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Akitaka Makino
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Kudamatsu, JP
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last 30 patents
Information
Patent Grant
Vacuum processing apparatus
Patent number
5,607,510
Issue date
Mar 4, 1997
Hitachi, Ltd.
Akitaka Makino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of and apparatus for securing and cooling/heating a wafer
Patent number
5,458,687
Issue date
Oct 17, 1995
Hitachi, Ltd.
Hiroyuki Shichida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum processing apparatus
Patent number
5,391,260
Issue date
Feb 21, 1995
Hitachi, Ltd.
Akitaka Makino
H01 - BASIC ELECTRIC ELEMENTS