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Ahila Krishnamoorthy
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Menands, NY, US
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Patents Grants
last 30 patents
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Patent Grant
Metallization structures for microelectronic applications and proce...
Patent number
6,486,533
Issue date
Nov 26, 2002
Semitool, Inc.
Ahila Krishnamoorthy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metallization structures for microelectronic applications and proce...
Patent number
6,368,966
Issue date
Apr 9, 2002
Semitool, Inc.
Ahila Krishnamoorthy
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Copper alloy electroplating bath for microelectronic applications
Patent number
6,319,387
Issue date
Nov 20, 2001
Semitool, Inc.
Ahila Krishnamoorthy
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Patents Applications
last 30 patents
Information
Patent Application
Diffusion barriers comprising a self-assembled monolayer
Publication number
20020079487
Publication date
Jun 27, 2002
G. Ramanath
B82 - NANO-TECHNOLOGY
Information
Patent Application
Metallization structures for microelectronic applications and proce...
Publication number
20020050628
Publication date
May 2, 2002
Semitool, Inc.
Ahila Krishnamoorthy
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR