THERMA-WAVE, INC

Organization

FREMONT, CA, US

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Method for noise improvement in ellipsometers
- Patent number 7,342,661
- Issue date Mar 11, 2008
- Therma-Wave, Inc.
- Martin Ebert
- G01 - MEASURING TESTING
Information Patent Grant
Photothermal system with spectroscopic pump and probe
- Patent number 7,280,215
- Issue date Oct 9, 2007
- Therma-Wave, Inc.
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Grant
Beam splitter/combiner for optical metrology tool
- Patent number 7,251,036
- Issue date Jul 31, 2007
- Therma-Wave, Inc.
- James Hendrix
- G01 - MEASURING TESTING
Information Patent Grant
Critical dimension analysis with simultaneous multiple angle of inc...
- Patent number 7,248,375
- Issue date Jul 24, 2007
- Therma-Wave, Inc.
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
Characterization of ultra shallow junctions in semiconductor wafers
- Patent number 7,248,367
- Issue date Jul 24, 2007
- Therma-Wave, Inc.
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Grant
Modulated scatterometry
- Patent number 7,239,390
- Issue date Jul 3, 2007
- Therma-Wave, Inc.
- Walter Lee Smith
- G01 - MEASURING TESTING
Information Patent Grant
Scatterometry for samples with non-uniform edges
- Patent number 7,233,390
- Issue date Jun 19, 2007
- Therma-Wave, Inc.
- Yia Chung Chang
- G01 - MEASURING TESTING
Information Patent Grant
Measurement system with separate optimized beam paths
- Patent number 7,227,637
- Issue date Jun 5, 2007
- Therma-Wave, Inc.
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Grant
Method for determining modifications to semiconductor optical funct...
- Patent number 7,224,461
- Issue date May 29, 2007
- Therma-Wave, Inc.
- Stephen J. Morris
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for immersion metrology
- Patent number 7,215,431
- Issue date May 8, 2007
- Therma-Wave, Inc.
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
Position modulated optical reflectance measurement system for semic...
- Patent number 7,212,288
- Issue date May 1, 2007
- Therma-Wave, Inc.
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
Infrared blocking filter for broadband Optical metrology
- Patent number 7,206,125
- Issue date Apr 17, 2007
- Therma-Wave, Inc.
- David Y. Wang
- G02 - OPTICS
Information Patent Grant
Detector configurations for optical metrology
- Patent number 7,206,071
- Issue date Apr 17, 2007
- Therma-Wave, Inc.
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
Beam profile ellipsometer with rotating compensator
- Patent number 7,206,070
- Issue date Apr 17, 2007
- Therma-Wave, Inc.
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
Focusing optics for small spot optical metrology
- Patent number 7,190,460
- Issue date Mar 13, 2007
- Therma-Wave, Inc.
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Grant
Normal incidence rotating compensator ellipsometer
- Patent number 7,173,700
- Issue date Feb 6, 2007
- Therma-Wave, Inc.
- David E. Aspnes
- G01 - MEASURING TESTING
Information Patent Grant
Flat spectrum illumination source for optical metrology
- Patent number 7,154,607
- Issue date Dec 26, 2006
- Therma-Wave, Inc.
- James Lee Hendrix
- G01 - MEASURING TESTING
Information Patent Grant
Global shape definition method for scatterometry
- Patent number 7,145,664
- Issue date Dec 5, 2006
- Therma-Wave, Inc.
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
Modulated reflectance measurement system using UV probe
- Patent number 7,126,690
- Issue date Oct 24, 2006
- Therma-Wave, Inc.
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
Modulated reflectance measurement system with multiple wavelengths
- Patent number 7,116,424
- Issue date Oct 3, 2006
- Therma-Wave, Inc.
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Grant
Modulated reflectance measurement system with multiple wavelengths
- Patent number 7,106,446
- Issue date Sep 12, 2006
- Therma-Wave, Inc.
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Grant
CD metrology analysis using a finite difference method
- Patent number 7,106,459
- Issue date Sep 12, 2006
- Therma-Wave, Inc.
- Hanyou Chu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining ion concentration and energy of shallow junc...
- Patent number 7,099,007
- Issue date Aug 29, 2006
- Therma-Wave, Inc.
- Minna Hovinen
- G01 - MEASURING TESTING
Information Patent Grant
Aperture to reduce sensitivity to sample tilt in small spotsize ref...
- Patent number 7,081,957
- Issue date Jul 25, 2006
- Therma-Wave, Inc.
- Adam E. Norton
- G01 - MEASURING TESTING
Information Patent Grant
Modulated reflectance measurement system with fiber laser technology
- Patent number 7,079,249
- Issue date Jul 18, 2006
- Therma-Wave, Inc.
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Grant
Optical inspection equipment for semiconductor wafers with precleaning
- Patent number 7,068,370
- Issue date Jun 27, 2006
- Therma-Wave, Inc.
- Allan Rosencwaig
- G01 - MEASURING TESTING
Information Patent Grant
CD metrology method
- Patent number 7,069,153
- Issue date Jun 27, 2006
- Therma-Wave, Inc.
- Kenneth C. Johnson
- G01 - MEASURING TESTING
Information Patent Grant
Measurement system with separate optimized beam paths
- Patent number 7,061,614
- Issue date Jun 13, 2006
- Therma-Wave, Inc.
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for combined photothermal modulated reflectance a...
- Patent number 7,060,980
- Issue date Jun 13, 2006
- Therma-Wave, Inc.
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Grant
Optical scatterometry of asymmetric lines and structures
- Patent number 7,061,627
- Issue date Jun 13, 2006
- Therma-Wave, Inc.
- Jon Opsal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Beam splitter/combiner for optical metrology tool
- Publication number 20060126071
- Publication date Jun 15, 2006
- Therma-Wave, Inc. (ARO)
- James Hendrix
- G01 - MEASURING TESTING

Trademarklast 30 trademarks

Information Trademark
78475715 - REALTIME CD
- Serial number 78475715
- Registration number 3225609
- Filing date Aug 30, 2004
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
78475670 - RTCD
- Serial number 78475670
- Registration number 3130862
- Filing date Aug 30, 2004
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76548247 - CD PLUS
- Serial number 76548247
- Filing date Oct 1, 2003
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76533563 - AQUA-PROBE
- Serial number 76533563
- Filing date Jul 30, 2003
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76315694 - CD-PROBE
- Serial number 76315694
- Filing date Sep 21, 2001
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76313612 - RT/CD
- Serial number 76313612
- Registration number 2725524
- Filing date Sep 12, 2001
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76274897 - COILS
- Serial number 76274897
- Filing date Jun 21, 2001
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76272994 - WBWS
- Serial number 76272994
- Registration number 2547288
- Filing date Jun 18, 2001
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76219720 - META-PROBE X
- Serial number 76219720
- Registration number 2522390
- Filing date Mar 5, 2001
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76074286 - INTEGRA
- Serial number 76074286
- Registration number 2669787
- Filing date Jun 20, 2000
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76025683 - EFD
- Serial number 76025683
- Registration number 2632559
- Filing date Apr 14, 2000
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76026659 - ENVIRONMENTAL FILM DESORBER
- Serial number 76026659
- Registration number 2605497
- Filing date Apr 14, 2000
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75684267 - DESORBER
- Serial number 75684267
- Registration number 2420246
- Filing date Apr 16, 1999
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75684608 - AFD
- Serial number 75684608
- Filing date Apr 16, 1999
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75683900 - AIRBORNE FILM DESORBER
- Serial number 75683900
- Filing date Apr 16, 1999
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75673980 - ABSOLUTE ELLIPSOMETER
- Serial number 75673980
- Registration number 2364232
- Filing date Apr 5, 1999
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75653217 - FPE
- Serial number 75653217
- Registration number 2403438
- Filing date Mar 4, 1999
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75653220 - FAB PRODUCTIVITY ENHANCEMENT
- Serial number 75653220
- Registration number 2518811
- Filing date Mar 4, 1999
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75601345 - MICROAE
- Serial number 75601345
- Registration number 2825350
- Filing date Dec 8, 1998
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75601342 - µAE
- Serial number 75601342
- Registration number 2808899
- Filing date Dec 8, 1998
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75407447 - AE
- Serial number 75407447
- Registration number 2290866
- Filing date Dec 18, 1997
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75342802 - BEAM PROFILE REFLECTOMETRY
- Serial number 75342802
- Registration number 2521459
- Filing date Aug 18, 1997
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75344869 - BPE
- Serial number 75344869
- Registration number 2268211
- Filing date Aug 18, 1997
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75344870 - BPR
- Serial number 75344870
- Registration number 2271440
- Filing date Aug 18, 1997
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75344868 - BEAM PROFILE ELLIPSOMETRY
- Serial number 75344868
- Registration number 2518933
- Filing date Aug 18, 1997
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75303235 - THERMA-WAVE
- Serial number 75303235
- Registration number 2165847
- Filing date Jun 4, 1997
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75255534 - META-PROBE
- Serial number 75255534
- Registration number 2517657
- Filing date Mar 11, 1997
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
74140000 - PW TEACH
- Serial number 74140000
- Registration number 1664022
- Filing date Feb 19, 1991
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
74140663 - PWAUTO
- Serial number 74140663
- Registration number 1688820
- Filing date Feb 19, 1991
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
74139934 - PAS
- Serial number 74139934
- Registration number 1665747
- Filing date Feb 19, 1991
- Therma-Wave, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments

THERMA-WAVE, INC

Organization

Patents Grantslast 30 patents

Method for noise improvement in ellipsometers

Photothermal system with spectroscopic pump and probe

Beam splitter/combiner for optical metrology tool

Critical dimension analysis with simultaneous multiple angle of inc...

Characterization of ultra shallow junctions in semiconductor wafers

Modulated scatterometry

Scatterometry for samples with non-uniform edges

Measurement system with separate optimized beam paths

Method for determining modifications to semiconductor optical funct...

Systems and methods for immersion metrology

Position modulated optical reflectance measurement system for semic...

Infrared blocking filter for broadband Optical metrology

Detector configurations for optical metrology

Beam profile ellipsometer with rotating compensator

Focusing optics for small spot optical metrology

Normal incidence rotating compensator ellipsometer

Flat spectrum illumination source for optical metrology

Global shape definition method for scatterometry

Modulated reflectance measurement system using UV probe

Modulated reflectance measurement system with multiple wavelengths

Modulated reflectance measurement system with multiple wavelengths

CD metrology analysis using a finite difference method

Method for determining ion concentration and energy of shallow junc...

Aperture to reduce sensitivity to sample tilt in small spotsize ref...

Modulated reflectance measurement system with fiber laser technology

Optical inspection equipment for semiconductor wafers with precleaning

CD metrology method

Measurement system with separate optimized beam paths

Method and system for combined photothermal modulated reflectance a...

Optical scatterometry of asymmetric lines and structures

Patents Applicationslast 30 patents

Beam splitter/combiner for optical metrology tool

Trademarklast 30 trademarks

78475715 - REALTIME CD

78475670 - RTCD

76548247 - CD PLUS

76533563 - AQUA-PROBE

76315694 - CD-PROBE

76313612 - RT/CD

76274897 - COILS

76272994 - WBWS

76219720 - META-PROBE X

76074286 - INTEGRA

76025683 - EFD

76026659 - ENVIRONMENTAL FILM DESORBER

75684267 - DESORBER

75684608 - AFD

75683900 - AIRBORNE FILM DESORBER

75673980 - ABSOLUTE ELLIPSOMETER

75653217 - FPE

75653220 - FAB PRODUCTIVITY ENHANCEMENT

75601345 - MICROAE

75601342 - µAE

75407447 - AE

75342802 - BEAM PROFILE REFLECTOMETRY

75344869 - BPE

75344870 - BPR

75344868 - BEAM PROFILE ELLIPSOMETRY

75303235 - THERMA-WAVE

75255534 - META-PROBE

74140000 - PW TEACH

74140663 - PWAUTO

74139934 - PAS