Akiyuki Sugiyama

Person

Hitachinaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Image processor, method for generating pattern using self-organizin...
- Patent number 10,732,512
- Issue date Aug 4, 2020
- HITACHI HIGH-TECH CORPORATION
- Takumichi Sutani
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern measurement device, and computer program for measuring pattern
- Patent number 10,545,018
- Issue date Jan 28, 2020
- Hitachi High-Technologies Corporation
- Satoru Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern measurement device and computer program for evaluating patt...
- Patent number 9,804,107
- Issue date Oct 31, 2017
- Hitachi High-Technologies Corporation
- Akiyuki Sugiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor inspection system
- Patent number 9,704,235
- Issue date Jul 11, 2017
- Hitachi High-Technologies Corporation
- Akiyuki Sugiyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of creating template for matching, as well as device for cre...
- Patent number 8,867,818
- Issue date Oct 21, 2014
- Hitachi High-Technologies Corporation
- Ryoichi Matsuoka
- G01 - MEASURING TESTING
Information Patent Grant
Pattern measurement apparatus
- Patent number 8,788,242
- Issue date Jul 22, 2014
- Hitachi High-Technologies Corporation
- Ryoichi Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus of pattern inspection and semiconductor inspec...
- Patent number 8,577,124
- Issue date Nov 5, 2013
- Hitachi High-Technologies Corporation
- Yasutaka Toyoda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method of image processing, and scanning electron micros...
- Patent number 8,515,153
- Issue date Aug 20, 2013
- Hitachi High-Technologies Corporation
- Akiyuki Sugiyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern measuring method and pattern measuring device
- Patent number 8,507,856
- Issue date Aug 13, 2013
- Hitachi High-Technologies Corporation
- Takumichi Sutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern measurement apparatus
- Patent number 8,445,871
- Issue date May 21, 2013
- Hitachi High-Technologies Corporation
- Ryoichi Matsuoka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern shape evaluation method
- Patent number 8,355,562
- Issue date Jan 15, 2013
- Hitachi High-Technologies Corporation
- Yasutaka Toyoda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sample dimension inspecting/measuring method and sample dimension i...
- Patent number 8,338,804
- Issue date Dec 25, 2012
- Hitachi High-Technologies Corporation
- Hidetoshi Morokuma
- G01 - MEASURING TESTING
Information Patent Grant
Pattern measuring method and pattern measuring device
- Patent number 8,311,314
- Issue date Nov 13, 2012
- Hitachi High-Technologies Corporation
- Ryoichi Matsuoka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for computing degree of matching
- Patent number 8,285,056
- Issue date Oct 9, 2012
- Hitachi High-Technologies Corporation
- Junichi Taguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern matching method and computer program for executing pattern...
- Patent number 8,244,042
- Issue date Aug 14, 2012
- Hitachi High-Technologies Corporation
- Akiyuki Sugiyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern displacement measuring method and pattern measuring device
- Patent number 8,173,962
- Issue date May 8, 2012
- Hitachi High-Technologies Corporation
- Takumichi Sutani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus of pattern inspection and semiconductor inspec...
- Patent number 8,115,169
- Issue date Feb 14, 2012
- Hitachi High-Technologies Corporation
- Yasutaka Toyoda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method of image processing, and scanning electron micros...
- Patent number 8,094,920
- Issue date Jan 10, 2012
- Hitachi High-Technologies Corporation
- Akiyuki Sugiyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method, device and computer program of length measurement
- Patent number 8,019,161
- Issue date Sep 13, 2011
- Hitachi High-Technologies Corporation
- Hidetoshi Morokuma
- G01 - MEASURING TESTING
Information Patent Grant
Pattern search method
- Patent number 7,941,008
- Issue date May 10, 2011
- Hitachi High-Technologies Corporation
- Norio Satou
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sample dimension inspecting/measuring method and sample dimension i...
- Patent number 7,923,703
- Issue date Apr 12, 2011
- Hitachi High-Technologies Corporation
- Hidetoshi Morokuma
- G01 - MEASURING TESTING
Information Patent Grant
Pattern matching method and computer program for executing pattern...
- Patent number 7,925,095
- Issue date Apr 12, 2011
- Hitachi High-Technologies Corporation
- Akiyuki Sugiyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern matching method and pattern matching program
- Patent number 7,889,909
- Issue date Feb 15, 2011
- Hitachi High-Technologies Corporation
- Hiroyuki Shindo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle system
- Patent number 7,772,554
- Issue date Aug 10, 2010
- Hitachi High-Technologies Corporation
- Akiyuki Sugiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern measurement apparatus
- Patent number 7,732,792
- Issue date Jun 8, 2010
- Hitachi High-Technologies Corporation
- Ryoichi Matsuoka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern displacement measuring method and pattern measuring device
- Patent number 7,679,055
- Issue date Mar 16, 2010
- Hitachi High-Technologies Corporation
- Takumichi Sutani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern measuring method and pattern measuring device
- Patent number 7,518,110
- Issue date Apr 14, 2009
- Hitachi High-Technologies Corporation
- Takumichi Sutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of pattern inspection and semiconductor inspec...
- Patent number 7,507,961
- Issue date Mar 24, 2009
- Hitachi High-Technologies Corporation
- Yasutaka Toyoda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Dimension measuring SEM system, method of evaluating shape of circu...
- Patent number 7,449,689
- Issue date Nov 11, 2008
- Hitachi High-Technologies Corporation
- Wataru Nagatomo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Measurement System and Measurement Method
- Publication number 20230314350
- Publication date Oct 5, 2023
- HITACHI HIGH-TECH CORPORATION
- Akiyuki SUGIYAMA
- G01 - MEASURING TESTING
Information Patent Application
Image Processor, Method for Generating Pattern Using Self-Organizin...
- Publication number 20180181009
- Publication date Jun 28, 2018
- Hitachi High-Technologies Corporation
- Takumichi SUTANI
- B82 - NANO-TECHNOLOGY
Information Patent Application
Pattern Measurement Device, and Computer Program for Measuring Pattern
- Publication number 20160320182
- Publication date Nov 3, 2016
- Hitachi High-Technologies Corporation
- Satoru YAMAGUCHI
- G01 - MEASURING TESTING
Information Patent Application
Pattern Measurement Device and Computer Program
- Publication number 20160313266
- Publication date Oct 27, 2016
- Hitachi High-Technologies Corporation
- Akiyuki SUGIYAMA
- G01 - MEASURING TESTING
Information Patent Application
IMAGE PROCESSOR, METHOD FOR GENERATING PATTERN USING SELF- ORGANIZI...
- Publication number 20150277237
- Publication date Oct 1, 2015
- Hitachi High-Technologies Corporation
- Takumichi Sutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR INSPECTION SYSTEM
- Publication number 20140219545
- Publication date Aug 7, 2014
- Hitachi High-Technologies Corporation
- Akiyuki Sugiyama
- G01 - MEASURING TESTING
Information Patent Application
PATTERN SHAPE EVALUATION METHOD, PATTERN SHAPE EVALUATION DEVICE, P...
- Publication number 20130117723
- Publication date May 9, 2013
- Hitachi High-Technologies Corporation
- Yasutaka TOYODA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN MEASURING METHOD AND PATTERN MEASURING DEVICE
- Publication number 20120211653
- Publication date Aug 23, 2012
- Takumichi Sutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CREATING TEMPLATE FOR MATCHING, AS WELL AS DEVICE FOR CRE...
- Publication number 20120121160
- Publication date May 17, 2012
- Hitachi High-Technologies Corporation
- Ryoichi Matsuoka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS OF PATTERN INSPECTION AND SEMICONDUCTOR INSPEC...
- Publication number 20120099781
- Publication date Apr 26, 2012
- Hitachi High-Technologies Corporation
- Yasutaka TOYODA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD OF IMAGE PROCESSING, AND SCANNING ELECTRON MICROS...
- Publication number 20120092483
- Publication date Apr 19, 2012
- Hitachi High-Technolgies Corporation
- Akiyuki SUGIYAMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN MEASUREMENT APPARATUS
- Publication number 20120053892
- Publication date Mar 1, 2012
- Hitachi High-Technologies Corporation
- Ryoichi Matsuoka
- B82 - NANO-TECHNOLOGY
Information Patent Application
SAMPLE DIMENSION INSPECTING/MEASURING METHOD AND SAMPLE DIMENSION I...
- Publication number 20110158543
- Publication date Jun 30, 2011
- Hitachi High-Technologies Corporation
- Hidetoshi Morokuma
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN MATCHING METHOD AND COMPUTER PROGRAM FOR EXECUTING PATTERN...
- Publication number 20110150345
- Publication date Jun 23, 2011
- Hitachi High-Technologies Corporation
- Akiyuki SUGIYAMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN MEASUREMENT APPARATUS
- Publication number 20100202654
- Publication date Aug 12, 2010
- Hitachi High-Technologies Corporation
- Ryoichi MATSUOKA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN DISPLACEMENT MEASURING METHOD AND PATTERN MEASURING DEVICE
- Publication number 20100140472
- Publication date Jun 10, 2010
- Hitachi High-Technologies Corporation
- Takumichi SUTANI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN MEASURING METHOD AND PATTERN MEASURING DEVICE
- Publication number 20090232385
- Publication date Sep 17, 2009
- Ryoichi MATSUOKA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR COMPUTING DEGREE OF MATCHING
- Publication number 20090232405
- Publication date Sep 17, 2009
- Junichi Taguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SAMPLE DIMENSION INSPECTING/MEASURING METHOD AND SAMPLE DIMENSION I...
- Publication number 20090218491
- Publication date Sep 3, 2009
- Hidetoshi Morokuma
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN MEASURING METHOD AND PATTERN MEASURING DEVICE
- Publication number 20090200465
- Publication date Aug 13, 2009
- Takumichi Sutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS OF PATTERN INSPECTION AND SEMICONDUCTOR INSPEC...
- Publication number 20090152463
- Publication date Jun 18, 2009
- Hitachi High-Technologies Corporation
- Yasutaka TOYODA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN SHAPE EVALUATION METHOD, PATTERN SHAPE EVALUATION DEVICE, P...
- Publication number 20090052765
- Publication date Feb 26, 2009
- Hitachi High-Technologies Corporation
- Yasutaka TOYODA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN MEASUREMENT APPARATUS
- Publication number 20090039263
- Publication date Feb 12, 2009
- Ryoichi MATSUOKA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged Particle System
- Publication number 20080245965
- Publication date Oct 9, 2008
- Hitachi High-Technologies Corporation
- Akiyuki Sugiyama
- B82 - NANO-TECHNOLOGY
Information Patent Application
Pattern displacement measuring method and pattern measuring device
- Publication number 20080224035
- Publication date Sep 18, 2008
- Takumichi Sutani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern matching method and computer program for executing pattern...
- Publication number 20080037830
- Publication date Feb 14, 2008
- Akiyuki Sugiyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Workpiece size measurement method and apparatus
- Publication number 20070221842
- Publication date Sep 27, 2007
- Hidetoshi Morokuma
- G01 - MEASURING TESTING
Information Patent Application
Pattern matching method and pattern matching program
- Publication number 20070223803
- Publication date Sep 27, 2007
- Hitachi High-Technologies Corporation
- Hiroyuki Shindo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and method of image processing, and scanning electron micros...
- Publication number 20070092129
- Publication date Apr 26, 2007
- Akiyuki Sugiyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus of pattern inspection and semiconductor inspec...
- Publication number 20070023653
- Publication date Feb 1, 2007
- Yasutaka Toyoda
- G06 - COMPUTING CALCULATING COUNTING

Akiyuki Sugiyama

Person

Patents Grantslast 30 patents

Image processor, method for generating pattern using self-organizin...

Pattern measurement device, and computer program for measuring pattern

Pattern measurement device and computer program for evaluating patt...

Semiconductor inspection system

Method of creating template for matching, as well as device for cre...

Pattern measurement apparatus

Method and apparatus of pattern inspection and semiconductor inspec...

System and method of image processing, and scanning electron micros...

Pattern measuring method and pattern measuring device

Pattern measurement apparatus

Pattern shape evaluation method

Sample dimension inspecting/measuring method and sample dimension i...

Pattern measuring method and pattern measuring device

Method and apparatus for computing degree of matching

Pattern matching method and computer program for executing pattern...

Pattern displacement measuring method and pattern measuring device

Method and apparatus of pattern inspection and semiconductor inspec...

System and method of image processing, and scanning electron micros...

Method, device and computer program of length measurement

Pattern search method

Sample dimension inspecting/measuring method and sample dimension i...

Pattern matching method and computer program for executing pattern...

Pattern matching method and pattern matching program

Charged particle system

Pattern measurement apparatus

Pattern displacement measuring method and pattern measuring device

Pattern measuring method and pattern measuring device

Method and apparatus of pattern inspection and semiconductor inspec...

Dimension measuring SEM system, method of evaluating shape of circu...

Patents Applicationslast 30 patents

Measurement System and Measurement Method

Image Processor, Method for Generating Pattern Using Self-Organizin...

Pattern Measurement Device, and Computer Program for Measuring Pattern

Pattern Measurement Device and Computer Program

IMAGE PROCESSOR, METHOD FOR GENERATING PATTERN USING SELF- ORGANIZI...

SEMICONDUCTOR INSPECTION SYSTEM

PATTERN SHAPE EVALUATION METHOD, PATTERN SHAPE EVALUATION DEVICE, P...

PATTERN MEASURING METHOD AND PATTERN MEASURING DEVICE

METHOD OF CREATING TEMPLATE FOR MATCHING, AS WELL AS DEVICE FOR CRE...

METHOD AND APPARATUS OF PATTERN INSPECTION AND SEMICONDUCTOR INSPEC...

SYSTEM AND METHOD OF IMAGE PROCESSING, AND SCANNING ELECTRON MICROS...

PATTERN MEASUREMENT APPARATUS

SAMPLE DIMENSION INSPECTING/MEASURING METHOD AND SAMPLE DIMENSION I...

PATTERN MATCHING METHOD AND COMPUTER PROGRAM FOR EXECUTING PATTERN...

PATTERN MEASUREMENT APPARATUS

PATTERN DISPLACEMENT MEASURING METHOD AND PATTERN MEASURING DEVICE

PATTERN MEASURING METHOD AND PATTERN MEASURING DEVICE

METHOD AND APPARATUS FOR COMPUTING DEGREE OF MATCHING

SAMPLE DIMENSION INSPECTING/MEASURING METHOD AND SAMPLE DIMENSION I...

PATTERN MEASURING METHOD AND PATTERN MEASURING DEVICE

METHOD AND APPARATUS OF PATTERN INSPECTION AND SEMICONDUCTOR INSPEC...

PATTERN SHAPE EVALUATION METHOD, PATTERN SHAPE EVALUATION DEVICE, P...

PATTERN MEASUREMENT APPARATUS

Charged Particle System

Pattern displacement measuring method and pattern measuring device

Pattern matching method and computer program for executing pattern...

Workpiece size measurement method and apparatus

Pattern matching method and pattern matching program

System and method of image processing, and scanning electron micros...

Method and apparatus of pattern inspection and semiconductor inspec...