TOKYO ELECTRON LIMITED

Organization

Tokyo, JP

Organizations

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,971,661
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Yoji Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature measurement system, temperature measurement method, and...
- Patent number 11,972,921
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Takeshi Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and processing method
- Patent number 11,969,827
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Hayato Tanoue
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,972,925
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Bong seong Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,972,958
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Takumi Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and gas supply method
- Patent number 11,971,144
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Seiya Nasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,970,768
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Hideomi Hane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and substrate support of plasma process...
- Patent number 11,972,933
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus
- Patent number 11,970,778
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Reita Igarashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate accommodating device and processing system
- Patent number 11,969,879
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Masahiro Dogome
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Processing apparatus and film forming method
- Patent number 11,972,929
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Makoto Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,970,767
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Taichi Monden
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method and deposition apparatus
- Patent number 11,965,246
- Issue date Apr 23, 2024
- Tokyo Electron Limited
- Naonori Fujiwara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,967,485
- Issue date Apr 23, 2024
- Tokyo Electron Limited
- Eiki Kamata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing overlay results with absolute reference for se...
- Patent number 11,966,171
- Issue date Apr 23, 2024
- Tokyo Electron Limited
- Anton J. deVilliers
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 11,967,509
- Issue date Apr 23, 2024
- Tokyo Electron Limited
- Osamu Miyahara
- B08 - CLEANING
Information Patent Grant
Raw material supply apparatus and raw material supply method
- Patent number 11,965,242
- Issue date Apr 23, 2024
- Tokyo Electron Limited
- Seishi Murakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Crystalline dielectric systems for interconnect circuit manufacturing
- Patent number 11,967,640
- Issue date Apr 23, 2024
- Tokyo Electron Limited
- Robert D Clark
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,967,511
- Issue date Apr 23, 2024
- Tokyo Electron Limited
- Akira Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming method of component and plasma processing apparatus
- Patent number 11,967,487
- Issue date Apr 23, 2024
- Tokyo Electron Limited
- Michishige Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power-tap pass-through to connect a buried power rail to front-side...
- Patent number 11,961,802
- Issue date Apr 16, 2024
- Tokyo Electron Limited
- Lars Liebmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cyclic plasma processing
- Patent number 11,961,735
- Issue date Apr 16, 2024
- Tokyo Electron Limited
- Yun Han
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing substrate and method of transferring subst...
- Patent number 11,961,758
- Issue date Apr 16, 2024
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 11,961,718
- Issue date Apr 16, 2024
- Tokyo Electron Limited
- Shojiro Yahata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Normal-incidence in-situ process monitor sensor
- Patent number 11,961,721
- Issue date Apr 16, 2024
- Tokyo Electron Limited
- Ching Ling Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support and substrate processing apparatus
- Patent number 11,961,755
- Issue date Apr 16, 2024
- Tokyo Electron Limited
- Shinya Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,961,746
- Issue date Apr 16, 2024
- Tokyo Electron Limited
- Sho Kumakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Developing treatment method and developing treatment apparatus
- Patent number 11,960,209
- Issue date Apr 16, 2024
- Tokyo Electron Limited
- Akiko Kai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,955,365
- Issue date Apr 9, 2024
- Tokyo Electron Limited
- Yoshinori Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,955,314
- Issue date Apr 9, 2024
- Tokyo Electron Limited
- Chishio Koshimizu
- H01 - BASIC ELECTRIC ELEMENTS

Please log in for detailed analytics

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR FABRICATING ISOLATION STRUCTURES USING DIRECTIONAL BEAM...
- Publication number 20240145312
- Publication date May 2, 2024
- TOKYO ELECTRON LIMITED
- Soo Doo Chae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FABRICATING THREE-DIMENSIONAL SEMICONDUCTOR STRUCTURES
- Publication number 20240147719
- Publication date May 2, 2024
- TOKYO ELECTRON LIMITED
- Soo Doo Chae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240145267
- Publication date May 2, 2024
- TOKYO ELECTRON LIMITED
- Einosuke TSUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240141501
- Publication date May 2, 2024
- TOKYO ELECTRON LIMITED
- Tetsuro Shirasaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
3D ISOLATION OF A SEGMENTATED 3D NANOSHEET CHANNEL REGION
- Publication number 20240145595
- Publication date May 2, 2024
- TOKYO ELECTRON LIMITED
- H. Jim FULFORD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20240145218
- Publication date May 2, 2024
- TOKYO ELECTRON LIMITED
- Koichi Nagami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MEASURING POSITIONAL DEVIATION OF SUBSTRATE STAGE AND SUB...
- Publication number 20240145278
- Publication date May 2, 2024
- TOKYO ELECTRON LIMITED
- Kiyoshi Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING MEMBER, SUBSTRATE PROCESSING APPARATUS AND SUBST...
- Publication number 20240139780
- Publication date May 2, 2024
- TOKYO ELECTRON LIMITED
- Kento KURUSU
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240141494
- Publication date May 2, 2024
- TOKYO ELECTRON LIMITED
- Kiyoshi MORI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INFORMATION PROCESSING APPARATUS AND INFORMATION PROCESSING METHOD
- Publication number 20240143870
- Publication date May 2, 2024
- TOKYO ELECTRON LIMITED
- Hironori MOKI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THEREOF
- Publication number 20240145576
- Publication date May 2, 2024
- TOKYO ELECTRON LIMITED
- Mark I. Gardner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CUP, LIQUID PROCESSING APPARATUS, AND LIQUID PROCESSING METHOD
- Publication number 20240131554
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Ryunosuke Higashi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
FILM FORMING DEVICE AND FILM FORMING METHOD
- Publication number 20240133031
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Jun YAMAWAKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Polymer Removal via Multiple Flash Steps during Plasma Etch
- Publication number 20240136195
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Alec Dorfner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Time-Resolved OES Data Collection
- Publication number 20240133742
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- G01 - MEASURING TESTING
Information Patent Application
RESONANT ANTENNA FOR PHYSICAL VAPOR DEPOSITION APPLICATIONS
- Publication number 20240136151
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Barton LANE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FREQUENCY-VARIABLE POWER SUPPLY AND PLASMA PROCESSING APPARATUS
- Publication number 20240136154
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240136205
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Kenji FUKUSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for OES Data Collection and Endpoint Detection
- Publication number 20240136164
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING SYSTEM AND EDGE RING REPLACEMENT METHOD
- Publication number 20240136158
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Shin MATSUURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS
- Publication number 20240136198
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Rui KANEMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING LIQUID SUPPLY SYSTEM AND OPERATION METHOD THEREOF
- Publication number 20240136204
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Masatoshi KASAHARA
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND FLUID HEATING DEVICE
- Publication number 20240136206
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Takahiro HAYASHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEST DEVICE AND TEMPERATURE CONTROL METHOD
- Publication number 20240125843
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Hiroyuki NAKAYAMA
- G01 - MEASURING TESTING
Information Patent Application
VAPORIZATION DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND METHOD...
- Publication number 20240124971
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Yuichi FURUYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FABRICATING A FERROELECTRIC DEVICE
- Publication number 20240128308
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Dina Triyoso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SHUTTER
- Publication number 20240128058
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Takashi ARAMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CONTROLLING SUBSTRATE TRANSFER SYSTEM
- Publication number 20240128110
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Kosuke KINOSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240128092
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Yuta NAKANE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE GAS PHASE ETCH OF SILICON GERMANIUM ALLOYS
- Publication number 20240128088
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Toshiki KANAKI
- H01 - BASIC ELECTRIC ELEMENTS

Please log in for detailed analytics

Trademarklast 30 trademarks

Information Trademark
79392983 - EXINSIGHT
- Serial number 79392983
- Filing date Feb 7, 2024
- TOKYO ELECTRON LIMITED
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
79392290 - UCVD
- Serial number 79392290
- Filing date Jan 29, 2024
- TOKYO ELECTRON LIMITED
- 7 - Machines and machine tools
Information Trademark
79386332 - ONE TEL, DIFFERENT TOGETHER
- Serial number 79386332
- Filing date Nov 22, 2023
- TOKYO ELECTRON LIMITED
- 7 - Machines and machine tools
Information Trademark
79386798 - ZEREKA
- Serial number 79386798
- Filing date Nov 9, 2023
- TOKYO ELECTRON LIMITED
- 7 - Machines and machine tools
Information Trademark
98218371 - EP333
- Serial number 98218371
- Filing date Oct 11, 2023
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79376812 - DR.WAFER
- Serial number 79376812
- Filing date Jun 16, 2023
- TOKYO ELECTRON LIMITED
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
79372872 - TEL
- Serial number 79372872
- Filing date Mar 13, 2023
- TOKYO ELECTRON LIMITED
- 7 - Machines and machine tools
Information Trademark
79367157
- Serial number 79367157
- Filing date Jan 10, 2023
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79363243 - ANALYTICORE
- Serial number 79363243
- Registration number 7215594
- Filing date Dec 27, 2022
- Tokyo Electron Limited
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
79359707 - KAGURAS
- Serial number 79359707
- Registration number 7147603
- Filing date Nov 4, 2022
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79354851 - ZEXSTA
- Serial number 79354851
- Registration number 7147589
- Filing date Sep 20, 2022
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79349711 - EXTREMER
- Serial number 79349711
- Registration number 7147576
- Filing date Jul 20, 2022
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79344441 - ESPERT
- Serial number 79344441
- Registration number 6920432
- Filing date May 9, 2022
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79344045 - VARCAS
- Serial number 79344045
- Registration number 6920431
- Filing date Apr 12, 2022
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79342273 - ANALYTICORE
- Serial number 79342273
- Registration number 6970479
- Filing date Mar 16, 2022
- Tokyo Electron Limited
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
79337953 - LETIOS
- Serial number 79337953
- Registration number 6920414
- Filing date Nov 9, 2021
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79325803 - TECHNOLOGY ENABLING LIFE
- Serial number 79325803
- Registration number 6817014
- Filing date Sep 24, 2021
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79315459 - LITHIUS PRO DICE
- Serial number 79315459
- Registration number 6841425
- Filing date May 24, 2021
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79306973 - REACTOR SET TOOL-I
- Serial number 79306973
- Registration number 6655756
- Filing date Jan 13, 2021
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
90459337 - E-COMPASS
- Serial number 90459337
- Registration number 6642952
- Filing date Jan 11, 2021
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79305091 - EXINSIGHT
- Serial number 79305091
- Registration number 6481254
- Filing date Dec 2, 2020
- Tokyo Electron Limited
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
79315018 - ACTIA
- Serial number 79315018
- Registration number 6549817
- Filing date Sep 17, 2020
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79298606 - UDEMAE
- Serial number 79298606
- Registration number 6564708
- Filing date Sep 17, 2020
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79291807 - VIGUS
- Serial number 79291807
- Registration number 6450917
- Filing date Jul 21, 2020
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79281074 - INFIZEX
- Serial number 79281074
- Registration number 6115614
- Filing date Jan 17, 2020
- TOKYO ELECTRON LIMITED
- 7 - Machines and machine tools
Information Trademark
88729194 - HYPERGEM
- Serial number 88729194
- Registration number 6209097
- Filing date Dec 16, 2019
- Tokyo Electron Limited
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
79278350 - OPTCURE
- Serial number 79278350
- Registration number 6093287
- Filing date Dec 9, 2019
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79278353 - ORTAS
- Serial number 79278353
- Registration number 6093288
- Filing date Dec 9, 2019
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79275661 - Q-WRITE
- Serial number 79275661
- Registration number 6187287
- Filing date Nov 8, 2019
- TOKYO ELECTRON LIMITED
- 7 - Machines and machine tools
Information Trademark
79251831 - EPISODE
- Serial number 79251831
- Registration number 5934654
- Filing date Nov 21, 2018
- Tokyo Electron Limited
- 7 - Machines and machine tools

TOKYO ELECTRON LIMITED

Organization

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Temperature measurement system, temperature measurement method, and...

Processing apparatus and processing method

Plasma processing apparatus and plasma processing method

Substrate processing apparatus and substrate processing method

Processing apparatus and gas supply method

Film forming method and film forming apparatus

Plasma processing apparatus and substrate support of plasma process...

Processing apparatus

Substrate accommodating device and processing system

Processing apparatus and film forming method

Film forming method and film forming apparatus

Deposition method and deposition apparatus

Plasma processing apparatus and plasma processing method

Method for producing overlay results with absolute reference for se...

Substrate processing apparatus, substrate processing method, and st...

Raw material supply apparatus and raw material supply method

Crystalline dielectric systems for interconnect circuit manufacturing

Plasma processing apparatus

Forming method of component and plasma processing apparatus

Power-tap pass-through to connect a buried power rail to front-side...

Cyclic plasma processing

Apparatus for processing substrate and method of transferring subst...

Plasma processing method and plasma processing apparatus

Normal-incidence in-situ process monitor sensor

Substrate support and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Developing treatment method and developing treatment apparatus

Substrate processing method and substrate processing apparatus

Plasma processing apparatus

Patents Applicationslast 30 patents

METHODS FOR FABRICATING ISOLATION STRUCTURES USING DIRECTIONAL BEAM...

FABRICATING THREE-DIMENSIONAL SEMICONDUCTOR STRUCTURES

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD

3D ISOLATION OF A SEGMENTATED 3D NANOSHEET CHANNEL REGION

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

METHOD OF MEASURING POSITIONAL DEVIATION OF SUBSTRATE STAGE AND SUB...

SUBSTRATE CLEANING MEMBER, SUBSTRATE PROCESSING APPARATUS AND SUBST...

SUBSTRATE PROCESSING APPARATUS

INFORMATION PROCESSING APPARATUS AND INFORMATION PROCESSING METHOD

SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THEREOF

CUP, LIQUID PROCESSING APPARATUS, AND LIQUID PROCESSING METHOD

FILM FORMING DEVICE AND FILM FORMING METHOD

Polymer Removal via Multiple Flash Steps during Plasma Etch

Time-Resolved OES Data Collection

RESONANT ANTENNA FOR PHYSICAL VAPOR DEPOSITION APPLICATIONS

FREQUENCY-VARIABLE POWER SUPPLY AND PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Method for OES Data Collection and Endpoint Detection

PLASMA PROCESSING SYSTEM AND EDGE RING REPLACEMENT METHOD

SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS

PROCESSING LIQUID SUPPLY SYSTEM AND OPERATION METHOD THEREOF

SUBSTRATE PROCESSING APPARATUS AND FLUID HEATING DEVICE

TEST DEVICE AND TEMPERATURE CONTROL METHOD

VAPORIZATION DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND METHOD...

METHOD FOR FABRICATING A FERROELECTRIC DEVICE

SUBSTRATE PROCESSING APPARATUS AND SHUTTER

METHOD OF CONTROLLING SUBSTRATE TRANSFER SYSTEM

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SELECTIVE GAS PHASE ETCH OF SILICON GERMANIUM ALLOYS

Trademarklast 30 trademarks

79392983 - EXINSIGHT

79392290 - UCVD

79386332 - ONE TEL, DIFFERENT TOGETHER

79386798 - ZEREKA

98218371 - EP333

79376812 - DR.WAFER

79372872 - TEL

79367157

79363243 - ANALYTICORE

79359707 - KAGURAS

79354851 - ZEXSTA

79349711 - EXTREMER

79344441 - ESPERT

79344045 - VARCAS

79342273 - ANALYTICORE