Adolph Miller Allen

Person

Oakland, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Etch uniformity improvement for single turn internal coil PVD chamber
- Patent number 12,136,544
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Anthony Chih-Tung Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Top magnets for decreased non-uniformity in PVD
- Patent number 12,112,890
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Borui Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 12,094,699
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process kit geometry for particle reduction in PVD processes
- Patent number 11,935,732
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Adolph M. Allen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for particle removal from wafers through plasma modification...
- Patent number 11,932,934
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Halbert Chong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reducing substrate surface scratching using machine learning
- Patent number 11,835,927
- Issue date Dec 5, 2023
- Applied Materials, Inc.
- Kartik B Shah
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 11,810,770
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shield for a substrate processing chamber
- Patent number 11,658,016
- Issue date May 23, 2023
- Applied Materials, Inc.
- Kathleen Scheible
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reducing substrate surface scratching using machine learning
- Patent number 11,586,160
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Kartik B Shah
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method for particle removal from wafers through plasma modification...
- Patent number 11,473,189
- Issue date Oct 18, 2022
- Applied Materials, Inc.
- Halbert Chong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition (PVD) chamber with in situ chamber cleani...
- Patent number 11,289,312
- Issue date Mar 29, 2022
- Applied Materials, Inc.
- Adolph M. Allen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for filling a feature disposed in a substrate
- Patent number 11,289,329
- Issue date Mar 29, 2022
- Applied Materials, Inc.
- Rui Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Biased cover ring for a substrate processing system
- Patent number 11,049,701
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- Adolph Miller Allen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 11,037,768
- Issue date Jun 15, 2021
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Blockchain for distributed authentication of hardware operating pro...
- Patent number 10,972,280
- Issue date Apr 6, 2021
- Applied Materials, Inc.
- Adolph Miller Allen
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
High density, low stress amorphous carbon film, and process and equ...
- Patent number 10,858,727
- Issue date Dec 8, 2020
- Applied Materials, Inc.
- Jingjing Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques for forming low stress etch-resistant mask using implant...
- Patent number 10,811,257
- Issue date Oct 20, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Rajesh Prasad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High pressure RF-DC sputtering and methods to improve film uniformi...
- Patent number 10,763,090
- Issue date Sep 1, 2020
- Applied Materials, Inc.
- Adolph Miller Allen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for dynamically treating atomic layer deposit...
- Patent number 10,563,304
- Issue date Feb 18, 2020
- Applied Materials, Inc.
- Xiangjin Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for balancing the electrostatic chucking force on...
- Patent number 10,541,169
- Issue date Jan 21, 2020
- Applied Materials, Inc.
- Chong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Counter based time compensation to reduce process shifting in react...
- Patent number 10,400,327
- Issue date Sep 3, 2019
- Applied Materials, Inc.
- Mohammad Kamruzzaman Chowdhury
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Holding assembly for substrate processing chamber
- Patent number 10,347,475
- Issue date Jul 9, 2019
- Applied Materials, Inc.
- Kathleen Scheible
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for maintaining low non-uniformity over targe...
- Patent number 10,283,334
- Issue date May 7, 2019
- Applied Materials, Inc.
- William Johanson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for pre-cleaning conductive materials on a substrate
- Patent number 10,283,345
- Issue date May 7, 2019
- Applied Materials, Inc.
- Xiangjin Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Auto capacitance tuner current compensation to control one or more...
- Patent number 10,266,940
- Issue date Apr 23, 2019
- Applied Materials, Inc.
- Zhenbin Ge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF power compensation to control film stress, density, resistivity,...
- Patent number 10,242,873
- Issue date Mar 26, 2019
- Applied Materials, Inc.
- Adolph Miller Allen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target profile for a physical vapor deposition chamber target
- Patent number D825504
- Issue date Aug 14, 2018
- Applied Materials, Inc.
- Fuhong Zhang
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Magnetron assembly for physical vapor deposition chamber
- Patent number 9,991,101
- Issue date Jun 5, 2018
- Applied Materials, Inc.
- William Johanson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process kit having tall deposition ring and deposition ring clamp
- Patent number 9,909,206
- Issue date Mar 6, 2018
- Applied Materials, Inc.
- William Johanson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target profile for a physical vapor deposition chamber target
- Patent number D797067
- Issue date Sep 12, 2017
- Applied Materials, Inc.
- Fuhong Zhang
- D13 - Equipment for production, distribution, or transformation of energy

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
- Publication number 20230402271
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- Xiaodong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING CHAMBER CALIBRATION
- Publication number 20230222264
- Publication date Jul 13, 2023
- Applied Materials, Inc.
- Rohit Mahakali
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ETCH UNIFORMITY IMPROVEMENT FOR SINGLE TURN INTERNAL COIL PVD CHAMBER
- Publication number 20230141298
- Publication date May 11, 2023
- Anthony Chih-Tung CHAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REDUCING SUBSTRATE SURFACE SCRATCHING USING MACHINE LEARNING
- Publication number 20230121513
- Publication date Apr 20, 2023
- Applied Materials, Inc.
- Kartik B. Shah
- G05 - CONTROLLING REGULATING
Information Patent Application
TOP MAGNETS FOR DECREASED NON-UNIFORMITY IN PVD
- Publication number 20230088552
- Publication date Mar 23, 2023
- Applied Materials, Inc.
- Borui Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PARTICLE REMOVAL FROM WAFERS THROUGH PLASMA MODIFICATION...
- Publication number 20230002885
- Publication date Jan 5, 2023
- Applied Materials, Inc.
- Halbert Chong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REDUCING SUBSTRATE SURFACE SCRATCHING USING MACHINE LEARNING
- Publication number 20220413452
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Kartik B. Shah
- G05 - CONTROLLING REGULATING
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220328285
- Publication date Oct 13, 2022
- Abdullah ZAFAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
- Publication number 20220020577
- Publication date Jan 20, 2022
- Applied Materials, Inc.
- Xiaodong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CLEANING A SHOWERHEAD
- Publication number 20210335586
- Publication date Oct 28, 2021
- Applied Materials, Inc.
- Tom H. YU
- B08 - CLEANING
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
- Publication number 20210071294
- Publication date Mar 11, 2021
- Applied Materials, Inc.
- Xiaodong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION (PVD) CHAMBER WITH IN SITU CHAMBER CLEANI...
- Publication number 20200395198
- Publication date Dec 17, 2020
- Applied Materials, Inc.
- ADOLPH M. ALLEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH PRESSURE RF-DC SPUTTERING AND METHODS TO IMPROVE FILM UNIFORMI...
- Publication number 20200357616
- Publication date Nov 12, 2020
- Applied Materials, Inc.
- Adolph Miller ALLEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR FILLING A FEATURE DISPOSED IN A SUBSTRATE
- Publication number 20200350159
- Publication date Nov 5, 2020
- Applied Materials, Inc.
- Rui LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method For Particle Removal From Wafers Through Plasma Modification...
- Publication number 20200255938
- Publication date Aug 13, 2020
- Applied Materials, Inc.
- Halbert Chong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BLOCKCHAIN FOR DISTRIBUTED AUTHENTICATION OF HARDWARE OPERATING PRO...
- Publication number 20200112438
- Publication date Apr 9, 2020
- Applied Materials, Inc.
- Adolph Miller Allen
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
HIGH POWER IMPULSE MAGNETRON SPUTTERING PHYSICAL VAPOR DEPOSITION O...
- Publication number 20200048760
- Publication date Feb 13, 2020
- KISHOR KALATHIPARAMBIL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Treatment And Doping Of Barrier Layers
- Publication number 20190385908
- Publication date Dec 19, 2019
- Applied Materials, Inc.
- Xiangjin Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR FORMING LOW STRESS ETCH-RESISTANT MASK USING IMPLANT...
- Publication number 20190304783
- Publication date Oct 3, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Rajesh Prasad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHIELD FOR A SUBSTRATE PROCESSING CHAMBER
- Publication number 20190267220
- Publication date Aug 29, 2019
- APPLIED MATERIALS, INC.
- Kathleen Scheible
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR MAINTAINING LOW NON-UNIFORMITY OVER TARGE...
- Publication number 20190259586
- Publication date Aug 22, 2019
- Applied Materials, Inc.
- WILLIAM JOHANSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS KIT GEOMETRY FOR PARTICLE REDUCTION IN PVD PROCESSES
- Publication number 20190237311
- Publication date Aug 1, 2019
- Applied Materials, Inc.
- ADOLPH M. ALLEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PULSED DC SOURCE FOR HIGH POWER IMPULSE MAGNETRON SPUTTERING PHYSIC...
- Publication number 20190127842
- Publication date May 2, 2019
- Viachslav BABAYAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYNC CONTROLLER FOR HIGH IMPULSE MAGNETRON SPUTTERING
- Publication number 20190088457
- Publication date Mar 21, 2019
- Applied Materials, Inc.
- Viachslav BABAYAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR BALANCING THE ELECTROSTATIC CHUCKING FORCE ON...
- Publication number 20180330977
- Publication date Nov 15, 2018
- Applied Materials, Inc.
- Chong JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BARRIER FILM DEPOSITION AND TREATMENT
- Publication number 20180294162
- Publication date Oct 11, 2018
- XIANGJIN XIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BIASED COVER RING FOR A SUBSTRATE PROCESSING SYSTEM
- Publication number 20180151325
- Publication date May 31, 2018
- ADOLPH MILLER ALLEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POWER DELIVERY FOR HIGH POWER IMPULSE MAGNETRON SPUTTERING (HiPIMS)
- Publication number 20180108519
- Publication date Apr 19, 2018
- Applied Materials, Inc.
- VIACHSLAV BABAYAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH DENSITY, LOW STRESS AMORPHOUS CARBON FILM, AND PROCESS AND EQU...
- Publication number 20180051368
- Publication date Feb 22, 2018
- Applied Materials, Inc.
- Jingjing Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
- Publication number 20170253959
- Publication date Sep 7, 2017
- Applied Materials, Inc.
- Xiaodong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Adolph Miller Allen

Person

Patents Grantslast 30 patents

Etch uniformity improvement for single turn internal coil PVD chamber

Top magnets for decreased non-uniformity in PVD

Methods and apparatus for controlling ion fraction in physical vapo...

Process kit geometry for particle reduction in PVD processes

Method for particle removal from wafers through plasma modification...

Reducing substrate surface scratching using machine learning

Methods and apparatus for controlling ion fraction in physical vapo...

Shield for a substrate processing chamber

Reducing substrate surface scratching using machine learning

Method for particle removal from wafers through plasma modification...

Physical vapor deposition (PVD) chamber with in situ chamber cleani...

Methods and apparatus for filling a feature disposed in a substrate

Biased cover ring for a substrate processing system

Methods and apparatus for controlling ion fraction in physical vapo...

Blockchain for distributed authentication of hardware operating pro...

High density, low stress amorphous carbon film, and process and equ...

Techniques for forming low stress etch-resistant mask using implant...

High pressure RF-DC sputtering and methods to improve film uniformi...

Methods and apparatus for dynamically treating atomic layer deposit...

Method and system for balancing the electrostatic chucking force on...

Counter based time compensation to reduce process shifting in react...

Holding assembly for substrate processing chamber

Methods and apparatus for maintaining low non-uniformity over targe...

Methods for pre-cleaning conductive materials on a substrate

Auto capacitance tuner current compensation to control one or more...

RF power compensation to control film stress, density, resistivity,...

Target profile for a physical vapor deposition chamber target

Magnetron assembly for physical vapor deposition chamber

Process kit having tall deposition ring and deposition ring clamp

Target profile for a physical vapor deposition chamber target

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...

PROCESSING CHAMBER CALIBRATION

ETCH UNIFORMITY IMPROVEMENT FOR SINGLE TURN INTERNAL COIL PVD CHAMBER

REDUCING SUBSTRATE SURFACE SCRATCHING USING MACHINE LEARNING

TOP MAGNETS FOR DECREASED NON-UNIFORMITY IN PVD

METHOD FOR PARTICLE REMOVAL FROM WAFERS THROUGH PLASMA MODIFICATION...

REDUCING SUBSTRATE SURFACE SCRATCHING USING MACHINE LEARNING

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...

METHODS AND APPARATUS FOR CLEANING A SHOWERHEAD

METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...

PHYSICAL VAPOR DEPOSITION (PVD) CHAMBER WITH IN SITU CHAMBER CLEANI...

HIGH PRESSURE RF-DC SPUTTERING AND METHODS TO IMPROVE FILM UNIFORMI...

METHODS AND APPARATUS FOR FILLING A FEATURE DISPOSED IN A SUBSTRATE

Method For Particle Removal From Wafers Through Plasma Modification...

BLOCKCHAIN FOR DISTRIBUTED AUTHENTICATION OF HARDWARE OPERATING PRO...

HIGH POWER IMPULSE MAGNETRON SPUTTERING PHYSICAL VAPOR DEPOSITION O...

Treatment And Doping Of Barrier Layers

TECHNIQUES FOR FORMING LOW STRESS ETCH-RESISTANT MASK USING IMPLANT...

SHIELD FOR A SUBSTRATE PROCESSING CHAMBER

METHODS AND APPARATUS FOR MAINTAINING LOW NON-UNIFORMITY OVER TARGE...

PROCESS KIT GEOMETRY FOR PARTICLE REDUCTION IN PVD PROCESSES

PULSED DC SOURCE FOR HIGH POWER IMPULSE MAGNETRON SPUTTERING PHYSIC...

SYNC CONTROLLER FOR HIGH IMPULSE MAGNETRON SPUTTERING

METHOD AND SYSTEM FOR BALANCING THE ELECTROSTATIC CHUCKING FORCE ON...

BARRIER FILM DEPOSITION AND TREATMENT

BIASED COVER RING FOR A SUBSTRATE PROCESSING SYSTEM

POWER DELIVERY FOR HIGH POWER IMPULSE MAGNETRON SPUTTERING (HiPIMS)

HIGH DENSITY, LOW STRESS AMORPHOUS CARBON FILM, AND PROCESS AND EQU...

METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...