Pattern matching method and pattern matching program

Abstract

It is an object of the invention to provide a suitable method for identifying depression/protrusion information in a design data; and a program and an apparatus for the same; for example, even in the case that similar portions are arranged, to provide a method for enabling a pattern matching with high precision between the design data and an image obtained by an image formation apparatus or the like; and a program and an apparatus for the same. To attain the above object, a pattern matching method, wherein, using information concerning a depression and/or a protrusion of the pattern on the design data, or a pattern portion and/or a non-pattern portion on the design data, pattern matching is executed between the pattern on the design data and the pattern on said image; and a program for the same are provided.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a drawing for explaining an outline of a scanning electron microscope.

FIG. 2 is a flowchart for explaining a pattern matching processing between a design data utilizing depression/protrusion information of a pattern, and an image obtained by imaging using a scanning electron microscope, according to one embodiment of the invention.

FIGS. 3A, 3B, 3C, 3D and 3E are drawings for explaining a method for adding depression/protrusion information to a pattern, according to one embodiment of the invention.

FIGS. 4A and 4B are drawings for explaining a technique for center point matching between a pattern prepared from a design data, and a depression, or a protrusion of an image pattern obtained by imaging using a scanning electron microscope, according to one embodiment of the invention.

FIG. 5 is a drawing for explaining a pattern shape comparison for verifying a pattern matching result, according to one embodiment of the invention.

FIGS. 6A, 6B, 6C and 6D are drawings for explaining a pattern matching method utilizing depression/protrusion determination in a striking pattern and a hole pattern, according to one embodiment of the invention.

FIG. 7 is a drawing for explaining an embodiment to cut out a part of a design data of a complicated shape, as a matching pattern.

FIG. 8 is a drawing for explaining an embodiment to display together a design data with low magnification, and a design data with high magnification.

Claims

1. A pattern matching method for executing matching between a pattern on a design data, and a pattern on an image obtained by an image formation apparatus, wherein, using information concerning a depression and/or a protrusion of the pattern on said design data, or a pattern portion and/or a non-pattern portion on said design data, pattern matching is executed between the pattern on the design data, and the pattern on said image.

2. The pattern matching method according to claim 1, wherein the information concerning the depression and/or the protrusion of the pattern on said design data, or the pattern portion and/or the non-pattern portion on said design data is information concerning a direction of lines of said design data.

3. The pattern matching method according to claim 2, wherein, based on the information concerning direction of at least two lines of said design data, whether or not a region defined by the two lines is the depression or the non-pattern portion, or the protrusion or the pattern portion is determined.

4. A computer program product which makes a computer function, so as to execute matching between a pattern on a design data, and a pattern on an image obtained by an image formation apparatus, wherein, using information concerning a depression and/or a protrusion, or a pattern portion and/or a non-pattern portion on said design data, pattern matching is executed between the pattern on the design data, and the pattern on said image.

5. The computer program product according to claim 4, wherein the information concerning the depression and/or the protrusion of the pattern on said design data, or the pattern portion and/or the non-pattern portion on said design data, is information concerning a direction of lines of said design data.

6. The computer program product according to claim 5, wherein, based on the information concerning direction of at least two lines of said design data, whether or not a region defined by the two lines is the depression or the non-pattern portion, or the protrusion or the pattern portion, is determined.