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Akinori Iso
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Kanagawa-ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Organic film forming apparatus
Patent number
11,906,246
Issue date
Feb 20, 2024
Shibaura Mechatronics Corporation
Yukinobu Nishibe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Floating conveyor and substrate processing apparatus
Patent number
10,421,622
Issue date
Sep 24, 2019
Shibaura Mechatronics Corporation
Yuichi Imaoka
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
10,325,787
Issue date
Jun 18, 2019
Shibaura Mechatronics Corporation
Konosuke Hayashi
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Apparatus for processing substrate using process solutions having d...
Patent number
6,363,950
Issue date
Apr 2, 2002
Shibaura Mechatronics Corporation
Yukinobu Nishibe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for processing substrate
Patent number
6,299,697
Issue date
Oct 9, 2001
Shibaura Mechatronics Corporation
Yukinobu Nishibe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
MAINTENANCE METHOD AND HEAT TREATMENT APPARATUS
Publication number
20230107154
Publication date
Apr 6, 2023
SHIBAURA MECHATRONICS CORPORATION
Junji ISHIHARA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
HEAT TREATMENT DEVICE
Publication number
20220248502
Publication date
Aug 4, 2022
SHIBAURA MECHATRONICS CORPORATION
Yuichi IMAOKA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ORGANIC FILM FORMING APPARATUS
Publication number
20200310183
Publication date
Oct 1, 2020
SHIBAURA MECHATRONICS CORPORATION
Yukinobu Nishibe
F26 - DRYING
Information
Patent Application
FLOATING CONVEYOR AND SUBSTRATE PROCESSING APPARATUS
Publication number
20180178993
Publication date
Jun 28, 2018
SHIBAURA MECHATRONICS CORPORATION
Yuichi IMAOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING ACID WASTE LIQUID DISPOSAL SYSTEM, ETCHING ACID WASTE LIQUI...
Publication number
20110278261
Publication date
Nov 17, 2011
SHIBAURA MECHATRONICS CORPORATION
Hideki Himi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus for processing substrate using process solutions having d...
Publication number
20010052354
Publication date
Dec 20, 2001
Shibaura Mechatronics Corporation
Yukinobu Nishibe
H01 - BASIC ELECTRIC ELEMENTS