UNAXIS USA, INC.

Organization

St. Petersburg, FL, US

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for process control in time division multiplex...
- Patent number 7,381,650
- Issue date Jun 3, 2008
- Unaxis USA Inc.
- David Johnson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for process control in time division multiplex...
- Patent number 7,115,520
- Issue date Oct 3, 2006
- Unaxis USA, Inc.
- David Johnson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Envelope follower end point detection in time division multiplexed...
- Patent number 7,101,805
- Issue date Sep 5, 2006
- Unaxis USA Inc.
- David Johnson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching of chromium layers on photomasks utilizing high density pla...
- Patent number 7,008,877
- Issue date Mar 7, 2006
- Unaxis USA Inc.
- Christopher Constantine
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
End point detection in time division multiplexed etch processes
- Patent number 6,982,175
- Issue date Jan 3, 2006
- Unaxis USA Inc.
- David Johnson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sidewall smoothing in high aspect ratio/deep etching using a discre...
- Patent number 6,924,235
- Issue date Aug 2, 2005
- Unaxis USA Inc.
- David Johnson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Notch-free etching of high aspect SOI structures using alternating...
- Patent number 6,905,626
- Issue date Jun 14, 2005
- Unaxis USA Inc.
- Russell Westerman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for etching vias
- Patent number 6,846,747
- Issue date Jan 25, 2005
- Unaxis USA Inc.
- Russell Westerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Perimeter seal for backside cooling of substrates
- Patent number 6,771,482
- Issue date Aug 3, 2004
- Unaxis USA Inc.
- Mark D. Kenney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Acousto-optic tunable filter with segmented acousto-optic interacti...
- Patent number 6,718,076
- Issue date Apr 6, 2004
- Unaxis USA, Inc.
- Kenneth J. Bures
- G02 - OPTICS
Information Patent Grant
Dual-scan thin film processing system
- Patent number 6,669,824
- Issue date Dec 30, 2003
- Unaxis USA, Inc.
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ thickness and refractive index monitoring and control syste...
- Patent number 6,646,753
- Issue date Nov 11, 2003
- Unaxis, USA, Inc.
- Jian Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Method for thin film lift-off processes using lateral extended etch...
- Patent number 6,605,519
- Issue date Aug 12, 2003
- Unaxis USA, Inc.
- David G. Lishan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic pole fabrication process and device
- Patent number 6,547,975
- Issue date Apr 15, 2003
- Unaxis USA Inc.
- Boris Kobrin
- G11 - INFORMATION STORAGE
Information Patent Grant
Embedded attenuated phase shift mask and method of making embedded...
- Patent number 6,544,696
- Issue date Apr 8, 2003
- Unaxis USA Inc.
- Russell Westerman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Magnetic pole fabrication process and device
- Patent number 6,540,928
- Issue date Apr 1, 2003
- Unaxis USA Inc.
- Boris Kobrin
- G11 - INFORMATION STORAGE
Information Patent Grant
Differentially-pumped material processing system
- Patent number 6,495,010
- Issue date Dec 17, 2002
- Unaxis USA, Inc.
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE COMPENSATION FOR ACOUSTO-OPTC DEVICES
- Publication number 20040105485
- Publication date Jun 3, 2004
- UNAXIS USA, INC.
- Kenneth J Bures
- G01 - MEASURING TESTING
Information Patent Application
Method for etching vias
- Publication number 20030216034
- Publication date Nov 20, 2003
- Unaxis USA, Inc.
- Russell Westerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for thin film lift-off processes using lateral extended etch...
- Publication number 20020164884
- Publication date Nov 7, 2002
- Unaxis USA
- David G. Lishan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Embedded attenuated phase shift mask and method of making embedded...
- Publication number 20020068229
- Publication date Jun 6, 2002
- UNAXIS USA INC.
- Russell Westerman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Trademarklast 30 trademarks

Information Trademark
76516324 - MASK ETCHER IV
- Serial number 76516324
- Registration number 2918476
- Filing date May 22, 2003
- Unaxis, USA, Inc.
- 7 - Machines and machine tools
Information Trademark
76489969 - DSE
- Serial number 76489969
- Filing date Feb 13, 2003
- Unaxis, USA, Inc.
- 7 - Machines and machine tools
Information Trademark
76192623 - VERSALOCK MASK ETCHER
- Serial number 76192623
- Registration number 2604017
- Filing date Jan 10, 2001
- Unaxis USA, Inc.
- 7 - Machines and machine tools
Information Trademark
75511817 - VERSALOCK MASK ETCHER III
- Serial number 75511817
- Registration number 2594590
- Filing date Jul 1, 1998
- PLASMA-THERM, INC.
- 7 - Machines and machine tools
Information Trademark
75499296 - AUTOMATED LOADING SYSTEM (ALS)
- Serial number 75499296
- Registration number 2622559
- Filing date Jun 10, 1998
- PLASMA-THERM, INC.
- 7 - Machines and machine tools
Information Trademark
75499298 - VERSALOCK MASK ETCHER II
- Serial number 75499298
- Registration number 2632071
- Filing date Jun 10, 1998
- PLASMA-THERM, INC.
- 7 - Machines and machine tools

UNAXIS USA, INC.

Organization

Patents Grantslast 30 patents

Method and apparatus for process control in time division multiplex...

Method and apparatus for process control in time division multiplex...

Envelope follower end point detection in time division multiplexed...

Etching of chromium layers on photomasks utilizing high density pla...

End point detection in time division multiplexed etch processes

Sidewall smoothing in high aspect ratio/deep etching using a discre...

Notch-free etching of high aspect SOI structures using alternating...

Method for etching vias

Perimeter seal for backside cooling of substrates

Acousto-optic tunable filter with segmented acousto-optic interacti...

Dual-scan thin film processing system

In-situ thickness and refractive index monitoring and control syste...

Method for thin film lift-off processes using lateral extended etch...

Magnetic pole fabrication process and device

Embedded attenuated phase shift mask and method of making embedded...

Magnetic pole fabrication process and device

Differentially-pumped material processing system

Patents Applicationslast 30 patents

TEMPERATURE COMPENSATION FOR ACOUSTO-OPTC DEVICES

Method for etching vias

Method for thin film lift-off processes using lateral extended etch...

Embedded attenuated phase shift mask and method of making embedded...

Trademarklast 30 trademarks

76516324 - MASK ETCHER IV

76489969 - DSE

76192623 - VERSALOCK MASK ETCHER

75511817 - VERSALOCK MASK ETCHER III

75499296 - AUTOMATED LOADING SYSTEM (ALS)

75499298 - VERSALOCK MASK ETCHER II