Publication date
Aug 22, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang LUO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
NEAR-FIELD LITHOGRAPHY IMMERSION SYSTEM, IMMERSION UNIT AND INTERFA...
Publication number
20240272558
Publication date
Aug 15, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang LUO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
TEMPLATE MARK DETECTION METHOD AND TEMPLATE POSITION CORRECTION MET...
Publication number
20240273853
Publication date
Aug 15, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang LUO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR PREPARING SUPER-RESOLUTION LENS BASED ON METAL-DIELECTRI...
Publication number
20240264343
Publication date
Aug 8, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang LUO
G02 - OPTICS
Information
Patent Application
F-P SENSOR PROBE, ABSOLUTE DISTANCE MEASUREMENT DEVICE, AND ABSOLUT...
Publication number
20240264285
Publication date
Aug 8, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang LUO
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR INVERSE OPTICAL PROXIMITY CORRECTION OF SUPER-RESOLUTION...
Publication number
20240264521
Publication date
Aug 8, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang LUO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK TOPOLOGY OPTIMIZATION METHOD AND SYSTEM FOR SURFACE PLASMON NE...
Publication number
20240264535
Publication date
Aug 8, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang LUO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOLITHOGRAPHY METHOD
Publication number
20240264523
Publication date
Aug 8, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang LUO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION FIELD NON-UNIFORMITY DETECTION SYSTEM, DETECTION METHO...
Publication number
20240265500
Publication date
Aug 8, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang LUO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR ETCHING CURVED SUBSTRATE
Publication number
20230174416
Publication date
Jun 8, 2023
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang Luo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIFUNCTIONAL LITHOGRAPHY DEVICE
Publication number
20230129163
Publication date
Apr 27, 2023
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF FABRICATING MICRO-NANO STRUCTURE
Publication number
20230132100
Publication date
Apr 27, 2023
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INTELLIGENT CORRECTION DEVICE CONTROL SYSTEM FOR SUPER-RESOLUTION L...
Publication number
20230126995
Publication date
Apr 27, 2023
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang Luo
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
OPTICAL MONITORING DEVICE AND METHOD FOR CONTROLLING COATING THICKN...
Publication number
20220403504
Publication date
Dec 22, 2022
Institute of Optics and Electronics, Chinese Academy of Sciences
Cunding LIU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ULTRA-LARGE AREA SCANNING REACTIVE ION ETCHING MACHINE AND ETCHING...
Publication number
20220068617
Publication date
Mar 3, 2022
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang LUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DETECTION DEVICE FOR DETECTING LENS SURFACE IN STITCHING INTERFEROM...
Publication number
20210381827
Publication date
Dec 9, 2021
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Dachun GAN
G01 - MEASURING TESTING
Information
Patent Application
Method And Device For Measuring Apex Radius Of Optical Element Base...
Publication number
20210364278
Publication date
Nov 25, 2021
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Gaofeng WU
G01 - MEASURING TESTING
Information
Patent Application
FLEXIBLE HINGE STRUCTURE
Publication number
20210332845
Publication date
Oct 28, 2021
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Taotao FU
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
NEGATIVE REFRACTION IMAGING LITHOGRAPHIC METHOD AND EQUIPMENT
Publication number
20210200079
Publication date
Jul 1, 2021
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang LUO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SINGLE-POINT DRIVEN AXIAL ADJUSTMENT MECHANISM
Publication number
20210011245
Publication date
Jan 14, 2021
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xianchang ZHU
G02 - OPTICS
Information
Patent Application
VISIBLE LIGHT-TRANSPARENT AND RADIATIVE-COOLING MULTILAYER FILM
Publication number
20210003354
Publication date
Jan 7, 2021
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang LUO
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
Three-Dimensional Dynamic Adjustment And Locking Mechanism
Publication number
20210003804
Publication date
Jan 7, 2021
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xianchang ZHU
G02 - OPTICS
Information
Patent Application
METHOD FOR FIGURE CORRECTION OF OPTICAL ELEMENT BY REACTIVE ION ETC...
Publication number
20200401051
Publication date
Dec 24, 2020
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Zhiwei LI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUB-WAVELENGTH STRUCTURAL MATERIAL HAVING COMPATIBILITY OF LOW DETE...
Publication number
20200249376
Publication date
Aug 6, 2020
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang LUO
G02 - OPTICS
Information
Patent Application
METHODS AND APPARATUSES FOR COATING PHOTORESIST
Publication number
20200233306
Publication date
Jul 23, 2020
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR DETECTING OPTIMAL FOCAL PLANE OF LITHOGRAP...
Publication number
20200225588
Publication date
Jul 16, 2020
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Jiajun XU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLAW DETECTING APPARATUS, METHOD FOR DETECTING FLAW OF PLANE MIRROR...
Publication number
20200150053
Publication date
May 14, 2020
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Fuchao XU
D06 - TREATMENT OF TEXTILES OR THE LIKE LAUNDERING FLEXIBLE MATERIALS NOT OTH...
Information
Patent Application
SECONDARY IMAGING OPTICAL LITHOGRAPHY METHOD AND APPARATUS
Publication number
20200150538
Publication date
May 14, 2020
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang LUO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR CONTROLLING DWELL TIME DURING PROCESSING TO OPTICAL COMP...
Publication number
20200147753
Publication date
May 14, 2020
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiaochuan HU
B24 - GRINDING POLISHING
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