Ady Levy

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Process-induced displacement characterization during semiconductor...
- Patent number 11,682,570
- Issue date Jun 20, 2023
- KLA Corporation
- Pradeep Vukkadala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for tilt calculation based on overlay metrology m...
- Patent number 11,360,398
- Issue date Jun 14, 2022
- KLA Corporation
- Roie Volkovich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process-induced displacement characterization during semiconductor...
- Patent number 11,164,768
- Issue date Nov 2, 2021
- KLA Corporation
- Pradeep Vukkadala
- G05 - CONTROLLING REGULATING
Information Patent Grant
System and method for process-induced distortion prediction during...
- Patent number 10,475,712
- Issue date Nov 12, 2019
- KLA-Tencor Corporation
- Ady Levy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for field-by-field overlay process control using...
- Patent number 10,466,596
- Issue date Nov 5, 2019
- KLA-Tencor Corporation
- Bill Pierson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 10,451,412
- Issue date Oct 22, 2019
- KLA-Tencor Corporation
- Michael Adel
- G01 - MEASURING TESTING
Information Patent Grant
Overlay control with non-zero offset prediction
- Patent number 10,409,171
- Issue date Sep 10, 2019
- KLA-Tencor Corporation
- Michael E. Adel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process-sensitive metrology systems and methods
- Patent number 10,216,096
- Issue date Feb 26, 2019
- KLA-Tencor Corporation
- Myungjun Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Model-based hot spot monitoring
- Patent number 10,030,965
- Issue date Jul 24, 2018
- KLA-Tencor Corporation
- Stilian Ivanov Pandev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for determining in-plane distortions in a substrate
- Patent number 10,024,654
- Issue date Jul 17, 2018
- KLA-Tencor Corporation
- Mark D. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Feed forward of metrology data in a metrology system
- Patent number 9,903,711
- Issue date Feb 27, 2018
- KLA-Tencor Corporation
- Ady Levy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
On-device metrology
- Patent number 9,875,946
- Issue date Jan 23, 2018
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Small-angle scattering X-ray metrology systems and methods
- Patent number 9,846,132
- Issue date Dec 19, 2017
- KLA-Tencor Corporation
- Michael S. Bakeman
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for measuring overlay errors
- Patent number 9,702,693
- Issue date Jul 11, 2017
- KLA-Tencor Corporation
- Mark Ghinovker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for universal target based inspection and metrology
- Patent number 9,576,861
- Issue date Feb 21, 2017
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Acquisition of information for a construction site
- Patent number 9,222,771
- Issue date Dec 29, 2015
- KLA-Tencor Corp.
- Eliezer Rosengaus
- G01 - MEASURING TESTING
Information Patent Grant
Solar metrology methods and apparatus
- Patent number 8,604,447
- Issue date Dec 10, 2013
- KLA-Tencor Corporation
- Scott Young
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Methods and systems for determining a critical dimension and overla...
- Patent number 8,502,979
- Issue date Aug 6, 2013
- KLA-Tencor Technologies Corp.
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Grant
LED solar illuminator
- Patent number 8,436,554
- Issue date May 7, 2013
- KLA-Tencor Corporation
- Guoheng Zhao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Measuring sheet resistance and other properties of a semiconductor
- Patent number 8,415,961
- Issue date Apr 9, 2013
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Overlay marks, methods of overlay mark design and methods of overla...
- Patent number 8,330,281
- Issue date Dec 11, 2012
- KLA-Tencor Technologies Corporation
- Mark Ghinovker
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for determining a critical dimension and overla...
- Patent number 8,179,530
- Issue date May 15, 2012
- KLA-Tencor Technologies Corp.
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Grant
Priori crack detection in solar photovoltaic wafers by detecting be...
- Patent number 8,023,110
- Issue date Sep 20, 2011
- KLA-Tencor Corporation
- Samuel Ngai
- G01 - MEASURING TESTING
Information Patent Grant
Detecting and repairing defects of photovoltaic devices
- Patent number 7,989,729
- Issue date Aug 2, 2011
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Measurement and control of strained devices
- Patent number 7,951,672
- Issue date May 31, 2011
- KLA-Tencor Corporation
- Daniel C. Wack
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,933,016
- Issue date Apr 26, 2011
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Overlay marks and methods of manufacturing such marks
- Patent number 7,879,627
- Issue date Feb 1, 2011
- KLA-Tencor Technologies Corporation
- Mark Ghinovker
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,876,440
- Issue date Jan 25, 2011
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Measurement and control of strained devices
- Patent number 7,838,309
- Issue date Nov 23, 2010
- KLA-Tencor Corporation
- Daniel C. Wack
- G01 - MEASURING TESTING
Information Patent Grant
Parametric profiling using optical spectroscopic systems
- Patent number 7,826,071
- Issue date Nov 2, 2010
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Process-Induced Displacement Characterization During Semiconductor...
- Publication number 20220005714
- Publication date Jan 6, 2022
- KLA Corporation
- Pradeep Vukkadala
- G05 - CONTROLLING REGULATING
Information Patent Application
SYSTEM AND METHOD FOR TILT CALCULATION BASED ON OVERLAY METROLOGY M...
- Publication number 20210149313
- Publication date May 20, 2021
- KLA Corporation
- Roie Volkovich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Process-Induced Displacement Characterization During Semiconductor...
- Publication number 20190333794
- Publication date Oct 31, 2019
- KLA-Tencor Corporation
- Pradeep Vukkadala
- G05 - CONTROLLING REGULATING
Information Patent Application
Overlay Control with Non-Zero Offset Prediction
- Publication number 20180253017
- Publication date Sep 6, 2018
- KLA-Tencor Corporation
- Michael E. Adel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and Method for Process-Induced Distortion Prediction During...
- Publication number 20180096906
- Publication date Apr 5, 2018
- KLA-Tencor Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
Process-Sensitive Metrology Systems and Methods
- Publication number 20170045826
- Publication date Feb 16, 2017
- KLA-Tencor Corporation
- Myungjun Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Model-Based Hot Spot Monitoring
- Publication number 20160327605
- Publication date Nov 10, 2016
- KLA-Tencor Corporation
- Stilian Ivanov Pandev
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR MEASURING OVERLAY ERRORS
- Publication number 20160313116
- Publication date Oct 27, 2016
- KLA-Tencor Corporation
- Mark Ghinovker
- G01 - MEASURING TESTING
Information Patent Application
Feed Forward of Metrology Data in a Metrology System
- Publication number 20160290796
- Publication date Oct 6, 2016
- KLA-Tencor Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
Method and System for Determining In-Plane Distortions in a Substrate
- Publication number 20160290789
- Publication date Oct 6, 2016
- KLA-Tencor Corporation
- Mark D. Smith
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Field-By-Field Overlay Process Control Using...
- Publication number 20150241790
- Publication date Aug 27, 2015
- KLA-Tencor Corporation
- Bill Pierson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SMALL-ANGLE SCATTERING X-RAY METROLOGY SYSTEMS AND METHODS
- Publication number 20150110249
- Publication date Apr 23, 2015
- KLA-Tencor Corporation
- Michael S. Bakeman
- G01 - MEASURING TESTING
Information Patent Application
ON-DEVICE METROLOGY
- Publication number 20140316730
- Publication date Oct 23, 2014
- Andrei V. Shchegrov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Universal Target Based Inspection and Metrology
- Publication number 20140199791
- Publication date Jul 17, 2014
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Methods and Systems for Determining a Critical Dimension and Overla...
- Publication number 20130314710
- Publication date Nov 28, 2013
- KLA-Tencor Technologies Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
Acquisition of Information for a Construction Site
- Publication number 20130096873
- Publication date Apr 18, 2013
- KLA-Tencor Corporation
- Eliezer Rosengaus
- G01 - MEASURING TESTING
Information Patent Application
Solar Metrology Methods And Apparatus
- Publication number 20130048873
- Publication date Feb 28, 2013
- Scott Young
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR DETERMINING A CRITICAL DIMENSION AND OVERLA...
- Publication number 20130039460
- Publication date Feb 14, 2013
- KLA-Tencor Technologies Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
Systems and Methods for Determining One or More Characteristics of...
- Publication number 20120281275
- Publication date Nov 8, 2012
- KLA-Tencor Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
LED Solar Illuminator
- Publication number 20120256559
- Publication date Oct 11, 2012
- KLA-Tencor Corporation
- Guoheng Zhao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Measurement and control of strained devices
- Publication number 20110027919
- Publication date Feb 3, 2011
- KLA-Tencor Corporation
- Daniel C. Wack
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR CONTROLLING VARIATION IN DIMENSIONS OF PATT...
- Publication number 20100279213
- Publication date Nov 4, 2010
- KLA-Tencor Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR DETERMINING A CRITICAL DIMENSION AND OVERLA...
- Publication number 20100271621
- Publication date Oct 28, 2010
- KLA-Tencor Technologies Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR DETERMINING ONE OR MORE CHARACTERISTICS OF...
- Publication number 20100235114
- Publication date Sep 16, 2010
- KLA-Tencor Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY
- Publication number 20100091284
- Publication date Apr 15, 2010
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
DEFECT DETECTION USING TIME DELAY LOCK-IN THERMOGRAPHY (LIT) AND DA...
- Publication number 20100073665
- Publication date Mar 25, 2010
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
Defect Detection and Response
- Publication number 20100074515
- Publication date Mar 25, 2010
- KLA-Tencor Corporation
- Guoheng Zhao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OVERLAY MARKS, METHODS OF OVERLAY MARK DESIGN AND METHODS OF OVERLA...
- Publication number 20090291513
- Publication date Nov 26, 2009
- KLA-Tencor Corporation
- Mark Ghinovker
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY
- Publication number 20090284744
- Publication date Nov 19, 2009
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
Parametric Profiling Using Optical Spectroscopic Systems
- Publication number 20090135416
- Publication date May 28, 2009
- KLA-Tencor Technologies Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Process-induced displacement characterization during semiconductor...

System and method for tilt calculation based on overlay metrology m...

Process-induced displacement characterization during semiconductor...

System and method for process-induced distortion prediction during...

System and method for field-by-field overlay process control using...

Apparatus and methods for detecting overlay errors using scatterometry

Overlay control with non-zero offset prediction

Process-sensitive metrology systems and methods

Model-based hot spot monitoring

Method and system for determining in-plane distortions in a substrate

Feed forward of metrology data in a metrology system

On-device metrology

Small-angle scattering X-ray metrology systems and methods

Apparatus for measuring overlay errors

Method and system for universal target based inspection and metrology

Acquisition of information for a construction site

Solar metrology methods and apparatus

Methods and systems for determining a critical dimension and overla...

LED solar illuminator

Measuring sheet resistance and other properties of a semiconductor

Overlay marks, methods of overlay mark design and methods of overla...

Methods and systems for determining a critical dimension and overla...

Priori crack detection in solar photovoltaic wafers by detecting be...

Detecting and repairing defects of photovoltaic devices

Measurement and control of strained devices

Apparatus and methods for detecting overlay errors using scatterometry

Overlay marks and methods of manufacturing such marks

Apparatus and methods for detecting overlay errors using scatterometry

Measurement and control of strained devices

Parametric profiling using optical spectroscopic systems

Patents Applicationslast 30 patents

Process-Induced Displacement Characterization During Semiconductor...

SYSTEM AND METHOD FOR TILT CALCULATION BASED ON OVERLAY METROLOGY M...

Process-Induced Displacement Characterization During Semiconductor...

Overlay Control with Non-Zero Offset Prediction

System and Method for Process-Induced Distortion Prediction During...

Process-Sensitive Metrology Systems and Methods

Model-Based Hot Spot Monitoring

APPARATUS FOR MEASURING OVERLAY ERRORS

Feed Forward of Metrology Data in a Metrology System

Method and System for Determining In-Plane Distortions in a Substrate

System and Method for Field-By-Field Overlay Process Control Using...

SMALL-ANGLE SCATTERING X-RAY METROLOGY SYSTEMS AND METHODS

ON-DEVICE METROLOGY

Method and System for Universal Target Based Inspection and Metrology

Methods and Systems for Determining a Critical Dimension and Overla...

Acquisition of Information for a Construction Site

Solar Metrology Methods And Apparatus

METHODS AND SYSTEMS FOR DETERMINING A CRITICAL DIMENSION AND OVERLA...

Systems and Methods for Determining One or More Characteristics of...

LED Solar Illuminator

Measurement and control of strained devices

METHODS AND SYSTEMS FOR CONTROLLING VARIATION IN DIMENSIONS OF PATT...

METHODS AND SYSTEMS FOR DETERMINING A CRITICAL DIMENSION AND OVERLA...

SYSTEMS AND METHODS FOR DETERMINING ONE OR MORE CHARACTERISTICS OF...

APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY

DEFECT DETECTION USING TIME DELAY LOCK-IN THERMOGRAPHY (LIT) AND DA...

Defect Detection and Response

OVERLAY MARKS, METHODS OF OVERLAY MARK DESIGN AND METHODS OF OVERLA...

APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY

Parametric Profiling Using Optical Spectroscopic Systems