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Akinori Ebe

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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    SPUTTERING APPARATUS
    • Publication number 20240194462
    • Publication date Jun 13, 2024
    • EMD CORPORATION
    • Akinori EBE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA GENERATOR
    • Publication number 20230143330
    • Publication date May 11, 2023
    • EMD CORPORATION
    • Akinori EBE
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    RADIO-FREQUENCY ANTENNA AND PLASMA PROCESSING DEVICE
    • Publication number 20210327683
    • Publication date Oct 21, 2021
    • EMD CORPORATION
    • Akinori EBE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA SOURCE
    • Publication number 20210127476
    • Publication date Apr 29, 2021
    • EMD CORPORATION
    • Akinori EBE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA SOURCE AND PLASMA PROCESSING APPARATUS
    • Publication number 20190333735
    • Publication date Oct 31, 2019
    • EMD CORPORATION
    • Akinori EBE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    THIN-FILM FORMATION SPUTTERING DEVICE
    • Publication number 20140216928
    • Publication date Aug 7, 2014
    • EMD CORPORATION
    • Yuichi Setsuhara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ANTENNA FOR PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING DEVICE...
    • Publication number 20140210337
    • Publication date Jul 31, 2014
    • EMD CORPORATION
    • Yuichi Setsuhara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING DEVICE
    • Publication number 20140150975
    • Publication date Jun 5, 2014
    • EMD CORPORATION
    • Akinori Ebe
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING DEVICE
    • Publication number 20130220548
    • Publication date Aug 29, 2013
    • EMD CORPORATION
    • Yuichi Setsuhara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING DEVICE
    • Publication number 20130192759
    • Publication date Aug 1, 2013
    • EMD CORPORATION
    • Yuichi Setsuhara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING SYSTEM
    • Publication number 20130043128
    • Publication date Feb 21, 2013
    • EMD CORPORATION
    • Akinori Ebe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING DEVICE
    • Publication number 20120031563
    • Publication date Feb 9, 2012
    • TOKYO ELECTRON LIMITED
    • Yuichi Setsuhara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20120031562
    • Publication date Feb 9, 2012
    • EMD CORPORATION
    • Yuichi Setsuhara
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    THIN-FILM FORMING SPUTTERING SYSTEM
    • Publication number 20110203922
    • Publication date Aug 25, 2011
    • EMD CORPORATION
    • Yuichi Setsuhara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA GENERATION DEVICE AND PLASMA PROCESSING DEVICE
    • Publication number 20110115380
    • Publication date May 19, 2011
    • EMD CORPORATION
    • Akinori Ebe
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    RADIO-FREQUENCY ANTENNA UNIT AND PLASMA PROCESSING APPARATUS
    • Publication number 20110080094
    • Publication date Apr 7, 2011
    • EMD CORPORATION
    • Yuichi Setsuhara
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    PLASMA GENERATOR, PLASMA CONTROL METHOD AND METHOD OF PRODUCING SUB...
    • Publication number 20100304046
    • Publication date Dec 2, 2010
    • Japan Science and Technology Agency
    • Shoji Miyake
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20100263797
    • Publication date Oct 21, 2010
    • EMD CORPORATION
    • Yuichi Setsuhara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA GENERATING METHOD, PLASMA GENERATING APPARATUS, AND PLASMA P...
    • Publication number 20100189921
    • Publication date Jul 29, 2010
    • Nissin Electric Co., Ltd. and EMD Corporation
    • Hiroshige Deguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma generating method, plasma generating apparatus, and plasma p...
    • Publication number 20070193513
    • Publication date Aug 23, 2007
    • NISSIN ION EQUIPMENT CO., LTD.
    • Hiroshige Deguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma generating method, plasma generating apparatus, and plasma p...
    • Publication number 20070193512
    • Publication date Aug 23, 2007
    • NISSIN ELECTRIC CO., LTD. and EMD CORPORATION
    • Hiroshige Deguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma producing method and apparatus as well as plasma processing...
    • Publication number 20070144672
    • Publication date Jun 28, 2007
    • NISSIN ELECTRIC CO., LTD.
    • Kenji Kato
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma producing method and apparatus as well as plasma processing...
    • Publication number 20070095287
    • Publication date May 3, 2007
    • NISSIN ELECTRIC CO., LTD.
    • Kenji Kato
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma generation device, plasma control method, and substrate manu...
    • Publication number 20060049138
    • Publication date Mar 9, 2006
    • Japan Science and Technology Agency
    • Shoji Miyake
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Thin polycrystalline silicon film forming method and thin film form...
    • Publication number 20020192394
    • Publication date Dec 19, 2002
    • NISSIN ELECTRIC CO., LTD.
    • Akinori Ebe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...