The present disclosure relates to a precision mechanical device, and more particularly to a single-point driven axial adjustment mechanism for precision axial adjustment of optical elements.
With improvement of performance of an optical imaging system, further requirements for adjustment function of an optical element are needed in that: not only the adjustment accuracy of the optical element is required to reach a micron or even sub-micron level; but also higher requirements for the dynamic response time of the adjustment mechanism is needed. Meanwhile, the spatial size of the adjustment mechanism is required to be more compact.
In optical imaging systems, a common position adjustment of an optical element involves an adjustment of the displacement along an optical axis in Z direction. In order to achieve corresponding adjustment of the optical element, the position adjustment of the optical element is realized by three wedge mechanisms in a common mechanism. In a high-resolution imaging optical system, there is a corresponding technical difficulty in adjusting the axial displacement of the optical element by using the wedge adjusting mechanism in that: on one hand, the uniformly distributed wedge mechanisms require a large installation space, which does not conform to the compact size requirements of the high-resolution imaging system for the adjustment mechanism; on the other hand, the adjustment error of the mechanism cannot meet the high-precision adjustment requirements of the optical element.
In order to solve the above problems and to obtain a precision adjustment of an optical element of a high-resolution imaging system, the present disclosure proposes a single-point driven axial adjustment mechanism capable of achieving high-precision position adjustment of the optical element in a small space.
With a specific technical solution of the present disclosure, an axial adjustment mechanism for precision axial adjustment of an optical element of a high-resolution imaging system is provided. The axial adjustment mechanism generally includes three layers: a support base located in a bottom layer for fixing and linking of the adjustment mechanism; a driving mechanism located in a middle layer, on which three elastic mechanisms are evenly distributed such that a single-point driving force applied to the driving mechanism is delivered to the three elastic mechanisms; and an element support seat located in a top layer and configured for fixedly supporting the optical element to be adjusted. In the axial adjustment mechanism, the axial adjustment of the adjusted optical element can be achieved by a single-point adjustment.
The present disclosure provides an axial adjustment mechanism for precision axial adjustment of an optical element of a high-resolution imaging system, being characterized in that the driving mechanism located in the middle layer is configured to be guided by a linear guide rail to move in a horizontal direction in response to the driving mechanism being adjusted, and three pairs of levers and elastic adjustment mechanisms are evenly distributed on the driving mechanism to convert the horizontal movement of the driving mechanism into an axial movement of the optical element support seat, achieving an axial adjustment of the optical element.
In the axial precision adjusting mechanism of the present disclosure, the axial adjustment is realized by using three pairs of levers and elastic hinge mechanisms, and deformation amounts in the three elastic hinges are ensured to be the same by adjusting the magnification ratio of the levers, thereby realizing the high-precision axial adjustment of the adjusted optical element.
An adjustment mechanism according to the present disclosure will be further described with reference to the accompanying drawings.
The present design adopts a three-layer structure in which the support base in the bottom layer and the driving mechanism in the middle layer are laterally driven and guided by a linear guide rail so that the driving mechanism moves in a horizontal direction. Three pairs of lever-type direction-changing mechanisms and elastic hinge adjustment mechanisms are evenly distributed on the driving mechanism in the middle layer so that the horizontal movement of the driving mechanism can be converted into the axial movement of the adjusted optical element.
The elastic hinge mechanism used in the adjustment mechanism is shown in
The lever-type direction-changing mechanism used in the adjustment mechanism is shown in
The adjusting mechanism of the disclosure realizes the axial adjustment by means of a combination of three pairs of lever-type direction-changing mechanisms and elastic hinge mechanisms, and the deformation amounts of the three elastic hinges are ensured to be the same by adjusting the magnification ratio of the levers, thereby achieving the axial adjustment of the adjusted optical element.
Number | Date | Country | Kind |
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201810262331.0 | Mar 2018 | CN | national |
Filing Document | Filing Date | Country | Kind |
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PCT/CN2018/125384 | 12/29/2018 | WO | 00 |