Ultratech, Inc.

Organization

San Jose, CA, US

Ticker Symbols

NASDAQ:UTEK

SPECIAL INDUSTRY MACHINERY, NEC
Business Address
3050 ZANKER RD SAN JOSE CA 95134 4083218835
Mailing Address
3050 ZANKER RD SAN JOSE CA 95134
State Location
CA
State of Incorporation
DE

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Wafer chuck apparatus with micro-channel regions
- Patent number 10,468,290
- Issue date Nov 5, 2019
- Ultratech, Inc.
- Raymond Ellis
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma enhanced ALD system
- Patent number 10,351,950
- Issue date Jul 16, 2019
- Ultratech, Inc.
- Mark Sowa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-efficiency line-forming optical systems and methods using a se...
- Patent number 10,353,208
- Issue date Jul 16, 2019
- Ultratech, Inc.
- Serguei Anikitchev
- G02 - OPTICS
Information Patent Grant
Methods of forming an ALD-inhibiting layer using a self-assembled m...
- Patent number 10,316,406
- Issue date Jun 11, 2019
- Ultratech, Inc.
- Laurent Lecordier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Scanning methods for focus control for lithographic processing of r...
- Patent number 10,269,662
- Issue date Apr 23, 2019
- Ultratech, Inc.
- Paul M. Bischoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for forming device quality gallium nitride lay...
- Patent number 10,249,491
- Issue date Apr 2, 2019
- Ultratech, Inc.
- Ganesh Sundaram
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of heteroepitaxial layers with rapid thermal processing t...
- Patent number 10,090,153
- Issue date Oct 2, 2018
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser annealing systems and methods with ultra-short dwell times
- Patent number 10,083,843
- Issue date Sep 25, 2018
- Ultratech, Inc.
- Andrew M. Hawryluk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon germanium heterojunction bipolar transistor structure and m...
- Patent number 10,032,883
- Issue date Jul 24, 2018
- Ultratech, Inc.
- Oleg Gluschenkov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for reducing pulsed laser beam profile non-unif...
- Patent number 10,016,843
- Issue date Jul 10, 2018
- Ultratech, Inc.
- Yun Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for forming device quality gallium nitride lay...
- Patent number 9,960,036
- Issue date May 1, 2018
- Ultratech, Inc.
- Ganesh Sundaram
- C30 - CRYSTAL GROWTH
Information Patent Grant
Systems and methods of characterizing process-induced wafer shape f...
- Patent number 9,935,022
- Issue date Apr 3, 2018
- Ultratech, Inc.
- David M. Owen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formation of heteroepitaxial layers with rapid thermal processing t...
- Patent number 9,929,011
- Issue date Mar 27, 2018
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Atomic layer deposition head
- Patent number 9,783,888
- Issue date Oct 10, 2017
- Ultratech, Inc.
- Michael J. Sershen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Polarization-based coherent gradient sensing systems and methods
- Patent number 9,784,570
- Issue date Oct 10, 2017
- Ultratech, Inc.
- David G. Stites
- G01 - MEASURING TESTING
Information Patent Grant
ALD systems and methods
- Patent number 9,777,371
- Issue date Oct 3, 2017
- Ultratech, Inc.
- Roger R. Coutu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of heteroepitaxial layers with rapid thermal processing t...
- Patent number 9,768,016
- Issue date Sep 19, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High-efficiency line-forming optical systems and methods for defect...
- Patent number 9,711,361
- Issue date Jul 18, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Formation of heteroepitaxial layers with rapid thermal processing t...
- Patent number 9,691,613
- Issue date Jun 27, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for forming device quality gallium nitride lay...
- Patent number 9,666,432
- Issue date May 30, 2017
- Ultratech, Inc.
- Ganesh Sundaram
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High-efficiency line-forming optical systems and methods
- Patent number 9,638,922
- Issue date May 2, 2017
- Ultratech, Inc.
- Serguei Anikitchev
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Masking methods for ALD processes for electrode-based devices
- Patent number 9,633,850
- Issue date Apr 25, 2017
- Ultratech, Inc.
- Ritwik Bhatia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-efficiency line-forming optical systems and methods for defect...
- Patent number 9,613,815
- Issue date Apr 4, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of laser annealing a semiconductor wafer with localized cont...
- Patent number 9,613,828
- Issue date Apr 4, 2017
- Ultratech, Inc.
- James McWhirter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxygen radical enhanced atomic-layer deposition using ozone plasma
- Patent number 9,583,337
- Issue date Feb 28, 2017
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for high-velocity and atmospheric-pressure atomic layer depo...
- Patent number 9,567,670
- Issue date Feb 14, 2017
- Ultratech, Inc.
- Michael J. Sershen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition systems and methods
- Patent number 9,556,519
- Issue date Jan 31, 2017
- Ultratech Inc.
- Douwe Johannes Monsma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for reducing beam instability in laser annealing
- Patent number 9,559,023
- Issue date Jan 31, 2017
- Ultratech, Inc.
- James T. McWhirter
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser annealing systems and methods with ultra-short dwell times
- Patent number 9,558,973
- Issue date Jan 31, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wynne-Dyson optical system with variable magnification
- Patent number 9,488,811
- Issue date Nov 8, 2016
- Ultratech, Inc.
- David G. Stites
- G02 - OPTICS

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Patents Applicationslast 30 patents

Information Patent Application
High-Efficiency Line-Forming Optical Systems and Methods Using A Se...
- Publication number 20190339536
- Publication date Nov 7, 2019
- Ultratech, Inc.
- Sergeui Anikitchev
- G02 - OPTICS
Information Patent Application
Plasma Enhanced ALD System
- Publication number 20190284689
- Publication date Sep 19, 2019
- Ultratech, Inc.
- Mark Sowa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Laser-Based Systems and Methods for Melt-Processing of Metal Layers...
- Publication number 20190035682
- Publication date Jan 31, 2019
- Ultratech, Inc.
- Serguei Anikitchev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser Annealing Systems and Methods With Ultra-Short Dwell Times
- Publication number 20190006189
- Publication date Jan 3, 2019
- Ultratech, Inc.
- Andrew M. Hawryluk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of Forming Sources and Drains for FinFETs Using Solid Phase...
- Publication number 20180308758
- Publication date Oct 25, 2018
- Ultratech, Inc.
- Michael H. Willemann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of Forming Product Wafers Having Semiconductor Light-Emitti...
- Publication number 20180226535
- Publication date Aug 9, 2018
- Ultratech, Inc.
- Andrew M. Hawryluk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Forming Device Quality Gallium Nitride Lay...
- Publication number 20180226241
- Publication date Aug 9, 2018
- Ultratech, Inc.
- Ganesh Sundaram
- C30 - CRYSTAL GROWTH
Information Patent Application
Chuck Systems and Methods Having Enhanced Electrical Isolation For...
- Publication number 20180216229
- Publication date Aug 2, 2018
- Ultratech, Inc.
- Michael J. Sershen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Laser-Assisted Atomic Layer Deposition of 2D Metal Chalcogenide Films
- Publication number 20180216232
- Publication date Aug 2, 2018
- Ultratech, Inc.
- Ganesh Sundaram
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of Forming MLD Films Using Polyols With Long Carbon Backbones
- Publication number 20180200753
- Publication date Jul 19, 2018
- Ultratech, Inc.
- Mark J. Sowa
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Wafer Chuck Apparatus With Contractible Sealing Devices For Securin...
- Publication number 20180166314
- Publication date Jun 14, 2018
- Ultratech, Inc.
- Raymond Ellis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning Methods For Focus Control For Lithographic Processing Of R...
- Publication number 20180166348
- Publication date Jun 14, 2018
- Ultratech, Inc.
- Paul M. Bischoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer Chuck Apparatus With Micro-Channel Regions
- Publication number 20180122681
- Publication date May 3, 2018
- Ultratech, Inc.
- Raymond Ellis
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Quartz crystal microbalance assembly for ALD systems
- Publication number 20170260629
- Publication date Sep 14, 2017
- Ultratech, Inc.
- Laurent Lecordier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING T...
- Publication number 20170256394
- Publication date Sep 7, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING T...
- Publication number 20170250070
- Publication date Aug 31, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PE-ALD METHODS WITH REDUCED QUARTZ-BASED CONTAMINATION
- Publication number 20170241019
- Publication date Aug 24, 2017
- Ultratech, Inc.
- Mark J. Sowa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING DEVICE QUALITY GALLIUM NITRIDE LAY...
- Publication number 20170213718
- Publication date Jul 27, 2017
- Ultratech, Inc.
- Ganesh Sundaram
- C30 - CRYSTAL GROWTH
Information Patent Application
IMPROVED THROUGH SILICON VIA
- Publication number 20170194204
- Publication date Jul 6, 2017
- Ultratech, Inc.
- Mark Sowa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Full-wafer inspection methods having selectable pixel density
- Publication number 20170178980
- Publication date Jun 22, 2017
- Ultratech, Inc.
- David M. Owen
- G01 - MEASURING TESTING
Information Patent Application
High-efficiency line-forming optical systems and methods for defect...
- Publication number 20170162392
- Publication date Jun 8, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
VAPOR DEPOSITION SYSTEMS AND METHODS
- Publication number 20170159177
- Publication date Jun 8, 2017
- Ultratech, Inc.
- Douwe J. Monsma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and methods of characterizing process-induced wafer shape f...
- Publication number 20170162456
- Publication date Jun 8, 2017
- Ultratech, Inc.
- David M. Owen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR DELIVERY SYSTEM
- Publication number 20170145564
- Publication date May 25, 2017
- Ultratech, Inc.
- Adam Bertuch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of forming an ALD-inhibiting layer using a self-assembled m...
- Publication number 20170114451
- Publication date Apr 27, 2017
- Ultratech, Inc.
- Laurent Lecordier
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
High-throughput multichamber atomic layer deposition systems and me...
- Publication number 20170088952
- Publication date Mar 30, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Laser-assisted atomic layer deposition of 2D metal chalcogenide films
- Publication number 20170073812
- Publication date Mar 16, 2017
- Ultratech, Inc.
- Ganesh Sundaram
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma-enhanced atomic layer deposition system with rotary reactor...
- Publication number 20170062191
- Publication date Mar 2, 2017
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Masking methods for ALD processes for electrode-based devices
- Publication number 20170025272
- Publication date Jan 26, 2017
- Ultratech, Inc.
- Ritwik Bhatia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High-efficiency line-forming optical systems and methods using a se...
- Publication number 20170025287
- Publication date Jan 26, 2017
- Ultratech, Inc.
- Serguei Anikitchev
- G02 - OPTICS

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Trademarklast 30 trademarks

Information Trademark
87560133 - LM7
- Serial number 87560133
- Filing date Aug 8, 2017
- ULTRATECH, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87560154 - LM8
- Serial number 87560154
- Filing date Aug 8, 2017
- ULTRATECH, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
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87124987 - QUAD-FIELD
- Serial number 87124987
- Filing date Aug 2, 2016
- ULTRATECH, INC.
- 7 - Machines and machine tools
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- Serial number 87124975
- Filing date Aug 2, 2016
- ULTRATECH, INC.
- 7 - Machines and machine tools
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87125003 - LIGHT-SPEED
- Serial number 87125003
- Filing date Aug 2, 2016
- ULTRATECH, INC.
- 7 - Machines and machine tools
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87121227 - X-TREMELY FAST
- Serial number 87121227
- Filing date Jul 29, 2016
- ULTRATECH, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
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87121245 - ULTRATECH
- Serial number 87121245
- Registration number 5387594
- Filing date Jul 29, 2016
- ULTRATECH, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
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87119980 - TECHNOLOGY ACCEPTED
- Serial number 87119980
- Filing date Jul 28, 2016
- ULTRATECH, INC.
- 7 - Machines and machine tools
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87113513 - ULTRATECH/CNT
- Serial number 87113513
- Filing date Jul 22, 2016
- ULTRATECH, INC.
- 7 - Machines and machine tools
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87061841 - FIJI MED
- Serial number 87061841
- Filing date Jun 6, 2016
- ULTRATECH, INC.
- 7 - Machines and machine tools
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87061854 - FIJI MED ALD
- Serial number 87061854
- Filing date Jun 6, 2016
- ULTRATECH, INC.
- 7 - Machines and machine tools
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87061825 - SAVANNAH MED ALD
- Serial number 87061825
- Filing date Jun 6, 2016
- ULTRATECH, INC.
- 7 - Machines and machine tools
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87060186 - SAVANNAH MED
- Serial number 87060186
- Filing date Jun 3, 2016
- ULTRATECH, INC.
- 7 - Machines and machine tools
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87052231 - SUPERFAST 3G
- Serial number 87052231
- Filing date May 27, 2016
- ULTRATECH, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
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87052262 - SUPERFAST 4G
- Serial number 87052262
- Filing date May 27, 2016
- ULTRATECH, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
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87051312 - SUPERFAST
- Serial number 87051312
- Filing date May 26, 2016
- ULTRATECH, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
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86868803 - SMARTMEDALD
- Serial number 86868803
- Filing date Jan 7, 2016
- ULTRATECH, INC.
- 7 - Machines and machine tools
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86868787 - MEDALD
- Serial number 86868787
- Filing date Jan 7, 2016
- ULTRATECH, INC.
- 7 - Machines and machine tools
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86868904 - SMART ALD
- Serial number 86868904
- Filing date Jan 7, 2016
- ULTRATECH, INC.
- 7 - Machines and machine tools
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86838716 - CAMBRIDGE NANOTECH
- Serial number 86838716
- Registration number 5126976
- Filing date Dec 3, 2015
- ULTRATECH, INC.
- 7 - Machines and machine tools
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76701581 - SAPPHIRE
- Serial number 76701581
- Filing date Feb 12, 2010
- ULTRATECH, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
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76625182 - LASER SPIKE ANNEAL LOW-K
- Serial number 76625182
- Filing date Dec 20, 2004
- ULTRATECH, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
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76625185 - LSAK
- Serial number 76625185
- Filing date Dec 20, 2004
- ULTRATECH, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
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76625187 - LASER SPIKE ANNEAL CU
- Serial number 76625187
- Filing date Dec 20, 2004
- ULTRATECH, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
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76625189 - LSACU
- Serial number 76625189
- Filing date Dec 20, 2004
- ULTRATECH, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
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76587515 - UNITY PLATFORM
- Serial number 76587515
- Filing date Apr 19, 2004
- ULTRATECH, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
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76585971 - ULTRANNEAL
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- Filing date Apr 9, 2004
- ULTRATECH, INC.
- 7 - Machines and machine tools
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76585970 - ULTRA ANNEAL
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- ULTRATECH, INC.
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76529709 - NANOTECH
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- Registration number 2962810
- Filing date Jul 17, 2003
- ULTRATECH, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
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76513052 - ULTRAMET
- Serial number 76513052
- Registration number 2977383
- Filing date May 9, 2003
- Ultratech Stepper, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments

Ultratech, Inc.

Organization

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Business Address

Mailing Address

State Location

State of Incorporation

Patents Grantslast 30 patents

Wafer chuck apparatus with micro-channel regions

Plasma enhanced ALD system

High-efficiency line-forming optical systems and methods using a se...

Methods of forming an ALD-inhibiting layer using a self-assembled m...

Scanning methods for focus control for lithographic processing of r...

Method and apparatus for forming device quality gallium nitride lay...

Formation of heteroepitaxial layers with rapid thermal processing t...

Laser annealing systems and methods with ultra-short dwell times

Silicon germanium heterojunction bipolar transistor structure and m...

Systems and methods for reducing pulsed laser beam profile non-unif...

Method and apparatus for forming device quality gallium nitride lay...

Systems and methods of characterizing process-induced wafer shape f...

Formation of heteroepitaxial layers with rapid thermal processing t...

Atomic layer deposition head

Polarization-based coherent gradient sensing systems and methods

ALD systems and methods

Formation of heteroepitaxial layers with rapid thermal processing t...

High-efficiency line-forming optical systems and methods for defect...

Formation of heteroepitaxial layers with rapid thermal processing t...

Method and apparatus for forming device quality gallium nitride lay...

High-efficiency line-forming optical systems and methods

Masking methods for ALD processes for electrode-based devices

High-efficiency line-forming optical systems and methods for defect...

Method of laser annealing a semiconductor wafer with localized cont...

Oxygen radical enhanced atomic-layer deposition using ozone plasma

Method for high-velocity and atmospheric-pressure atomic layer depo...

Vapor deposition systems and methods

Systems and methods for reducing beam instability in laser annealing

Laser annealing systems and methods with ultra-short dwell times

Wynne-Dyson optical system with variable magnification

Patents Applicationslast 30 patents

High-Efficiency Line-Forming Optical Systems and Methods Using A Se...

Plasma Enhanced ALD System

Laser-Based Systems and Methods for Melt-Processing of Metal Layers...

Laser Annealing Systems and Methods With Ultra-Short Dwell Times

Methods of Forming Sources and Drains for FinFETs Using Solid Phase...

Methods of Forming Product Wafers Having Semiconductor Light-Emitti...

Method and Apparatus for Forming Device Quality Gallium Nitride Lay...

Chuck Systems and Methods Having Enhanced Electrical Isolation For...

Laser-Assisted Atomic Layer Deposition of 2D Metal Chalcogenide Films

Methods of Forming MLD Films Using Polyols With Long Carbon Backbones

Wafer Chuck Apparatus With Contractible Sealing Devices For Securin...

Scanning Methods For Focus Control For Lithographic Processing Of R...

Wafer Chuck Apparatus With Micro-Channel Regions

Quartz crystal microbalance assembly for ALD systems

FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING T...

FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING T...

PE-ALD METHODS WITH REDUCED QUARTZ-BASED CONTAMINATION

METHOD AND APPARATUS FOR FORMING DEVICE QUALITY GALLIUM NITRIDE LAY...

IMPROVED THROUGH SILICON VIA

Full-wafer inspection methods having selectable pixel density

High-efficiency line-forming optical systems and methods for defect...

VAPOR DEPOSITION SYSTEMS AND METHODS

Systems and methods of characterizing process-induced wafer shape f...

VAPOR DELIVERY SYSTEM

Methods of forming an ALD-inhibiting layer using a self-assembled m...

High-throughput multichamber atomic layer deposition systems and me...

Laser-assisted atomic layer deposition of 2D metal chalcogenide films

Plasma-enhanced atomic layer deposition system with rotary reactor...

Masking methods for ALD processes for electrode-based devices

High-efficiency line-forming optical systems and methods using a se...

Trademarklast 30 trademarks

87560133 - LM7

87560154 - LM8

87124987 - QUAD-FIELD

87124975 - MICROS

87125003 - LIGHT-SPEED

87121227 - X-TREMELY FAST

87121245 - ULTRATECH

87119980 - TECHNOLOGY ACCEPTED

87113513 - ULTRATECH/CNT

87061841 - FIJI MED