Akinobu KAKIMOTO

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Cleaning method and film forming apparatus
- Patent number 11,786,946
- Issue date Oct 17, 2023
- Tokyo Electron Limited
- Sung Duk Son
- B08 - CLEANING
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 10,460,950
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Akinobu Kakimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of forming silicon nitride film
- Patent number 9,920,422
- Issue date Mar 20, 2018
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective epitaxial growth method and film forming apparatus
- Patent number 9,797,067
- Issue date Oct 24, 2017
- Tokyo Electron Limited
- Daisuke Suzuki
- C30 - CRYSTAL GROWTH
Information Patent Grant
Thin film forming method
- Patent number 9,777,366
- Issue date Oct 3, 2017
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon film forming method, thin film forming method and cross-sec...
- Patent number 9,758,865
- Issue date Sep 12, 2017
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depression filling method and processing apparatus
- Patent number 9,646,879
- Issue date May 9, 2017
- Tokyo Electron Limited
- Akinobu Kakimoto
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method and apparatus of forming carbon-containing silicon film
- Patent number 9,490,122
- Issue date Nov 8, 2016
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depression filling method and processing apparatus
- Patent number 9,425,073
- Issue date Aug 23, 2016
- Tokyo Electron Limited
- Satoshi Onodera
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for forming silicon-containing thin film
- Patent number 9,353,442
- Issue date May 31, 2016
- Tokyo Electron Limited
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming silicon film
- Patent number 9,318,328
- Issue date Apr 19, 2016
- Tokyo Electron Limited
- Katsuhiko Komori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus of forming silicon nitride film
- Patent number 9,263,250
- Issue date Feb 16, 2016
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film formation method
- Patent number 9,190,271
- Issue date Nov 17, 2015
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film forming method and film forming apparatus
- Patent number 9,145,604
- Issue date Sep 29, 2015
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Amorphous silicon film formation method and amorphous silicon film...
- Patent number 9,123,782
- Issue date Sep 1, 2015
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method and film deposition apparatus
- Patent number 9,005,459
- Issue date Apr 14, 2015
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Amorphous silicon film formation method and amorphous silicon film...
- Patent number 9,006,021
- Issue date Apr 14, 2015
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus
- Patent number 8,945,339
- Issue date Feb 3, 2015
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming seed layer and method of forming silicon-containi...
- Patent number 8,946,065
- Issue date Feb 3, 2015
- Tokyo Electron Limited
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming amorphous silicon film
- Patent number 8,895,414
- Issue date Nov 25, 2014
- Tokyo Electron Limited
- Akinobu Kakimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a germanium thin film
- Patent number 8,815,714
- Issue date Aug 26, 2014
- Tokyo Electron Limited
- Akinobu Kakimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for forming amorphous silicon film
- Patent number 8,802,547
- Issue date Aug 12, 2014
- Tokyo Electron Limited
- Akinobu Kakimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film formation method and film formation apparatus
- Patent number 8,728,957
- Issue date May 20, 2014
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for Sr—Ti—O-based film formation
- Patent number 8,679,913
- Issue date Mar 25, 2014
- Tokyo Electron Limited
- Yumiko Kawano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for cleaning a substrate and storage medium
- Patent number 8,673,086
- Issue date Mar 18, 2014
- Tokyo Electron Limited
- Akitake Tamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for forming silicon film
- Patent number 8,586,448
- Issue date Nov 19, 2013
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming oxide film on carbon film
- Patent number 8,518,834
- Issue date Aug 27, 2013
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming SrTiO3 film and storage medium
- Patent number 8,361,550
- Issue date Jan 29, 2013
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming SrTiO3 film
- Patent number 7,816,282
- Issue date Oct 19, 2010
- Tokyo Electron Limited
- Yumiko Kawano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing device using shower head structure and processing method
- Patent number 7,615,251
- Issue date Nov 10, 2009
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMATION METHOD
- Publication number 20230361163
- Publication date Nov 9, 2023
- Tokyo Electron Limited
- Koji AKIYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20220415661
- Publication date Dec 29, 2022
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS
- Publication number 20220415660
- Publication date Dec 29, 2022
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20200035496
- Publication date Jan 30, 2020
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS
- Publication number 20200035497
- Publication date Jan 30, 2020
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning Method and Film Forming Apparatus
- Publication number 20190283093
- Publication date Sep 19, 2019
- TOKYO ELECTRON LIMITED
- Sung Duk SON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING CARBON FILM, APPARATUS OF FORMING CARBON FILM AND...
- Publication number 20170342548
- Publication date Nov 30, 2017
- TOKYO ELECTRON LIMITED
- Akira SHIMIZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20170125255
- Publication date May 4, 2017
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR FORMING CARBON FILM
- Publication number 20160251755
- Publication date Sep 1, 2016
- TOKYO ELECTRON LIMITED
- Masayuki KITAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS OF FORMING SILICON NITRIDE FILM
- Publication number 20160108519
- Publication date Apr 21, 2016
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vacuum Processing Apparatus
- Publication number 20150275360
- Publication date Oct 1, 2015
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM FORMING METHOD
- Publication number 20150270126
- Publication date Sep 24, 2015
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus of Forming Carbon-Containing Silicon Film
- Publication number 20150243496
- Publication date Aug 27, 2015
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMORPHOUS SILICON FILM FORMATION METHOD AND AMORPHOUS SILICON FILM...
- Publication number 20150206795
- Publication date Jul 23, 2015
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Depression Filling Method and Processing Apparatus
- Publication number 20150187643
- Publication date Jul 2, 2015
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARATUS FOR FORMING SILICON-CONTAINING THIN FILM
- Publication number 20150101532
- Publication date Apr 16, 2015
- TOKYO ELECTRON LIMITED
- Mitsuhiro OKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus of Forming Silicon Nitride Film
- Publication number 20150099374
- Publication date Apr 9, 2015
- TOKYO ELECTRON LIMITED
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPRESSION FILLING METHOD AND PROCESSING APPARATUS
- Publication number 20150056791
- Publication date Feb 26, 2015
- TOKYO ELECTRON LIMITED
- Satoshi ONODERA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Silicon Film Forming Method, Thin Film Forming Method and Cross-Sec...
- Publication number 20150037970
- Publication date Feb 5, 2015
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR FORMING AMORPHOUS SILICON FILM
- Publication number 20140342534
- Publication date Nov 20, 2014
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A GERMANIUM THIN FILM
- Publication number 20140331928
- Publication date Nov 13, 2014
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE EPITAXIAL GROWTH METHOD AND FILM FORMING APPARATUS
- Publication number 20140251203
- Publication date Sep 11, 2014
- TOKYO ELECTRON LIMITED
- Daisuke SUZUKI
- C30 - CRYSTAL GROWTH
Information Patent Application
THIN FILM FORMATION METHOD
- Publication number 20140206180
- Publication date Jul 24, 2014
- TOKYO ELECTRON LIMITED
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING SILICON FILM
- Publication number 20130323915
- Publication date Dec 5, 2013
- TOKYO ELECTRON LIMITED
- Katsuhiko KOMORI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A GERMANIUM THIN FILM
- Publication number 20130230975
- Publication date Sep 5, 2013
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING SEED LAYER AND METHOD OF FORMING SILICON-CONTAINI...
- Publication number 20130109155
- Publication date May 2, 2013
- TOKYO ELECTRON LIMITED
- Mitsuhiro OKADA
- C30 - CRYSTAL GROWTH
Information Patent Application
THIN FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20130084693
- Publication date Apr 4, 2013
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD AND APPARATUS FOR FORMING AMORPHOUS SILICON FILM
- Publication number 20130023110
- Publication date Jan 24, 2013
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR FORMING SILICON FILM
- Publication number 20130005142
- Publication date Jan 3, 2013
- TOKYO ELECTRON LIMITED
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS
- Publication number 20120267340
- Publication date Oct 25, 2012
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Akinobu KAKIMOTO

Person

Patents Grantslast 30 patents

Cleaning method and film forming apparatus

Substrate processing system and substrate processing method

Method and apparatus of forming silicon nitride film

Selective epitaxial growth method and film forming apparatus

Thin film forming method

Silicon film forming method, thin film forming method and cross-sec...

Depression filling method and processing apparatus

Method and apparatus of forming carbon-containing silicon film

Depression filling method and processing apparatus

Apparatus for forming silicon-containing thin film

Method and apparatus for forming silicon film

Method and apparatus of forming silicon nitride film

Thin film formation method

Thin film forming method and film forming apparatus

Amorphous silicon film formation method and amorphous silicon film...

Film deposition method and film deposition apparatus

Amorphous silicon film formation method and amorphous silicon film...

Film formation apparatus

Method of forming seed layer and method of forming silicon-containi...

Method and apparatus for forming amorphous silicon film

Method of forming a germanium thin film

Method and apparatus for forming amorphous silicon film

Thin film formation method and film formation apparatus

Method for Sr—Ti—O-based film formation

Method and device for cleaning a substrate and storage medium

Method and apparatus for forming silicon film

Method and apparatus for forming oxide film on carbon film

Method for forming SrTiO3 film and storage medium

Method for forming SrTiO3 film

Processing device using shower head structure and processing method

Patents Applicationslast 30 patents

FILM FORMATION METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PROCESSING APPARATUS

Cleaning Method and Film Forming Apparatus

METHOD OF FORMING CARBON FILM, APPARATUS OF FORMING CARBON FILM AND...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

METHOD AND APPARATUS FOR FORMING CARBON FILM

METHOD AND APPARATUS OF FORMING SILICON NITRIDE FILM

Vacuum Processing Apparatus

THIN FILM FORMING METHOD

Method and Apparatus of Forming Carbon-Containing Silicon Film

AMORPHOUS SILICON FILM FORMATION METHOD AND AMORPHOUS SILICON FILM...

Depression Filling Method and Processing Apparatus

APPARATUS FOR FORMING SILICON-CONTAINING THIN FILM

Method and Apparatus of Forming Silicon Nitride Film

DEPRESSION FILLING METHOD AND PROCESSING APPARATUS

Silicon Film Forming Method, Thin Film Forming Method and Cross-Sec...

METHOD AND APPARATUS FOR FORMING AMORPHOUS SILICON FILM

METHOD OF FORMING A GERMANIUM THIN FILM

SELECTIVE EPITAXIAL GROWTH METHOD AND FILM FORMING APPARATUS

THIN FILM FORMATION METHOD

METHOD AND APPARATUS FOR FORMING SILICON FILM

METHOD OF FORMING A GERMANIUM THIN FILM

METHOD OF FORMING SEED LAYER AND METHOD OF FORMING SILICON-CONTAINI...

THIN FILM FORMING METHOD AND FILM FORMING APPARATUS

METHOD AND APPARATUS FOR FORMING AMORPHOUS SILICON FILM

METHOD AND APPARATUS FOR FORMING SILICON FILM

FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS