D. M. Jamba, "Dosimetry Measurement In Ion Implanters", Nuclear Instruments and Methods 189 pp. 253-263, North-Holland Publishing Company (1981). |
C.M. McKenna, "High Current Dosimetry Techniques" Radiation Effects, vol. 44, pp. 93-110, (1979). |
D. M. Jamba, Semiconductor Measurement Technology: Some Aspects of Dose Measurement For Accurate Ion Implantation, NBS Special Publication 400-39, pp. 1-36 (Issued Jul. 1977). |
D. M. Jamba, "Secondary Particle Collection In Ion Implantation Dose Measurement" Rev. Sci. Instrum., vol. 49, No. 5, pp. 634-638 (May 1978). |
E.P. EerNisse, G.D. Peterson, and D.G. Schueler "Ion Beam Profile Monitor" Rev. Sci. Instrum., vol. 46, No. 3, pp. 266-268 (Mar. 1975). |