Abhishek Manohar

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for depositing tungsten film with low roughness and low resi...
- Patent number 8,853,080
- Issue date Oct 7, 2014
- Novellus Systems, Inc.
- Yan Guan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for reducing tungsten roughness and improving reflectivity
- Patent number 8,551,885
- Issue date Oct 8, 2013
- Novellus Systems, Inc.
- Feng Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for cleaning deposition reactors
- Patent number 8,262,800
- Issue date Sep 11, 2012
- Novellus Systems, Inc.
- Panya Wongsenakhum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PEDESTAL BOTTOM CLEAN FOR IMPROVED FLUORINE UTILIZATION AND INTEGRA...
- Publication number 20150030766
- Publication date Jan 29, 2015
- Novellus Systems, Inc.
- Gary B. Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CLEANING DEPOSITION CHAMBERS
- Publication number 20140069459
- Publication date Mar 13, 2014
- Yan Guan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING TUNGSTEN FILM WITH LOW ROUGHNESS AND LOW RESI...
- Publication number 20140073135
- Publication date Mar 13, 2014
- Yan Guan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR REDUCING TUNGSTEN ROUGHNESS AND IMPROVING REFLECTIVITY
- Publication number 20100055904
- Publication date Mar 4, 2010
- NOVELLUS SYSTEMS INC.
- Feng CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...