A. Stuart Denholm

Person

Lincoln, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System for improving energy purity and implant consistency, and for...
- Patent number 6,237,527
- Issue date May 29, 2001
- Axcelis Technologies, Inc.
- Peter L. Kellerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual-walled exhaust tubing for vacuum pump
- Patent number 6,180,954
- Issue date Jan 30, 2001
- Eaton Corporation
- Kevin R. Verrier
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation control using charge collection, optical emission...
- Patent number 6,101,971
- Issue date Aug 15, 2000
- Axcelis Technologies, Inc.
- A. Stuart Denholm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dosimetry cup charge collection in plasma immersion ion implantation
- Patent number 6,050,218
- Issue date Apr 18, 2000
- Eaton Corporation
- Jiong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma immersion implantation with pulsed anode
- Patent number 5,911,832
- Issue date Jun 15, 1999
- Eaton Corporation
- A. Stuart Denholm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsed plate plasma implantation system and method
- Patent number 5,654,043
- Issue date Aug 5, 1997
- Eaton Corporation
- Jiqun Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam implantation method and apparatus for particulate control
- Patent number 5,134,299
- Issue date Jul 28, 1992
- Eaton Corporation
- A. Stuart Denholm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Accelerator for ion implantation
- Patent number 4,667,111
- Issue date May 19, 1987
- Eaton Corporation
- H. F. Glavish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process and apparatus for converged fine line electron beam treatme...
- Patent number 4,446,373
- Issue date May 1, 1984
- Sony Corporation
- A. Stuart Denholm
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Process and apparatus for converged fine line electron beam treatme...
- Patent number 4,382,186
- Issue date May 3, 1983
- Energy Sciences Inc.
- A. Stuart Denholm
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

A. Stuart Denholm

Person

Patents Grantslast 30 patents

System for improving energy purity and implant consistency, and for...

Dual-walled exhaust tubing for vacuum pump

Ion implantation control using charge collection, optical emission...

Dosimetry cup charge collection in plasma immersion ion implantation

Plasma immersion implantation with pulsed anode

Pulsed plate plasma implantation system and method

Ion beam implantation method and apparatus for particulate control

Accelerator for ion implantation

Process and apparatus for converged fine line electron beam treatme...

Process and apparatus for converged fine line electron beam treatme...