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Akinori MIYATA

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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 10,276,405
    • Issue date Apr 30, 2019
    • Tokyo Electron Limited
    • Akinori Miyata
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20160172217
    • Publication date Jun 16, 2016
    • TOKYO ELECTRON LIMITED
    • Akinori MIYATA
    • H01 - BASIC ELECTRIC ELEMENTS