Veeco ALD Inc.

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Spatial deposition of material using short-distance reciprocating m...
- Patent number 9,556,514
- Issue date Jan 31, 2017
- Veeco ALD Inc.
- Jeong Ah Yoon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma reactor with conductive member in reaction chamber for shiel...
- Patent number 9,558,963
- Issue date Jan 31, 2017
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning of deposition device by injecting cleaning gas into deposi...
- Patent number 9,546,423
- Issue date Jan 17, 2017
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radical reactor with inverted orientation
- Patent number 9,435,030
- Issue date Sep 6, 2016
- Veeco ALD Inc.
- Daniel Ho Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Molecular layer deposition using reduction process
- Patent number 9,376,455
- Issue date Jun 28, 2016
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma reactor with conductive member in reaction chamber for shiel...
- Patent number 9,177,788
- Issue date Nov 3, 2015
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced deposition of layer on substrate using radicals
- Patent number 9,163,310
- Issue date Oct 20, 2015
- Veeco ALD Inc.
- Sang In Lee
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Scanning injector assembly module for processing substrate
- Patent number 9,145,608
- Issue date Sep 29, 2015
- Veeco ALD Inc.
- Samuel S. Pak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of barrier layer on device using atomic layer deposition
- Patent number 9,129,913
- Issue date Sep 8, 2015
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas injection plate
- Patent number D732092
- Issue date Jun 16, 2015
- Veeco ALD Inc.
- Samuel S. Pak
- D15 - Machines not elsewhere specified
Information Patent Grant
Gas tube assembly
- Patent number D732093
- Issue date Jun 16, 2015
- Veeco ALD Inc.
- Samuel S. Pak
- D15 - Machines not elsewhere specified
Information Patent Grant
Securing of shadow mask and substrate on susceptor of deposition ap...
- Patent number 9,051,637
- Issue date Jun 9, 2015
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming thin film using radicals generated by plasma
- Patent number 8,895,108
- Issue date Nov 25, 2014
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition using radicals of gas mixture
- Patent number 8,877,300
- Issue date Nov 4, 2014
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrode structure, device comprising the same and method for form...
- Patent number 8,871,628
- Issue date Oct 28, 2014
- Veeco ALD Inc.
- Sang In Lee
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Vapor deposition reactor using plasma and method for forming thin f...
- Patent number 8,851,012
- Issue date Oct 7, 2014
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Combined injection module for sequentially injecting source precurs...
- Patent number 8,840,958
- Issue date Sep 23, 2014
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrode for generating plasma and plasma generator
- Patent number 8,770,142
- Issue date Jul 8, 2014
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of layer using depositing apparatus with reciprocating s...
- Patent number 8,771,791
- Issue date Jul 8, 2014
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition reactor and method for forming thin film
- Patent number 8,758,512
- Issue date Jun 24, 2014
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Growing of gallium-nitrade layer on silicon substrate
- Patent number 8,722,526
- Issue date May 13, 2014
- Veeco ALD Inc.
- Sang In Lee
- C30 - CRYSTAL GROWTH
Information Patent Grant
Magnetic field assisted deposition
- Patent number 8,697,198
- Issue date Apr 15, 2014
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition reactor for forming thin film
- Patent number 8,691,669
- Issue date Apr 8, 2014
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depositing material on fibrous textiles using atomic layer depositi...
- Patent number 8,617,652
- Issue date Dec 31, 2013
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Multi-Step Atomic Layer Deposition Process for Silicon Nitride Film...
- Publication number 20170107614
- Publication date Apr 20, 2017
- Veeco ALD Inc.
- Sang In LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Radical Reactor With Inverted Orientation
- Publication number 20160340779
- Publication date Nov 24, 2016
- Veeco ALD Inc.
- Daniel Ho Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic Layer Deposition Method Using Source Precursor Transformed b...
- Publication number 20160032452
- Publication date Feb 4, 2016
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA REACTOR WITH CONDUCTIVE MEMBER IN REACTION CHAMBER FOR SHIEL...
- Publication number 20160020116
- Publication date Jan 21, 2016
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENHANCED DEPOSITION OF LAYER ON SUBSTRATE USING RADICALS
- Publication number 20160002783
- Publication date Jan 7, 2016
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Linear Deposition Apparatus with Modular Assembly
- Publication number 20150360242
- Publication date Dec 17, 2015
- Veeco ALD Inc.
- Samuel S. Pak
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Injection Assembly in Linear Deposition Apparatus with Bulging Ridg...
- Publication number 20150361548
- Publication date Dec 17, 2015
- Veeco ALD Inc.
- Samuel S. Pak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION DEVICE WITH AUXILIARY INJECTORS FOR INJECTING NUCLEOPHIL...
- Publication number 20150299857
- Publication date Oct 22, 2015
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic Layer Deposition Using Injector Module Arrays
- Publication number 20150275365
- Publication date Oct 1, 2015
- Veeco ALD Inc.
- Samuel S. Pak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING OF DEPOSITION DEVICE BY INJECTING CLEANING GAS INTO DEPOSI...
- Publication number 20150259793
- Publication date Sep 17, 2015
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPATIAL DEPOSITION OF MATERIAL USING SHORT-DISTANCE RECIPROCATING M...
- Publication number 20150218698
- Publication date Aug 6, 2015
- Veeco ALD Inc.
- Jeong Ah Yoon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF NON-ISOSTRUCTURAL LAYERS FOR FLEXIBLE SUBSTRATE
- Publication number 20150159271
- Publication date Jun 11, 2015
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOLECULAR LAYER DEPOSITION USING REDUCTION PROCESS
- Publication number 20150148557
- Publication date May 28, 2015
- Veeco ALD Inc.
- Sang In Lee
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
RADICAL REACTOR WITH INVERTED ORIENTATION
- Publication number 20150125627
- Publication date May 7, 2015
- Veeco ALD Inc.
- Daniel Ho Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FAST ATOMIC LAYER DEPOSITION PROCESS USING SEED PRECURSOR
- Publication number 20150104574
- Publication date Apr 16, 2015
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRINTING OF COLORED PATTERN USING ATOMIC LAYER DEPOSITION
- Publication number 20150086716
- Publication date Mar 26, 2015
- Veeco ALD Inc.
- Samuel S. Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic Layer Deposition Using Radicals Of Gas Mixture
- Publication number 20150020737
- Publication date Jan 22, 2015
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM FORMATION FOR DEVICE SENSITIVE TO ENVIRONMENT
- Publication number 20140319488
- Publication date Oct 30, 2014
- Veeco ALD Inc.
- Sang In Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR DEPOSITION REACTOR AND METHOD FOR FORMING THIN FILM
- Publication number 20140219905
- Publication date Aug 7, 2014
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CASCADED PLASMA REACTOR
- Publication number 20140205769
- Publication date Jul 24, 2014
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetic Field Assisted Deposition
- Publication number 20140174358
- Publication date Jun 26, 2014
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Hydrophobic and Oleophobic Encapsulation Material with Alternating...
- Publication number 20140141191
- Publication date May 22, 2014
- Veeco ALD Inc.
- Sang In Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Textile Including Fibers Deposited with Material Using Atomic Layer...
- Publication number 20140073212
- Publication date Mar 13, 2014
- Veeco ALD Inc.
- Sang In Lee
- A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
Information Patent Application
DEPOSITING THIN LAYER OF MATERIAL ON PERMEABLE SUBSTRATE
- Publication number 20140037853
- Publication date Feb 6, 2014
- Veeco ALD Inc.
- Sang In Lee
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Veeco ALD Inc.

Organization

Patents Grantslast 30 patents

Spatial deposition of material using short-distance reciprocating m...

Plasma reactor with conductive member in reaction chamber for shiel...

Cleaning of deposition device by injecting cleaning gas into deposi...

Radical reactor with inverted orientation

Molecular layer deposition using reduction process

Plasma reactor with conductive member in reaction chamber for shiel...

Enhanced deposition of layer on substrate using radicals

Scanning injector assembly module for processing substrate

Formation of barrier layer on device using atomic layer deposition

Gas injection plate

Gas tube assembly

Securing of shadow mask and substrate on susceptor of deposition ap...

Method for forming thin film using radicals generated by plasma

Atomic layer deposition using radicals of gas mixture

Electrode structure, device comprising the same and method for form...

Vapor deposition reactor using plasma and method for forming thin f...

Combined injection module for sequentially injecting source precurs...

Electrode for generating plasma and plasma generator

Deposition of layer using depositing apparatus with reciprocating s...

Vapor deposition reactor and method for forming thin film

Growing of gallium-nitrade layer on silicon substrate

Magnetic field assisted deposition

Vapor deposition reactor for forming thin film

Depositing material on fibrous textiles using atomic layer depositi...

Patents Applicationslast 30 patents

Multi-Step Atomic Layer Deposition Process for Silicon Nitride Film...

Radical Reactor With Inverted Orientation

Atomic Layer Deposition Method Using Source Precursor Transformed b...

PLASMA REACTOR WITH CONDUCTIVE MEMBER IN REACTION CHAMBER FOR SHIEL...

ENHANCED DEPOSITION OF LAYER ON SUBSTRATE USING RADICALS

Linear Deposition Apparatus with Modular Assembly

Injection Assembly in Linear Deposition Apparatus with Bulging Ridg...

DEPOSITION DEVICE WITH AUXILIARY INJECTORS FOR INJECTING NUCLEOPHIL...

Atomic Layer Deposition Using Injector Module Arrays

CLEANING OF DEPOSITION DEVICE BY INJECTING CLEANING GAS INTO DEPOSI...

SPATIAL DEPOSITION OF MATERIAL USING SHORT-DISTANCE RECIPROCATING M...

DEPOSITION OF NON-ISOSTRUCTURAL LAYERS FOR FLEXIBLE SUBSTRATE

MOLECULAR LAYER DEPOSITION USING REDUCTION PROCESS

RADICAL REACTOR WITH INVERTED ORIENTATION

FAST ATOMIC LAYER DEPOSITION PROCESS USING SEED PRECURSOR

PRINTING OF COLORED PATTERN USING ATOMIC LAYER DEPOSITION

Atomic Layer Deposition Using Radicals Of Gas Mixture

THIN FILM FORMATION FOR DEVICE SENSITIVE TO ENVIRONMENT

VAPOR DEPOSITION REACTOR AND METHOD FOR FORMING THIN FILM

CASCADED PLASMA REACTOR

Magnetic Field Assisted Deposition

Hydrophobic and Oleophobic Encapsulation Material with Alternating...

Textile Including Fibers Deposited with Material Using Atomic Layer...

DEPOSITING THIN LAYER OF MATERIAL ON PERMEABLE SUBSTRATE

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