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Patents Grants
last 30 patents
Information
Patent Grant
Highly thick spin-on-carbon hard mask composition and patterning me...
Patent number
12,105,421
Issue date
Oct 1, 2024
YOUNG CHANG CHEMICAL CO., LTD
Su Jin Lee
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Etching pattern forming method in semiconductor manufacturing process
Patent number
12,094,719
Issue date
Sep 17, 2024
YOUNG CHANG CHEMICAL CO., LTD
Su Jin Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Organic-inorganic hybrid photoresist processing liquid composition
Patent number
12,050,403
Issue date
Jul 30, 2024
YOUNG CHANG CHEMICAL CO., LTD
Su Jin Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Cleaning liquid composition for semiconductor wafer and cleaning me...
Patent number
11,970,672
Issue date
Apr 30, 2024
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun Lee
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Chemically amplified positive photoresist composition for improving...
Patent number
11,906,900
Issue date
Feb 20, 2024
YOUNG CHANG CHEMICAL CO., LTD
Su Jin Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Process liquid composition for extreme ultraviolet lithography and...
Patent number
11,624,984
Issue date
Apr 11, 2023
YOUNG CHANG CHEMICAL CO., LTD
Su Jin Lee
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Chemically-amplified-type negative-type photoresist composition
Patent number
11,586,109
Issue date
Feb 21, 2023
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Etching composition for silicon nitride film
Patent number
11,555,150
Issue date
Jan 17, 2023
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun Lee
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Method for forming silicon or silicon compound pattern in semicondu...
Patent number
11,488,834
Issue date
Nov 1, 2022
YOUNG CHANG CHEMICAL CO., LTD
Su Jin Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process liquid for extreme ultraviolet lithography and pattern form...
Patent number
11,487,208
Issue date
Nov 1, 2022
YOUNG CHANG CHEMICAL CO., LTD
Su Jin Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process solution composition for extreme ultraviolet lithography, a...
Patent number
11,473,035
Issue date
Oct 18, 2022
YOUNG CHANG CHEMICAL CO., LTD.
Su Jin Lee
B08 - CLEANING
Information
Patent Grant
Etching method for forming micro silicon pattern in semiconductor m...
Patent number
11,315,788
Issue date
Apr 26, 2022
YOUNG CHANG CHEMICAL CO., LTD
Su Jin Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photoresist pattern shrinking composition and pattern shrinking method
Patent number
11,294,287
Issue date
Apr 5, 2022
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Developer composition, for EUV light source, for forming photosensi...
Patent number
11,199,779
Issue date
Dec 14, 2021
YOUNG CHANG CHEMICAL CO., LTD
Su Jin Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and composition for improving LWR in patterning step using n...
Patent number
11,187,985
Issue date
Nov 30, 2021
YOUNG CHANG CHEMICAL CO., LTD
Su Jin Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV developer composition for forming photosensitive photoresist mi...
Patent number
11,169,442
Issue date
Nov 9, 2021
YOUNG CHANG CHEMICAL CO., LTD
Su Jin Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and composition for improving LWR in patterning step using n...
Patent number
11,169,444
Issue date
Nov 9, 2021
YOUNG CHANG CHEMICAL CO., LTD
Su Jin Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
High etch resistance spin-on carbon hard mask composition and patte...
Patent number
11,036,134
Issue date
Jun 15, 2021
YOUNG CHANG CHEMICAL CO., LTD
Gi Hong Kim
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Cutting oil composition
Patent number
11,001,780
Issue date
May 11, 2021
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun Lee
C10 - PETROLEUM, GAS OR COKE INDUSTRIES TECHNICAL GASES CONTAINING CARBON MON...
Information
Patent Grant
Composition for performing cleaning after chemical/ mechanical poli...
Patent number
10,844,335
Issue date
Nov 24, 2020
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun Lee
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Negative photoresist composition for KRF laser, having high resolut...
Patent number
10,775,699
Issue date
Sep 15, 2020
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Anti-reflection coating composition and anti-reflection film utiliz...
Patent number
10,717,878
Issue date
Jul 21, 2020
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun Lee
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
I-line negative type photoresist composition having excellent etchi...
Patent number
10,539,871
Issue date
Jan 21, 2020
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Slurry composition for CMP and polishing method using same
Patent number
10,526,508
Issue date
Jan 7, 2020
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Negative photoresist composition for KrF laser for forming semicond...
Patent number
10,162,261
Issue date
Dec 25, 2018
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Coating composition for preventing collapse of capacitor
Patent number
9,884,970
Issue date
Feb 6, 2018
YOUNG CHANG CHEMICAL CO., LTD
Su Jin Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cleaning composition for photolithography and method of forming pho...
Patent number
9,829,797
Issue date
Nov 28, 2017
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
I-LINE NEGATIVE PHOTORESIST COMPOSITION FOR REDUCING HEIGHT DIFFERE...
Publication number
20230350293
Publication date
Nov 2, 2023
YOUNG CHANG CHEMICAL CO., LTD
Su Jin LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ETCHANT COMPOSITION FOR ADJUSTING ETCHING SELECTIVITY OF TITANIUM N...
Publication number
20230295500
Publication date
Sep 21, 2023
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun LEE
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
PROCESS SOLUTION COMPOSITION FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAP...
Publication number
20230266672
Publication date
Aug 24, 2023
YOUNG CHANG CHEMICAL CO., LTD
Su Jin LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS LIQUID COMPOSITION FOR PHOTOLITHOGRAPHY AND PATTERN FORMING...
Publication number
20220342313
Publication date
Oct 27, 2022
YOUNG CHANG CHEMICAL CO., LTD
Su Jin LEE
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
PROCESS LIQUID COMPOSITION FOR LITHOGRAPHY AND PATTERN FORMING METH...
Publication number
20220251472
Publication date
Aug 11, 2022
YOUNG CHANG CHEMICAL CO., LTD
Su Jin LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HIGHLY THICK SPIN-ON-CARBON HARD MASK COMPOSITION AND PATTERNING ME...
Publication number
20220179318
Publication date
Jun 9, 2022
YOUNG CHANG CHEMICAL CO., LTD
Su Jin LEE
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
NOVEL ETCHING PATTERN FORMING METHOD IN SEMICONDUCTOR MANUFACTURING...
Publication number
20220172955
Publication date
Jun 2, 2022
YOUNG CHANG CHEMICAL CO., LTD
Su Jin LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLURRY COMPOSITION FOR POLISHING SILICON OXIDE FILM, AND POLISHING...
Publication number
20220145131
Publication date
May 12, 2022
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING LIQUID COMPOSITION FOR SEMICONDUCTOR WAFER AND CLEANING ME...
Publication number
20220135903
Publication date
May 5, 2022
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun LEE
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
ETCHING COMPOSITION FOR SILICON NITRIDE FILM
Publication number
20220127530
Publication date
Apr 28, 2022
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NOVEL METHOD FOR FORMING SILICON OR SILICON COMPOUND PATTERN IN SEM...
Publication number
20220102158
Publication date
Mar 31, 2022
YOUNG CHANG CHEMICAL CO., LTD
Su Jin LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS LIQUID FOR EXTREME ULTRAVIOLET LITHOGRAPHY AND PATTERN FORM...
Publication number
20220011673
Publication date
Jan 13, 2022
YOUNG CHANG CHEMICAL CO., LTD
Su Jin LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ORGANIC-INORGANIC HYBRID PHOTORESIST PROCESSING LIQUID COMPOSITION
Publication number
20210333709
Publication date
Oct 28, 2021
YOUNG CHANG CHEMICAL CO., LTD
Su Jin LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHEMICALLY AMPLIFIED POSITIVE PHOTORESIST COMPOSITION FOR IMPROVING...
Publication number
20210216013
Publication date
Jul 15, 2021
YOUNG CHANG CHEMICAL CO., LTD
Su Jin LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROCESS SOLUTION COMPOSITION FOR EXTREME ULTRAVIOLET LITHOGRAPHY, A...
Publication number
20210214649
Publication date
Jul 15, 2021
YOUNG CHANG CHEMICAL CO., LTD
Su Jin LEE
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
PROCESS LIQUID COMPOSITION FOR EXTREME ULTRAVIOLET LITHOGRAPHY AND...
Publication number
20210088910
Publication date
Mar 25, 2021
YOUNG CHANG CHEMICAL CO., LTD
Su Jin LEE
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
NOVEL ETCHING METHOD FOR FORMING MICRO SILICON PATTERN IN SEMICONDU...
Publication number
20210082701
Publication date
Mar 18, 2021
YOUNG CHANG CHEMICAL CO., LTD
Su Jin LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EUV DEVELOPER COMPOSITION FOR FORMING PHOTOSENSITIVE PHOTORESIST MI...
Publication number
20210063887
Publication date
Mar 4, 2021
YOUNG CHANG CHEMICAL CO., LTD
Su Jin LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVELOPER COMPOSITION, FOR EUV LIGHT SOURCE, FOR FORMING PHOTOSENSI...
Publication number
20200363724
Publication date
Nov 19, 2020
YOUNG CHANG CHEMICAL CO., LTD
Su Jin LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CUTTING OIL COMPOSITION
Publication number
20200190423
Publication date
Jun 18, 2020
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun LEE
C10 - PETROLEUM, GAS OR COKE INDUSTRIES TECHNICAL GASES CONTAINING CARBON MON...
Information
Patent Application
METHOD AND COMPOSITION FOR IMPROVING LWR IN PATTERNING STEP USING N...
Publication number
20200183284
Publication date
Jun 11, 2020
YOUNG CHANG CHEMICAL CO., LTD
Su Jin LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTORESIST PATTERN SHRINKING COMPOSITION AND PATTERN SHRINKING METHOD
Publication number
20200110339
Publication date
Apr 9, 2020
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COMPOSITION FOR PERFORMING CLEANING AFTER CHEMICAL/ MECHANICAL POLI...
Publication number
20190382698
Publication date
Dec 19, 2019
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun LEE
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
HIGH ETCH RESISTANCE SPIN-ON CARBON HARD MASK COMPOSITION AND PATTE...
Publication number
20190258163
Publication date
Aug 22, 2019
YOUNG CHANG CHEMICAL CO., LTD
Gi Hong KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHEMICALLY-AMPLIFIED-TYPE NEGATIVE-TYPE PHOTORESIST COMPOSITION
Publication number
20190137871
Publication date
May 9, 2019
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND COMPOSITION FOR IMPROVING LWR IN PATTERNING STEP USING N...
Publication number
20190137880
Publication date
May 9, 2019
YOUNG CHANG CHEMICAL CO., LTD
Su Jin LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
NEGATIVE PHOTORESIST COMPOSITION FOR KRF LASER, HAVING HIGH RESOLUT...
Publication number
20190101827
Publication date
Apr 4, 2019
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ANTI-REFLECTION COATING COMPOSITION AND ANTI-REFLECTION FILM UTILIZ...
Publication number
20180319994
Publication date
Nov 8, 2018
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun LEE
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Application
I-LINE NEGATIVE TYPE PHOTORESIST COMPOSITION HAVING EXCELLENT ETCHI...
Publication number
20180246404
Publication date
Aug 30, 2018
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SLURRY COMPOSITION FOR CMP AND POLISHING METHOD USING SAME
Publication number
20180230334
Publication date
Aug 16, 2018
YOUNG CHANG CHEMICAL CO., LTD
Seung Hun LEE
H01 - BASIC ELECTRIC ELEMENTS
Trademark
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