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Newberg, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Dynamic precursor dosing for atomic layer deposition
Patent number
11,970,772
Issue date
Apr 30, 2024
Lam Research Corporation
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Fill on demand ampoule refill
Patent number
11,959,175
Issue date
Apr 16, 2024
Lam Research Corporation
Tuan Nguyen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for modulating film uniformity
Patent number
11,913,113
Issue date
Feb 27, 2024
Lam Research Corporation
Pulkit Agarwal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of atomic layer deposition
Patent number
11,670,503
Issue date
Jun 6, 2023
Lam Research Corporation
Jun Qian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of improving deposition induced CD imbalance using spatially...
Patent number
11,651,963
Issue date
May 16, 2023
Lam Research Corporation
Ishtak Karim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultrathin atomic layer deposition film accuracy thickness control
Patent number
11,646,198
Issue date
May 9, 2023
Lam Research Corporation
Jun Qian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for providing station to station uniformity
Patent number
11,542,599
Issue date
Jan 3, 2023
Lam Research Corporation
Adrien Lavoie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-cycle ALD process for film uniformity and thickness profile m...
Patent number
11,479,856
Issue date
Oct 25, 2022
Lam Research Corporation
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Planar substrate edge contact with open volume equalization pathway...
Patent number
11,443,975
Issue date
Sep 13, 2022
Lam Research Corporation
Patrick Breiling
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing system with tandem source activation for CVD
Patent number
11,434,567
Issue date
Sep 6, 2022
Lam Research Corporation
Adrien LaVoie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Surface modified depth controlled deposition for plasma based depos...
Patent number
11,373,862
Issue date
Jun 28, 2022
Lam Research Corporation
Joseph Abel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Systems and methods for reducing effluent build-up in a pumping exh...
Patent number
11,332,824
Issue date
May 17, 2022
Lam Research Corporation
Antonio Xavier
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Controller for controlling core critical dimension variation using...
Patent number
11,322,416
Issue date
May 3, 2022
Lam Research Corporation
Pulkit Agarwal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dielectric gapfill using atomic layer deposition (ALD), inhibitor p...
Patent number
11,293,098
Issue date
Apr 5, 2022
Lam Research Corporation
Joseph Abel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for flow monitoring in a precursor vapor supply...
Patent number
11,255,017
Issue date
Feb 22, 2022
Lam Research Corporation
Jun Qian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum-integrated hardmask processes and apparatus
Patent number
11,209,729
Issue date
Dec 28, 2021
Lam Research Corporation
Jeffrey Marks
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dynamic precursor dosing for atomic layer deposition
Patent number
11,180,850
Issue date
Nov 23, 2021
Lam Research Corporation
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gapfill of variable aspect ratio features with a composite PEALD an...
Patent number
11,133,180
Issue date
Sep 28, 2021
Lam Research Corporation
Hu Kang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Systems and methods for suppressing parasitic plasma and reducing w...
Patent number
11,127,567
Issue date
Sep 21, 2021
Lam Research Corporation
Hu Kang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ultrathin atomic layer deposition film accuracy thickness control
Patent number
11,101,129
Issue date
Aug 24, 2021
Lam Research Corporation
Jun Qian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Azimuthal critical dimension non-uniformity for double patterning p...
Patent number
11,078,570
Issue date
Aug 3, 2021
Lam Research Corporation
Pulkit Agarwal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Fill on demand ampoule refill
Patent number
11,072,860
Issue date
Jul 27, 2021
Lam Research Corporation
Tuan Nguyen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Symmetric precursor delivery
Patent number
11,021,792
Issue date
Jun 1, 2021
Lam Research Corporation
Eli Jeon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Capped ALD films for doping fin-shaped channel regions of 3-D IC tr...
Patent number
11,011,379
Issue date
May 18, 2021
Lam Research Corporation
Reza Arghavani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of improving deposition induced CD imbalance using spatially...
Patent number
10,978,302
Issue date
Apr 13, 2021
Lam Research Corporation
Ishtak Karim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Compensating chamber and process effects to improve critical dimens...
Patent number
10,847,352
Issue date
Nov 24, 2020
Lam Research Corporation
Pulkit Agarwal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer etch, reactive precursors and energetic sources for pa...
Patent number
10,832,909
Issue date
Nov 10, 2020
Lam Research Corporation
Adrien LaVoie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-aligned multi-patterning process flow with ALD gapfill spacer...
Patent number
10,832,908
Issue date
Nov 10, 2020
Lam Research Corporation
Adrien LaVoie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum-integrated hardmask processes and apparatus
Patent number
10,831,096
Issue date
Nov 10, 2020
Lam Research Corporation
Jeffrey Marks
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for providing station to station uniformity
Patent number
10,801,109
Issue date
Oct 13, 2020
Lam Research Corporation
Adrien Lavoie
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
IN-SITU FILM ANNEALING IN SUBSTRATE PROCESSING
Publication number
20240167153
Publication date
May 23, 2024
LAM RESEARCH CORPORATION
Awnish Gupta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...
Publication number
20240145272
Publication date
May 2, 2024
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTl-STATION TOOL WITH ROTATABLE TOP PLATE ASSEMBLY
Publication number
20230420289
Publication date
Dec 28, 2023
LAM RESEARCH CORPORATION
Karl Frederick Leeser
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING PHOTO-SENSITIVE HYBRID FILMS
Publication number
20230314946
Publication date
Oct 5, 2023
LAM RESEARCH CORPORATION
Eric Calvin Hansen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPURITY REDUCTION IN SILICON-CONTAINING FILMS
Publication number
20230317449
Publication date
Oct 5, 2023
LAM RESEARCH CORPORATION
Awnish Gupta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL
Publication number
20230298884
Publication date
Sep 21, 2023
LAM RESEARCH CORPORATION
Jun Qian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...
Publication number
20230290657
Publication date
Sep 14, 2023
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
Publication number
20230273516
Publication date
Aug 31, 2023
LAM RESEARCH CORPORATION
Jeffrey Marks
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
Publication number
20230266662
Publication date
Aug 24, 2023
LAM RESEARCH CORPORATION
Jeffrey Marks
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CONFORMAL THERMAL CVD WITH CONTROLLED FILM PROPERTIES AND HIGH DEPO...
Publication number
20230245896
Publication date
Aug 3, 2023
LAM RESEARCH CORPORATION
Awnish Gupta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IN-FEATURE WET ETCH RATE RATIO REDUCTION
Publication number
20230220544
Publication date
Jul 13, 2023
LAM RESEARCH CORPORATION
Awnish Gupta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SELECTIVE PRECISION ETCHING OF SEMICONDUCTOR MATERIALS
Publication number
20230207328
Publication date
Jun 29, 2023
LAM RESEARCH CORPORATION
Nathan MUSSELWHITE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEAM MITIGATION AND INTEGRATED LINER FOR GAP FILL
Publication number
20230175117
Publication date
Jun 8, 2023
LAM RESEARCH CORPORATION
Dustin Zachary AUSTIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
AUTOMATED FEEDFORWARD AND FEEDBACK SEQUENCE FOR PATTERNING CD CONTROL
Publication number
20230170195
Publication date
Jun 1, 2023
LAM RESEARCH CORPORATION
Ravi Kumar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STABILIZATION OF CARBON DEPOSITION PRECURSORS LIKE C2H2
Publication number
20230167545
Publication date
Jun 1, 2023
LAM RESEARCH CORPORATION
Kapu Sirish Reddy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PRECURSORS FOR HIGH-TEMPERATURE DEPOSITION OF SILICON-CONTAINING FILMS
Publication number
20230098270
Publication date
Mar 30, 2023
LAM RESEARCH CORPORATION
Douglas Walter Agnew
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NON-PLASMA ENHANCED DEPOSITION FOR RECESS ETCH MATCHING
Publication number
20230087976
Publication date
Mar 23, 2023
LAM RESEARCH CORPORATION
Ian John Curtin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...
Publication number
20230045336
Publication date
Feb 9, 2023
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ASYMMETRIC PURGED BLOCK BENEATH WAFER PLANE TO MANAGE NON-UNIFORMITY
Publication number
20230009859
Publication date
Jan 12, 2023
LAM RESEARCH CORPORATION
Ramesh CHANDRASEKHARAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PRESSURE BATCH COMPENSATION TO STABILIZE CD VARIATION FOR TRIM AND...
Publication number
20230002901
Publication date
Jan 5, 2023
LAM RESEARCH CORPORATION
Awnish GUPTA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS FEED SYSTEM FOR SURFACE MODIFIED DEPTH CONTROLLED DEPOSITION FO...
Publication number
20220301866
Publication date
Sep 22, 2022
LAM RESEARCH CORPORATION
Joseph Abel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
THERMAL ATOMIC LAYER DEPOSITION OF SILICON-CONTAINING FILMS
Publication number
20220275510
Publication date
Sep 1, 2022
LAM RESEARCH CORPORATION
Awnish GUPTA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS AND METHODS FOR REDUCING EFFLUENT BUILD-UP IN A PUMPING EXH...
Publication number
20220259725
Publication date
Aug 18, 2022
LAM RESEARCH CORPORATION
Antonio Xavier
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TEMPERATURE CONTROL OF A MULTI-ZONE PEDESTAL
Publication number
20220243332
Publication date
Aug 4, 2022
LAM RESEARCH CORPORATION
Ramesh CHANDRASEKHARAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
USE OF ROTATION TO CORRECT FOR AZIMUTHAL NON-UNIFORMITIES IN SEMICO...
Publication number
20220243323
Publication date
Aug 4, 2022
LAM RESEARCH CORPORATION
Ramesh CHANDRASEKHARAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SELECTIVE CARBON DEPOSITION
Publication number
20220235464
Publication date
Jul 28, 2022
LAM RESEARCH CORPORATION
Awnish GUPTA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RAPID TUNING OF CRITICAL DIMENSION NON-UNIFORMITY BY MODULATING TEM...
Publication number
20220223440
Publication date
Jul 14, 2022
LAM RESEARCH CORPORATION
Ravi KUMAR
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DIELECTRIC GAPFILL USING ATOMIC LAYER DEPOSITION (ALD), INHIBITOR P...
Publication number
20220205096
Publication date
Jun 30, 2022
LAM RESEARCH CORPORATION
Joseph ABEL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MODULATED ATOMIC LAYER DEPOSITION
Publication number
20220208543
Publication date
Jun 30, 2022
LAM RESEARCH CORPORATION
Chan Myae Myae Soe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TRIM AND DEPOSITION PROFILE CONTROL WITH MULTI-ZONE HEATED SUBSTRAT...
Publication number
20220205105
Publication date
Jun 30, 2022
LAM RESEARCH CORPORATION
Ramesh CHANDRASEKHARAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...