Akihiko MORITA

Person

Kyoto-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure device, substrate processing apparatus, method for exposin...
- Patent number 9,152,054
- Issue date Oct 6, 2015
- SCREEN Semiconductor Solutions Co., Ltd.
- Kazuhiro Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate heat treatment apparatus
- Patent number 8,608,885
- Issue date Dec 17, 2013
- Dainippon Screen Mfg. Co., Ltd.
- Shigehiro Goto
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate heat treatment apparatus
- Patent number 8,003,919
- Issue date Aug 23, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Shigehiro Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate heat treatment apparatus
- Patent number 7,432,476
- Issue date Oct 7, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Akihiko Morita
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Chemical pump and method of discharging chemical solution
- Patent number 7,048,801
- Issue date May 23, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Akihiko Morita
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Developing apparatus and developing method
- Patent number 6,869,234
- Issue date Mar 22, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Masakazu Sanada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate cleaning apparatus and method
- Patent number 6,286,525
- Issue date Sep 11, 2001
- Dainippon Screen Mfg. Co.
- Joichi Nishimura
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus and method
- Patent number 6,260,562
- Issue date Jul 17, 2001
- Dainippon Screen Mfg. Co., Ltd.
- Kenya Morinishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 6,159,291
- Issue date Dec 12, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Akihiko Morita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate heat-treating apparatus
- Patent number 6,062,852
- Issue date May 16, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Takanori Kawamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus having regulated power consumption a...
- Patent number 6,060,697
- Issue date May 9, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Akihiko Morita
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus, substrate transport apparatus and s...
- Patent number 6,051,101
- Issue date Apr 18, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Masami Ohtani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and vessel for storing a substrate cleaning brush
- Patent number 5,881,876
- Issue date Mar 16, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Nonomura
- G11 - INFORMATION STORAGE
Information Patent Grant
Substrate spin treating method and apparatus
- Patent number 5,853,483
- Issue date Dec 29, 1998
- Dainippon Screen Mfg. Co., Ltd.
- Akihiko Morita
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, METHOD FOR EXPOSIN...
- Publication number 20130258299
- Publication date Oct 3, 2013
- Kazuhiro NISHIMURA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HEAT TREATMENT APPARATUS
- Publication number 20070128570
- Publication date Jun 7, 2007
- Shigehiro Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HEAT TREATMENT APPARATUS
- Publication number 20070128888
- Publication date Jun 7, 2007
- Shigehiro Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate heat treatment apparatus
- Publication number 20060289432
- Publication date Dec 28, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Akihiko Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical pump and method of discharging chemical solution
- Publication number 20040170772
- Publication date Sep 2, 2004
- Akihiko Morita
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
Developing apparatus and developing method
- Publication number 20040028403
- Publication date Feb 12, 2004
- DAINIPPON SCREEN MFG. CO. LTD.
- Masakazu Sanada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Diaphragm valve, substrate processing unit and substrate processing...
- Publication number 20030111178
- Publication date Jun 19, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Akihiko Morita
- G05 - CONTROLLING REGULATING

Akihiko MORITA

Person

Patents Grantslast 30 patents

Exposure device, substrate processing apparatus, method for exposin...

Substrate heat treatment apparatus

Substrate heat treatment apparatus

Substrate heat treatment apparatus

Chemical pump and method of discharging chemical solution

Developing apparatus and developing method

Substrate cleaning apparatus and method

Substrate cleaning apparatus and method

Substrate treating apparatus

Substrate heat-treating apparatus

Substrate processing apparatus having regulated power consumption a...

Substrate processing apparatus, substrate transport apparatus and s...

Method and vessel for storing a substrate cleaning brush

Substrate spin treating method and apparatus

Patents Applicationslast 30 patents

EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, METHOD FOR EXPOSIN...

SUBSTRATE HEAT TREATMENT APPARATUS

SUBSTRATE HEAT TREATMENT APPARATUS

Substrate heat treatment apparatus

Chemical pump and method of discharging chemical solution

Developing apparatus and developing method

Diaphragm valve, substrate processing unit and substrate processing...